Kazuyoshi Oonuki

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Mito-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam drawing process and electron beam drawing apparatus
- Patent number 6,337,486
- Issue date Jan 8, 2002
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing apparatus
- Patent number 6,246,064
- Issue date Jun 12, 2001
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing apparatus
- Patent number 6,127,683
- Issue date Oct 3, 2000
- Hitachi, Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam drawing process
- Patent number 5,972,772
- Issue date Oct 26, 1999
- Hitachi Ltd.
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Electron beam drawing process and electron beam drawing apparatus
- Publication number 20010015413
- Publication date Aug 23, 2001
- Hitachi, Ltd
- Minoru Sasaki
- B82 - NANO-TECHNOLOGY