Keigo Kobayashi

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ceramic coating member for semiconductor processing apparatus
- Patent number 7,648,782
- Issue date Jan 19, 2010
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PRODUCING CERAMIC SPRAY-COATED MEMBER, PROGRAM FOR CONDUC...
- Publication number 20100068395
- Publication date Mar 18, 2010
- TOKYO ELECTRON LIMITED
- Tsuyoshi MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING CERAMIC COVERING MEMBER FOR SEMICONDUCTOR...
- Publication number 20090208667
- Publication date Aug 20, 2009
- TOCALO CO. LTD
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spray coating member having excellent heat emmision property and so...
- Publication number 20090130436
- Publication date May 21, 2009
- Yoshio Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC COATING MEMBER FOR SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20070218302
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing ceramic spray-coated member, program for conduc...
- Publication number 20060099457
- Publication date May 11, 2006
- Tocalo Co., Ltd.
- Tsuyoshi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...