Keigo Satake

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,905,603
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Takashi Nakazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 11,353,894
- Issue date Jun 7, 2022
- Tokyo Electron Limited
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus, processing method, and storage medium
- Patent number 11,135,698
- Issue date Oct 5, 2021
- Tokyo Electron Limited
- Keigo Satake
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and operation method of substrate pr...
- Patent number 11,043,399
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Tomiyasu Maezono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,591,935
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Processing apparatus, processing method, and storage medium
- Patent number 10,261,521
- Issue date Apr 16, 2019
- Tokyo Electron Limited
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,162,371
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for controlling flow rate of liquid, and stora...
- Patent number 8,622,073
- Issue date Jan 7, 2014
- Tokyo Electron Limited
- Keigo Satake
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,409,359
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid mixing apparatus and method, substrate processing...
- Patent number 8,104,948
- Issue date Jan 31, 2012
- Tokyo Electron Limited
- Keigo Satake
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,086,410
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Yasuhiro Chouno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240084458
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220195609
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD OF SUBSTRATE PR...
- Publication number 20200211867
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Tomiyasu Maezono
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20190079544
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20180032092
- Publication date Feb 1, 2018
- TOKYO ELECTRON LIMITED
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM
- Publication number 20160368114
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Keigo Satake
- B24 - GRINDING POLISHING
Information Patent Application
PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM
- Publication number 20160370810
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Keigo Satake
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150131403
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Apparatus and Method for Controlling Flow Rate of Liquid, and Stora...
- Publication number 20120111412
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Keigo Satake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID MIXING APPARATUS AND METHOD, SUBSTRATE PROCESSING...
- Publication number 20090188565
- Publication date Jul 30, 2009
- TOKYO ELECTRON LIMITED
- Keigo Satake
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20090159105
- Publication date Jun 25, 2009
- TOKYO ELECTRON LIMITED
- Satake KEIGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030170949
- Publication date Sep 11, 2003
- TOKYO ELECTRON LIMITED
- Yasuhiro Chouno
- H01 - BASIC ELECTRIC ELEMENTS

Keigo Satake

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Liquid processing apparatus and liquid processing method

Processing apparatus, processing method, and storage medium

Substrate processing apparatus and operation method of substrate pr...

Substrate liquid processing apparatus and substrate liquid processi...

Processing apparatus, processing method, and storage medium

Substrate liquid processing apparatus and substrate liquid processi...

Apparatus and method for controlling flow rate of liquid, and stora...

Substrate processing apparatus, substrate processing method and sto...

Processing liquid mixing apparatus and method, substrate processing...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD OF SUBSTRATE PR...

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM

PROCESSING APPARATUS, PROCESSING METHOD, AND STORAGE MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

Apparatus and Method for Controlling Flow Rate of Liquid, and Stora...

PROCESSING LIQUID MIXING APPARATUS AND METHOD, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

Substrate processing apparatus and substrate processing method