Kazuyuki Mitsuoka

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
High-pressure container, substrate processing apparatus, and method...
- Patent number 10,207,349
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 10,199,240
- Issue date Feb 5, 2019
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separation and regeneration apparatus and substrate processing appa...
- Patent number 10,115,609
- Issue date Oct 30, 2018
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 10,096,462
- Issue date Oct 9, 2018
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 10,046,370
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 9,953,840
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,881,784
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 9,662,685
- Issue date May 30, 2017
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 9,583,330
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Linan Ji
- F26 - DRYING
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 8,771,429
- Issue date Jul 8, 2014
- Kabushiki Kaisha Toshiba
- Linan Ji
- F26 - DRYING
Information Patent Grant
Supercritical processing apparatus and supercritical processing method
- Patent number 8,465,596
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Takayuki Toshima
- B08 - CLEANING
Information Patent Grant
Supercritical drying method and apparatus for semiconductor substrates
- Patent number 8,372,212
- Issue date Feb 12, 2013
- Kabushiki Kaisha Toshiba
- Yohei Sato
- F26 - DRYING
Information Patent Grant
Pattern forming method and method of manufacturing semiconductor de...
- Patent number 8,168,377
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing an organic-film
- Patent number 7,521,098
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Change rate prediction method, storage medium, and substrate proces...
- Patent number 7,473,567
- Issue date Jan 6, 2009
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam processing method and apparatus
- Patent number 7,348,129
- Issue date Mar 25, 2008
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film processing method and system
- Patent number 7,195,936
- Issue date Mar 27, 2007
- Tokyo Electron Limited
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing apparatus
- Patent number 7,005,660
- Issue date Feb 28, 2006
- Tokyo Electron Limited
- Minoru Honda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20170320107
- Publication date Nov 9, 2017
- TOKYO ELECTRON LIMITED
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170186620
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20170076938
- Publication date Mar 16, 2017
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20170011907
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20160118242
- Publication date Apr 28, 2016
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- B08 - CLEANING
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258466
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258465
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...
- Publication number 20150258584
- Publication date Sep 17, 2015
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B08 - CLEANING
Information Patent Application
HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20140145390
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20140020721
- Publication date Jan 23, 2014
- Hidekazu HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20130333726
- Publication date Dec 19, 2013
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...
- Publication number 20130019905
- Publication date Jan 24, 2013
- Linan JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20120304485
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20120247516
- Publication date Oct 4, 2012
- Yohei SATO
- F26 - DRYING
Information Patent Application
SUPERCRITICAL PROCESSING APPARATUS AND SUPERCRITICAL PROCESSING METHOD
- Publication number 20110214694
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Takayuki TOSHIMA
- B08 - CLEANING
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20090220898
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Kazuyuki MITSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHANGE RATE PREDICTION METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCES...
- Publication number 20070231459
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Kazuyuki MITSUOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of processing an organic-film
- Publication number 20050042388
- Publication date Feb 24, 2005
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam processing method and apparatus
- Publication number 20040248040
- Publication date Dec 9, 2004
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface processing apparatus
- Publication number 20040222388
- Publication date Nov 11, 2004
- TOKYO ELECTRON LIMITED
- Minoru Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin film processing method and system
- Publication number 20040137760
- Publication date Jul 15, 2004
- TOKYO ELECTRON LIMITED
- Tadashi Onishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kazuyuki Mitsuoka

Person

Patents Grantslast 30 patents

High-pressure container, substrate processing apparatus, and method...

Substrate processing method, substrate processing apparatus, and st...

Separation and regeneration apparatus and substrate processing appa...

Substrate processing method and storage medium

Substrate processing apparatus, substrate processing method, fluid...

Substrate processing method and substrate processing system

Substrate processing method, substrate processing apparatus, and st...

Substrate processing apparatus, substrate processing method, fluid...

Supercritical drying method for semiconductor substrate and supercr...

Supercritical drying method for semiconductor substrate and supercr...

Supercritical processing apparatus and supercritical processing method

Supercritical drying method and apparatus for semiconductor substrates

Pattern forming method and method of manufacturing semiconductor de...

Method of processing an organic-film

Change rate prediction method, storage medium, and substrate proces...

Electron beam processing method and apparatus

Thin film processing method and system

Surface processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

SEPARATION AND REGENERATION APPARATUS AND SUBSTRATE PROCESSING APPA...

HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES

SUPERCRITICAL PROCESSING APPARATUS AND SUPERCRITICAL PROCESSING METHOD

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

CHANGE RATE PREDICTION METHOD, STORAGE MEDIUM, AND SUBSTRATE PROCES...

Method of processing an organic-film

Electron beam processing method and apparatus

Surface processing apparatus

Thin film processing method and system