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Kazutoshi Yoshioka
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Coating apparatus
Patent number
6,551,400
Issue date
Apr 22, 2003
Tokyo Electron Limited
Keizo Hasbe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
6,503,003
Issue date
Jan 7, 2003
Tokyo Electron Limited
Keizo Hasebe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Coating a resist film, with pretesting for particle contamination
Patent number
6,268,013
Issue date
Jul 31, 2001
Tokyo Electron Limited
Masami Akimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Baking apparatus and baking method
Patent number
6,261,744
Issue date
Jul 17, 2001
Tokyo Electron Limited
Kazutoshi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
6,228,561
Issue date
May 8, 2001
Tokyo Electron Limited
Keizo Hasebe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist-processing apparatus
Patent number
6,168,667
Issue date
Jan 2, 2001
Tokyo Electron Limited
Kazutoshi Yoshioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for coating resist and developing the coated resist
Patent number
6,051,349
Issue date
Apr 18, 2000
Tokyo Electron Limited
Kazutoshi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Baking apparatus and baking method
Patent number
6,002,108
Issue date
Dec 14, 1999
Tokyo Electron Limited
Kazutoshi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for coating resist and developing the coated r...
Patent number
5,968,691
Issue date
Oct 19, 1999
Tokyo Electron Limited
Kazutoshi Yoshioka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for coating a film on an object being processed
Patent number
5,938,847
Issue date
Aug 17, 1999
Tokyo Electron Limited
Masami Akimoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method for processing wafer-shaped substrates
Patent number
5,460,478
Issue date
Oct 24, 1995
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing wafer-shaped substrates
Patent number
5,364,222
Issue date
Nov 15, 1994
Tokyo Electron Limited
Masami Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transportation-transfer device for an object of treatment
Patent number
5,297,910
Issue date
Mar 29, 1994
Tokyo Electron Limited
Kazutoshi Yoshioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of ashing layers, and apparatus for ashing layers
Patent number
4,812,201
Issue date
Mar 14, 1989
Tokyo Electron Limited
Hiroyuki Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20010014224
Publication date
Aug 16, 2001
Keizo Hasebe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Film forming method and film forming apparatus
Publication number
20010009135
Publication date
Jul 26, 2001
Keizo Hasebe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...