Kazuya Ota

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask protection device, exposure apparatus, and method for manufact...
- Patent number 10,234,766
- Issue date Mar 19, 2019
- Nikon Corporation
- Kazuya Ota
- G02 - OPTICS
Information Patent Grant
Particle detection method, particle detection device and particle d...
- Patent number 10,113,948
- Issue date Oct 30, 2018
- The University of Tokyo
- Takanori Ichiki
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Mask protection device, exposure apparatus, and method for manufact...
- Patent number 9,715,175
- Issue date Jul 25, 2017
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photocatalyst composition
- Patent number 7,211,543
- Issue date May 1, 2007
- Asahi Kasei Kabushiki Kaisha
- Akira Nakabayashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Exposure apparatus and method
- Patent number 7,177,008
- Issue date Feb 13, 2007
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, method of making exposure apparatus,...
- Patent number 6,813,002
- Issue date Nov 2, 2004
- Nikon Corporation
- Kazuya Ota
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and an exposure method
- Patent number 6,798,491
- Issue date Sep 28, 2004
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for pattern exposure and method for adjusting...
- Patent number 6,727,980
- Issue date Apr 27, 2004
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for exposure, and device manufacturing method
- Patent number 6,699,630
- Issue date Mar 2, 2004
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,645,701
- Issue date Nov 11, 2003
- Nikon Corporation
- Kazuya Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro devices manufacturing method utilizing concave and convex ali...
- Patent number 6,641,962
- Issue date Nov 4, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,594,334
- Issue date Jul 15, 2003
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,590,634
- Issue date Jul 8, 2003
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,566,022
- Issue date May 20, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and an exposure method
- Patent number 6,549,269
- Issue date Apr 15, 2003
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method and method for manufacturing de...
- Patent number 6,549,270
- Issue date Apr 15, 2003
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position transducer and exposure apparatus with same
- Patent number 6,535,272
- Issue date Mar 18, 2003
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,485,153
- Issue date Nov 26, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and exposure apparatus
- Patent number 6,483,569
- Issue date Nov 19, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method for a projection optical system
- Patent number 6,406,820
- Issue date Jun 18, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and method
- Patent number 6,400,441
- Issue date Jun 4, 2002
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system
- Patent number 6,388,735
- Issue date May 14, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method for producing the same, and exposure method
- Patent number 6,359,678
- Issue date Mar 19, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 6,341,007
- Issue date Jan 22, 2002
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,306,548
- Issue date Oct 23, 2001
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system
- Patent number 6,249,336
- Issue date Jun 19, 2001
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure system
- Patent number 6,236,448
- Issue date May 22, 2001
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method utilizing pre-exposure reduction of substrate tempe...
- Patent number 6,228,544
- Issue date May 8, 2001
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus in projection exposure apparatus
- Patent number 6,153,886
- Issue date Nov 28, 2000
- Nikon Corporation
- Shigeru Hagiwara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Micro devices manufacturing method and apparatus therefor
- Patent number 6,110,021
- Issue date Aug 29, 2000
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MASK PROTECTION DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20170285484
- Publication date Oct 5, 2017
- Nikon Corporation
- Kazuya Ota
- G02 - OPTICS
Information Patent Application
PARTICLE DETECTION METHOD, PARTICLE DETECTION DEVICE AND PARTICLE D...
- Publication number 20170219477
- Publication date Aug 3, 2017
- THE UNIVERSITY OF TOKYO
- Takanori ICHIKI
- G01 - MEASURING TESTING
Information Patent Application
MASK PROTECTION DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20150131069
- Publication date May 14, 2015
- Nikon Corporation
- Kazuya Ota
- G02 - OPTICS
Information Patent Application
Photocatalyst composition
- Publication number 20050227859
- Publication date Oct 13, 2005
- Akira Nakabayashi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Exposure apparatus and method
- Publication number 20040233407
- Publication date Nov 25, 2004
- Nikon Corporation
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reduced-stress, electrostatically chuckable reticles for use in ext...
- Publication number 20040067420
- Publication date Apr 8, 2004
- NIKON CORPORATION
- Kazuya Ota
- B82 - NANO-TECHNOLOGY
Information Patent Application
Devices and methods for cooling optical elements in optical systems...
- Publication number 20040051984
- Publication date Mar 18, 2004
- NIKON CORPORATION
- Tetsuya Oshino
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND AN EXPOSURE METHOD
- Publication number 20040032575
- Publication date Feb 19, 2004
- NIKON CORPORATION
- Kenji Nishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus, method of making exposure apparatus,...
- Publication number 20030169411
- Publication date Sep 11, 2003
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICRO DEVICES MANUFACTURING METHOD UTILIZING CONCAVE AND CONVEX ALI...
- Publication number 20030157416
- Publication date Aug 21, 2003
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for exposure, and device manufacturing method
- Publication number 20020146628
- Publication date Oct 10, 2002
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and apparatus, method of making exposure apparatus,...
- Publication number 20020070355
- Publication date Jun 13, 2002
- Nikon Corporation
- Kazuya Ota
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Apparatus and method for pattern exposure and method for adjusting...
- Publication number 20020041368
- Publication date Apr 11, 2002
- NIKON CORPORATION
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Micro devices manufacturing method and apparatus therefor
- Publication number 20020001761
- Publication date Jan 3, 2002
- Nikon Corporation
- Shinji Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position transducer and exposure apparatus with same
- Publication number 20010046037
- Publication date Nov 29, 2001
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and exposure apparatus
- Publication number 20010043314
- Publication date Nov 22, 2001
- NIKON CORPORATION
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position transducer and exposure apparatus with same
- Publication number 20010026357
- Publication date Oct 4, 2001
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Mask protection device, exposure apparatus, and method for manufact...

Particle detection method, particle detection device and particle d...

Mask protection device, exposure apparatus, and method for manufact...

Photocatalyst composition

Exposure apparatus and method

Exposure method and apparatus, method of making exposure apparatus,...

Exposure apparatus and an exposure method

Apparatus and method for pattern exposure and method for adjusting...

Method and apparatus for exposure, and device manufacturing method

Exposure method and exposure apparatus

Micro devices manufacturing method utilizing concave and convex ali...

Exposure method and exposure apparatus

Exposure apparatus and method

Micro devices manufacturing method and apparatus therefor

Exposure apparatus and an exposure method

Exposure apparatus, exposure method and method for manufacturing de...

Position transducer and exposure apparatus with same

Exposure apparatus and method

Exposure method and exposure apparatus

Exposure method for a projection optical system

Projection exposure apparatus and method

Projection exposure system

Exposure apparatus, method for producing the same, and exposure method

Exposure apparatus and method

Micro devices manufacturing method and apparatus therefor

Projection exposure system

Projection exposure system

Exposure method utilizing pre-exposure reduction of substrate tempe...

Alignment apparatus in projection exposure apparatus

Micro devices manufacturing method and apparatus therefor

Patents Applicationslast 30 patents

MASK PROTECTION DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACT...

PARTICLE DETECTION METHOD, PARTICLE DETECTION DEVICE AND PARTICLE D...

MASK PROTECTION DEVICE, EXPOSURE APPARATUS, AND METHOD FOR MANUFACT...

Photocatalyst composition

Exposure apparatus and method

Reduced-stress, electrostatically chuckable reticles for use in ext...

Devices and methods for cooling optical elements in optical systems...

EXPOSURE APPARATUS AND AN EXPOSURE METHOD

Exposure method and apparatus, method of making exposure apparatus,...

MICRO DEVICES MANUFACTURING METHOD UTILIZING CONCAVE AND CONVEX ALI...

Method and apparatus for exposure, and device manufacturing method

Exposure method and apparatus, method of making exposure apparatus,...

Apparatus and method for pattern exposure and method for adjusting...

Micro devices manufacturing method and apparatus therefor

Position transducer and exposure apparatus with same

Exposure method and exposure apparatus

Position transducer and exposure apparatus with same