Kegang Huang

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for CMOS-MEMS integrated devices with multiple sealed cavit...
- Patent number 10,850,973
- Issue date Dec 1, 2020
- Invensense, Inc.
- Michael Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for CMOS-MEMS integrated devices with multiple sealed cavit...
- Patent number 10,532,926
- Issue date Jan 14, 2020
- Invensense, Inc.
- Michael Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for CMOS-MEMS integrated devices with multiple sealed cavit...
- Patent number 9,540,230
- Issue date Jan 10, 2017
- Invensense, Inc.
- Michael Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Internal electrical contact for enclosed MEMS devices
- Patent number 9,221,676
- Issue date Dec 29, 2015
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Internal electrical contact for enclosed MEMS devices
- Patent number 8,945,969
- Issue date Feb 3, 2015
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Internal electrical contact for enclosed MEMS devices
- Patent number 8,822,252
- Issue date Sep 2, 2014
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Internal electrical contact for enclosed MEMS devices
- Patent number 8,564,076
- Issue date Oct 22, 2013
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS devices with controlled pressure environments by me...
- Patent number 8,513,747
- Issue date Aug 20, 2013
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS devices with controlled pressure environments by me...
- Patent number 8,350,346
- Issue date Jan 8, 2013
- Invensense, Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating reflective spatial light modulator having hig...
- Patent number 7,923,789
- Issue date Apr 12, 2011
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Grant
Reflective spatial light modulator having dual layer electrodes and...
- Patent number 7,911,678
- Issue date Mar 22, 2011
- Miradia, Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Grant
Reduction of hillocks prior to dielectric barrier deposition in Cu...
- Patent number 7,723,228
- Issue date May 25, 2010
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for manufacturing bonded substrates using mult...
- Patent number 7,678,288
- Issue date Mar 16, 2010
- Miradia Inc.
- Xiao Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for forming an integrated spatial light modulator
- Patent number 7,670,880
- Issue date Mar 2, 2010
- Miradia Inc.
- Xiao Yang
- G02 - OPTICS
Information Patent Grant
Semiconductor etching process to release single crystal silicon mir...
- Patent number 7,666,319
- Issue date Feb 23, 2010
- Miradia Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reflective spatial light modulator having dual layer electrodes and...
- Patent number 7,477,440
- Issue date Jan 13, 2009
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Grant
Method of fabricating reflective spatial light modulator having hig...
- Patent number 7,374,962
- Issue date May 20, 2008
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Grant
Reduction of hillocks prior to dielectric barrier deposition in Cu...
- Patent number 7,371,427
- Issue date May 13, 2008
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for treating low k dielectric layers to reduce...
- Patent number 6,794,311
- Issue date Sep 21, 2004
- Applied Materials Inc.
- Kegang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a transistor, in particular spacers of the transistor
- Patent number 6,566,183
- Issue date May 20, 2003
- Steven A. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a silicon nitride layer on a substrate
- Patent number 6,559,074
- Issue date May 6, 2003
- Applied Materials, Inc.
- Steven A. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...
- Publication number 20200109045
- Publication date Apr 9, 2020
- InvenSense, Inc.
- Michael DANEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRIC CONNECTION FLEXURES
- Publication number 20170359003
- Publication date Dec 14, 2017
- MEMS DRIVE, INC.
- XIAOLEI LIU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...
- Publication number 20170297907
- Publication date Oct 19, 2017
- InvenSense, Inc.
- Michael DANEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES
- Publication number 20150336792
- Publication date Nov 26, 2015
- InvenSense, Inc.
- Kegang HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES
- Publication number 20140349434
- Publication date Nov 27, 2014
- Kegang HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE
- Publication number 20140264655
- Publication date Sep 18, 2014
- InvenSense, Inc.
- Kirt Reed WILLIAMS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES
- Publication number 20140213007
- Publication date Jul 31, 2014
- InvenSense, Inc.
- Kegang HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...
- Publication number 20120326248
- Publication date Dec 27, 2012
- INVENSENSE, INC.
- Michael DANEMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PREVENTING STICTION OF MEMS DEVICES
- Publication number 20120313189
- Publication date Dec 13, 2012
- INVENSENSE, INC.
- Kegang HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REFLECTIVE SPATIAL LIGHT MODULATOR HAVING DUAL LAYER ELECTRODES AND...
- Publication number 20090195854
- Publication date Aug 6, 2009
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Application
METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIG...
- Publication number 20080192325
- Publication date Aug 14, 2008
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Application
REDUCTION OF HILLOCKS PRIOR TO DIELECTRIC BARRIER DEPOSITION IN CU...
- Publication number 20080075888
- Publication date Mar 27, 2008
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIG...
- Publication number 20070287214
- Publication date Dec 13, 2007
- Miradia Inc.
- Kegang Huang
- G02 - OPTICS
Information Patent Application
METHOD AND STRUCTURE FOR FORMING AN INTEGRATED SPATIAL LIGHT MODULATOR
- Publication number 20070128771
- Publication date Jun 7, 2007
- Miradia Inc.
- Xiao Yang
- G02 - OPTICS
Information Patent Application
Method and structure for manufacturing bonded substrates using mult...
- Publication number 20060121373
- Publication date Jun 8, 2006
- Miradia Inc.
- Xiao Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reduction of hillocks prior to dielectric barrier deposition in Cu...
- Publication number 20040231795
- Publication date Nov 25, 2004
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reduction of hillocks prior to dielectric barrier deposition in Cu...
- Publication number 20040235292
- Publication date Nov 25, 2004
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE DEPOSITION FOR USE AS A BARRIER LAYER AND AN ETCH STOP
- Publication number 20030089992
- Publication date May 15, 2003
- SUDHA RATHI
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for treating low k dielectric layers to reduce...
- Publication number 20020016085
- Publication date Feb 7, 2002
- Kegang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kegang Huang

Person

Patents Grantslast 30 patents

Methods for CMOS-MEMS integrated devices with multiple sealed cavit...

Methods for CMOS-MEMS integrated devices with multiple sealed cavit...

Methods for CMOS-MEMS integrated devices with multiple sealed cavit...

Internal electrical contact for enclosed MEMS devices

Internal electrical contact for enclosed MEMS devices

Internal electrical contact for enclosed MEMS devices

Internal electrical contact for enclosed MEMS devices

Integrated MEMS devices with controlled pressure environments by me...

Integrated MEMS devices with controlled pressure environments by me...

Method of fabricating reflective spatial light modulator having hig...

Reflective spatial light modulator having dual layer electrodes and...

Reduction of hillocks prior to dielectric barrier deposition in Cu...

Method and structure for manufacturing bonded substrates using mult...

Method and structure for forming an integrated spatial light modulator

Semiconductor etching process to release single crystal silicon mir...

Reflective spatial light modulator having dual layer electrodes and...

Method of fabricating reflective spatial light modulator having hig...

Reduction of hillocks prior to dielectric barrier deposition in Cu...

Method and apparatus for treating low k dielectric layers to reduce...

Method of making a transistor, in particular spacers of the transistor

Method of forming a silicon nitride layer on a substrate

Patents Applicationslast 30 patents

METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...

ELECTRIC CONNECTION FLEXURES

METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...

INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES

INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES

SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE

INTERNAL ELECTRICAL CONTACT FOR ENCLOSED MEMS DEVICES

METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVIT...

METHOD OF PREVENTING STICTION OF MEMS DEVICES

REFLECTIVE SPATIAL LIGHT MODULATOR HAVING DUAL LAYER ELECTRODES AND...

METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIG...

REDUCTION OF HILLOCKS PRIOR TO DIELECTRIC BARRIER DEPOSITION IN CU...

METHOD OF FABRICATING REFLECTIVE SPATIAL LIGHT MODULATOR HAVING HIG...

METHOD AND STRUCTURE FOR FORMING AN INTEGRATED SPATIAL LIGHT MODULATOR

Method and structure for manufacturing bonded substrates using mult...

Reduction of hillocks prior to dielectric barrier deposition in Cu...

Reduction of hillocks prior to dielectric barrier deposition in Cu...

SILICON CARBIDE DEPOSITION FOR USE AS A BARRIER LAYER AND AN ETCH STOP

Method and apparatus for treating low k dielectric layers to reduce...