Kazuo Nojiri

Person

Oume, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer etching of GaN and other III-V materials
- Patent number 10,056,264
- Issue date Aug 21, 2018
- Lam Research Corporation
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacture of semiconductor integrated circuit device an...
- Patent number 7,737,023
- Issue date Jun 15, 2010
- Renesas Technology Corporation
- Shouochi Uno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacture of semiconductor integrated circuit
- Patent number 7,419,902
- Issue date Sep 2, 2008
- Renesas Technology Corp.
- Shouochi Uno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for cleaning a substrate
- Patent number 7,288,156
- Issue date Oct 30, 2007
- Lam Research Corporation
- Yoichi Isago
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for processing samples
- Patent number 7,132,293
- Issue date Nov 7, 2006
- Hitachi, Ltd.
- Yoshimi Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning a substrate
- Patent number 7,004,181
- Issue date Feb 28, 2006
- Lam Research Corporation
- Yoichi Isago
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,989,228
- Issue date Jan 24, 2006
- Hitachi, Ltd.
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 6,774,020
- Issue date Aug 10, 2004
- Renesas Technology Corp.
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion current density measuring method and instrument, and semiconduc...
- Patent number 6,656,752
- Issue date Dec 2, 2003
- Hitachi, Ltd.
- Nobuyuki Mise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing samples
- Patent number 6,656,846
- Issue date Dec 2, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor integrated circuit device
- Patent number 6,607,988
- Issue date Aug 19, 2003
- Hitachi, Ltd.
- Takashi Yunogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 6,555,464
- Issue date Apr 29, 2003
- Hitachi, Ltd.
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing samples
- Patent number 6,537,415
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing samples
- Patent number 6,537,417
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 6,528,400
- Issue date Mar 4, 2003
- Hitachi, Ltd.
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit
- Patent number 6,451,665
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Takashi Yunogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for fabricating an integrated circuit device having a capac...
- Patent number 6,432,835
- Issue date Aug 13, 2002
- Hitachi, Ltd.
- Takashi Yunogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 6,340,632
- Issue date Jan 22, 2002
- Hitachi, Ltd.
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor integrated circuit and its manufacturing method
- Patent number 6,326,218
- Issue date Dec 4, 2001
- Hitachi, Ltd.
- Takashi Yunogami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,254,721
- Issue date Jul 3, 2001
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of treating surface of sample
- Patent number 6,191,045
- Issue date Feb 20, 2001
- Hitachi, Ltd.
- Motohiko Yoshigai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and manufacturing method of semiconductor d...
- Patent number 6,186,153
- Issue date Feb 13, 2001
- Hitachi, Ltd.
- Hiroyuki Kitsunai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for processing samples
- Patent number 6,077,788
- Issue date Jun 20, 2000
- Hitachi, Ltd.
- Yoshinao Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a sample having a metal laminate
- Patent number 6,036,816
- Issue date Mar 14, 2000
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing samples
- Patent number 5,952,245
- Issue date Sep 14, 1999
- Hitachi, Ltd.
- Yoshimi Torii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor integrated circuit, method of fabricating the same an...
- Patent number 5,917,211
- Issue date Jun 29, 1999
- Hitachi, Ltd.
- Jun Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing samples
- Patent number 5,868,854
- Issue date Feb 9, 1999
- Hitachi, Ltd.
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor integrated circuit, method of fabricating the same an...
- Patent number 5,734,188
- Issue date Mar 31, 1998
- Hitachi, Ltd.
- Jun Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for fabricating a semiconductor integrated circuit device h...
- Patent number 5,661,061
- Issue date Aug 26, 1997
- Hitachi, Ltd.
- Hirohisa Usuami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator with mode restricting means
- Patent number 5,646,489
- Issue date Jul 8, 1997
- Hitachi, Ltd.
- Yutaka Kakehi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS
- Publication number 20160358782
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Wenbing Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AN...
- Publication number 20090011592
- Publication date Jan 8, 2009
- Shouichi Uno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing samples
- Publication number 20070037292
- Publication date Feb 15, 2007
- Masayuki Kojima
- G01 - MEASURING TESTING
Information Patent Application
Methods for cleaning a substrate
- Publication number 20060112974
- Publication date Jun 1, 2006
- Yoichi Isago
- B08 - CLEANING
Information Patent Application
Method of manufacture of semiconductor integrated circuit
- Publication number 20050186801
- Publication date Aug 25, 2005
- Shouochi Uno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing samples
- Publication number 20040219687
- Publication date Nov 4, 2004
- Yoshimi Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion current density measuring method and instrument, and semiconduc...
- Publication number 20040092044
- Publication date May 13, 2004
- Nobuyuki Mise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Water supply apparatus and method thereof
- Publication number 20030217762
- Publication date Nov 27, 2003
- LAM RESEARCH CORPORATION
- Naoaki Kobayashi
- B08 - CLEANING
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20030139031
- Publication date Jul 24, 2003
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Water supplying apparatus and water supplying method
- Publication number 20030041881
- Publication date Mar 6, 2003
- Yoichi Isago
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20020127848
- Publication date Sep 12, 2002
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing a semiconductor device
- Publication number 20020076921
- Publication date Jun 20, 2002
- Shinichi Fukada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for processing samples
- Publication number 20020043339
- Publication date Apr 18, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for processing samples
- Publication number 20020043340
- Publication date Apr 18, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for processing samples
- Publication number 20020023720
- Publication date Feb 28, 2002
- Masayuki Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing samples
- Publication number 20020013063
- Publication date Jan 31, 2002
- Masayuki Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor integrated circuit device
- Publication number 20010006245
- Publication date Jul 5, 2001
- Takashi Yunogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kazuo Nojiri

Person

Patents Grantslast 30 patents

Atomic layer etching of GaN and other III-V materials

Method of manufacture of semiconductor integrated circuit device an...

Method of manufacture of semiconductor integrated circuit

Methods for cleaning a substrate

Method and apparatus for processing samples

Apparatus for cleaning a substrate

Method and apparatus for processing samples

Semiconductor device and method of manufacturing the same

Ion current density measuring method and instrument, and semiconduc...

Apparatus for processing samples

Manufacturing method of semiconductor integrated circuit device

Semiconductor device and method of manufacturing the same

Apparatus for processing samples

Apparatus for processing samples

Method of manufacturing a semiconductor device

Method of manufacturing a semiconductor integrated circuit

Process for fabricating an integrated circuit device having a capac...

Method of manufacturing a semiconductor device

Semiconductor integrated circuit and its manufacturing method

Method and apparatus for processing samples

Method of treating surface of sample

Plasma treatment method and manufacturing method of semiconductor d...

Method and apparatus for processing samples

Apparatus for processing a sample having a metal laminate

Method for processing samples

Semiconductor integrated circuit, method of fabricating the same an...

Method and apparatus for processing samples

Semiconductor integrated circuit, method of fabricating the same an...

Process for fabricating a semiconductor integrated circuit device h...

Plasma generator with mode restricting means

Patents Applicationslast 30 patents

ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS

METHOD OF MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AN...

Method and apparatus for processing samples

Methods for cleaning a substrate

Method of manufacture of semiconductor integrated circuit

Method and apparatus for processing samples

Ion current density measuring method and instrument, and semiconduc...

Water supply apparatus and method thereof

Semiconductor device and method of manufacturing the same

Water supplying apparatus and water supplying method

Semiconductor device and method of manufacturing the same

Method of manufacturing a semiconductor device

Apparatus for processing samples

Apparatus for processing samples

Apparatus for processing samples

Method and apparatus for processing samples

Manufacturing method of semiconductor integrated circuit device