Kazutaka Yanagita

Person

Tsukuba, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Precursor supply system and precursors supply method
- Patent number 11,819,838
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Toshiyuki Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition of silicon-containing films using penta-substitute...
- Patent number 9,633,838
- Issue date Apr 25, 2017
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,548,198
- Issue date Jan 17, 2017
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device, substrate processin...
- Patent number 9,396,929
- Issue date Jul 19, 2016
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,343,290
- Issue date May 17, 2016
- Hitachi Kokusai Electric, Inc.
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal heterocyclic compounds for deposition of thin films
- Patent number 9,109,281
- Issue date Aug 18, 2015
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adsorbent for removing metal compounds and method for same
- Patent number 9,000,201
- Issue date Apr 7, 2015
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yoichi Sakata
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 8,815,751
- Issue date Aug 26, 2014
- Hitachi Kokusai Electric Inc.
- Yoshiro Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal heterocyclic compounds for deposition of thin films
- Patent number 8,636,845
- Issue date Jan 28, 2014
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon oxide containing films
- Patent number 8,613,976
- Issue date Dec 24, 2013
- L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bubbling supply system for stable precursor supply
- Patent number 8,348,248
- Issue date Jan 8, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Yoichi Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon oxide containing films
- Patent number 8,227,032
- Issue date Jul 24, 2012
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tellurium precursors for film deposition
- Patent number 8,101,237
- Issue date Jan 24, 2012
- L'Air Liquide SociétéAnonyme pour I'Etude et I'Exploitation des Procédés Geor...
- Shingo Okubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursor for film formation and method for forming ruthenium-conta...
- Patent number 7,544,389
- Issue date Jun 9, 2009
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing silicon nitride films and process for fabricat...
- Patent number 7,351,670
- Issue date Apr 1, 2008
- L'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance pour l...
- Takeshi Hoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS
- Publication number 20240052484
- Publication date Feb 15, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...
- Publication number 20210371977
- Publication date Dec 2, 2021
- L'Air Liquide, Société Anonyme pour l'Etude et I'Exploitation des Procédés Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...
- Publication number 20200362456
- Publication date Nov 19, 2020
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSOR SUPPLY SYSTEM AND PRECURSORS SUPPLY METHOD
- Publication number 20190134586
- Publication date May 9, 2019
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Toshiyuki NAKAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUT...
- Publication number 20190027357
- Publication date Jan 24, 2019
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...
- Publication number 20170186597
- Publication date Jun 29, 2017
- Jean-Marc GIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...
- Publication number 20160111272
- Publication date Apr 21, 2016
- Jean-Marc GIRARD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140287598
- Publication date Sep 25, 2014
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20140287596
- Publication date Sep 25, 2014
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS
- Publication number 20140119977
- Publication date May 1, 2014
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Julien GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSIN...
- Publication number 20140080318
- Publication date Mar 20, 2014
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20130149872
- Publication date Jun 13, 2013
- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEO...
- Yoshiro HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BUBBLING SUPPLY SYSTEM FOR STABLE PRECURSOR SUPPLY
- Publication number 20130092241
- Publication date Apr 18, 2013
- L'Air Liquide, Societe Anonyme pour l'Elude et l'Exploitation des Procedes Ge...
- Yoichi SAKATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO...
- Publication number 20130078376
- Publication date Mar 28, 2013
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Katsuko Higashino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADSORBENT FOR REMOVING METAL COMPOUNDS AND METHOD FOR SAME
- Publication number 20130066094
- Publication date Mar 14, 2013
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Yoichi Sakata
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD OF FORMING SILICON OXIDE CONTAINING FILMS
- Publication number 20120276292
- Publication date Nov 1, 2012
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BUBBLING SUPPLY SYSTEM FOR STABLE PRECURSOR SUPPLY
- Publication number 20100230834
- Publication date Sep 16, 2010
- Yoichi SAKATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD OF TERNARY FILMS
- Publication number 20100104755
- Publication date Apr 29, 2010
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS
- Publication number 20090321733
- Publication date Dec 31, 2009
- Julien GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TELLURIUM PRECURSORS FOR FILM DEPOSITION
- Publication number 20090299084
- Publication date Dec 3, 2009
- Shingo OKUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON OXIDE CONTAINING FILMS
- Publication number 20090232985
- Publication date Sep 17, 2009
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GERMANIUM PRECURSORS FOR GST FILM DEPOSITION
- Publication number 20090162973
- Publication date Jun 25, 2009
- Julien GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF TRANSITION METAL CARBIDE CONTAINING FILMS
- Publication number 20080268642
- Publication date Oct 30, 2008
- Kazutaka Yanagita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Cleaning Film-Forming Apparatuses
- Publication number 20080121249
- Publication date May 29, 2008
- Julien Gatineau
- B08 - CLEANING
Information Patent Application
Precursor For Film Formation And Method For Forming Ruthenium-Conta...
- Publication number 20080038465
- Publication date Feb 14, 2008
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing silicon nitride films and process for fabricat...
- Publication number 20050158983
- Publication date Jul 21, 2005
- Takeshi Hoshi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kazutaka Yanagita

Person

Patents Grantslast 30 patents

Precursor supply system and precursors supply method

Vapor deposition of silicon-containing films using penta-substitute...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing a semiconductor device, substrate processin...

Method of manufacturing semiconductor device, substrate processing...

Metal heterocyclic compounds for deposition of thin films

Adsorbent for removing metal compounds and method for same

Method of manufacturing semiconductor device, method of processing...

Metal heterocyclic compounds for deposition of thin films

Method of forming silicon oxide containing films

Bubbling supply system for stable precursor supply

Method of forming silicon oxide containing films

Tellurium precursors for film deposition

Precursor for film formation and method for forming ruthenium-conta...

Method for producing silicon nitride films and process for fabricat...

Patents Applicationslast 30 patents

SUPPLY SYSTEM FOR LOW VOLATILITY PRECURSORS

SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...

SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT IN WHICH SAID S...

PRECURSOR SUPPLY SYSTEM AND PRECURSORS SUPPLY METHOD

VAPOR DISPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUT...

VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...

VAPOR DEPOSITION OF SILICON-CONTAINING FILMS USING PENTA-SUBSTITUTE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSIN...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

BUBBLING SUPPLY SYSTEM FOR STABLE PRECURSOR SUPPLY

METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO...

ADSORBENT FOR REMOVING METAL COMPOUNDS AND METHOD FOR SAME

METHOD OF FORMING SILICON OXIDE CONTAINING FILMS

BUBBLING SUPPLY SYSTEM FOR STABLE PRECURSOR SUPPLY

DEPOSITION METHOD OF TERNARY FILMS

METAL HETEROCYCLIC COMPOUNDS FOR DEPOSITION OF THIN FILMS

TELLURIUM PRECURSORS FOR FILM DEPOSITION

METHOD OF FORMING SILICON OXIDE CONTAINING FILMS

GERMANIUM PRECURSORS FOR GST FILM DEPOSITION

DEPOSITION OF TRANSITION METAL CARBIDE CONTAINING FILMS

Method for Cleaning Film-Forming Apparatuses

Precursor For Film Formation And Method For Forming Ruthenium-Conta...

Method for producing silicon nitride films and process for fabricat...