Kazuto Fukuma

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Boron phosphorus silicate glass composite layer on semiconductor wafer
- Patent number 5,354,387
- Issue date Oct 11, 1994
- Applied Materials, Inc.
- Peter W. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two step process for forming void-free oxide layer over stepped sur...
- Patent number 5,314,845
- Issue date May 24, 1994
- Applied Materials, Inc.
- Peter W. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a boron phosphorus silicate glass composite laye...
- Patent number 5,166,101
- Issue date Nov 24, 1992
- Applied Materials, Inc.
- Peter W. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...