Keiji Emoto

Person

Saitama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,762,299
- Issue date Sep 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, method of operating the same, and method of manu...
- Patent number 11,036,149
- Issue date Jun 15, 2021
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern formation method and article manufacturing method
- Patent number 10,564,541
- Issue date Feb 18, 2020
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern forming method and method of manufacturing article
- Patent number 10,303,069
- Issue date May 28, 2019
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 10,241,424
- Issue date Mar 26, 2019
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and imprint method, and article manufacturing method
- Patent number 10,105,892
- Issue date Oct 23, 2018
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position measuring apparatus, pattern transfer apparatus, and metho...
- Patent number 9,435,642
- Issue date Sep 6, 2016
- Canon Kabushiki Kaisha
- Keiji Emoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Interferometric measurement of rotation of stage apparatus and adju...
- Patent number 9,217,937
- Issue date Dec 22, 2015
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 9,158,211
- Issue date Oct 13, 2015
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing machine system and method of positioning processing mach...
- Patent number 9,132,458
- Issue date Sep 15, 2015
- Canon Kabushiki Kaisha
- Tetsuji Okada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure apparatus having a vibration suppressing feature and metho...
- Patent number 9,104,121
- Issue date Aug 11, 2015
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and lithography method
- Patent number 8,956,143
- Issue date Feb 17, 2015
- Canon Kabushiki Kaisha
- Mitsuhiro Furumoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Anti-vibration apparatus
- Patent number 8,915,479
- Issue date Dec 23, 2014
- Canon Kabushiki Kaisha
- Mitsuhiro Furumoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Stage device including a heat insulating sheet supported by an auxi...
- Patent number 8,891,054
- Issue date Nov 18, 2014
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, exposure apparatus, and microdevice manufacturing method
- Patent number 8,102,500
- Issue date Jan 24, 2012
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,982,849
- Issue date Jul 19, 2011
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus for processing object in vessel
- Patent number 7,978,304
- Issue date Jul 12, 2011
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding system and exposure apparatus using the same
- Patent number 7,733,625
- Issue date Jun 8, 2010
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 7,705,969
- Issue date Apr 27, 2010
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding system and exposure apparatus using the same
- Patent number 7,660,098
- Issue date Feb 9, 2010
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and linear motor
- Patent number 7,557,469
- Issue date Jul 7, 2009
- Canon Kabushiki Kaisha
- Keiji Emoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Liquid-immersion exposure method and liquid-immersion exposure appa...
- Patent number 7,518,708
- Issue date Apr 14, 2009
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding technique
- Patent number 7,508,646
- Issue date Mar 24, 2009
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding system and exposure apparatus using the same
- Patent number 7,466,531
- Issue date Dec 16, 2008
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample temperature adjusting system
- Patent number 7,392,718
- Issue date Jul 1, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exposure apparatus
- Patent number 7,391,496
- Issue date Jun 24, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus, plane motor, and device manufacturing method
- Patent number 7,388,307
- Issue date Jun 17, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holding system and exposure apparatus using the same
- Patent number 7,292,426
- Issue date Nov 6, 2007
- Canon Kabushiki Kaisha
- Atsushi Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust apparatus and control method for same, and vacuum-use hydro...
- Patent number 7,284,906
- Issue date Oct 23, 2007
- Canon Kabushiki Kaisha
- Keiji Emoto
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Linear motor, stage apparatus, exposure apparatus, and device manuf...
- Patent number 7,282,821
- Issue date Oct 16, 2007
- Canon Kabushiki Kaisha
- Hiroyoshi Kubo
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230393486
- Publication date Dec 7, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230013155
- Publication date Jan 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSING APPARATUS AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20220035260
- Publication date Feb 3, 2022
- Canon Kabushiki Kaisha
- Takashi Hayakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...
- Publication number 20180356741
- Publication date Dec 13, 2018
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20170285495
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Eiji Sakamoto
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
PATTERN FORMATION METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20170227855
- Publication date Aug 10, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE
- Publication number 20170057154
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20160223918
- Publication date Aug 4, 2016
- Canon Kabushiki Kaisha
- Tosiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20150042012
- Publication date Feb 12, 2015
- Canon Kabushiki Kaisha
- Kazuki Nakagawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...
- Publication number 20140125962
- Publication date May 8, 2014
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- G01 - MEASURING TESTING
Information Patent Application
POSITION MEASURING APPARATUS, PATTERN TRANSFER APPARATUS, AND METHO...
- Publication number 20130293889
- Publication date Nov 7, 2013
- Keiji Emoto
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING MACHINE SYSTEM AND METHOD OF POSITIONING PROCESSING MACH...
- Publication number 20130101382
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Tetsuji Okada
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20130044306
- Publication date Feb 21, 2013
- Canon Kabushiki Kaisha
- Keiji EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-VIBRATION APPARATUS
- Publication number 20130037687
- Publication date Feb 14, 2013
- Canon Kabushiki Kaisha
- Mitsuhiro FURUMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20120170008
- Publication date Jul 5, 2012
- Canon Kabushiki Kaisha
- Keiji EMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD
- Publication number 20120153537
- Publication date Jun 21, 2012
- Canon Kabushiki Kaisha
- Mitsuhiro Furumoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device including a heat insulating sheet supported by an auxi...
- Publication number 20120086931
- Publication date Apr 12, 2012
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING METHOD
- Publication number 20120080820
- Publication date Apr 5, 2012
- Canon Kabushiki Kaisha
- Shintarou Narioka
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20110051109
- Publication date Mar 3, 2011
- Canon Kabushiki Kaisha
- Keiji EMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100141911
- Publication date Jun 10, 2010
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090237638
- Publication date Sep 24, 2009
- Canon Kabushiki Kaisha
- Tomofumi Nishikawara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20090135383
- Publication date May 28, 2009
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Holding System and Exposure Apparatus Using the Same
- Publication number 20090103232
- Publication date Apr 23, 2009
- Canon Kabushiki Kaisha
- Atsushi Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING SYSTEM AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20090034150
- Publication date Feb 5, 2009
- Canon Kabushiki Kaisha
- Atsushi Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION EXPOSURE APPARATUS
- Publication number 20080117398
- Publication date May 22, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID-IMMERSION EXPOSURE METHOD AND LIQUID-IMMERSION EXPOSURE APPA...
- Publication number 20080111979
- Publication date May 15, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage Device And Exposure Apparatus
- Publication number 20080036981
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD
- Publication number 20070273861
- Publication date Nov 29, 2007
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING SYSTEM AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20070247780
- Publication date Oct 25, 2007
- Canon Kabushiki Kaisha
- Atsushi ITO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070229787
- Publication date Oct 4, 2007
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Keiji Emoto

Person

Patents Grantslast 30 patents

Exposure apparatus and method of manufacturing article

Imprint apparatus, method of operating the same, and method of manu...

Pattern formation method and article manufacturing method

Pattern forming method and method of manufacturing article

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus and imprint method, and article manufacturing method

Position measuring apparatus, pattern transfer apparatus, and metho...

Interferometric measurement of rotation of stage apparatus and adju...

Exposure apparatus and method of manufacturing device

Processing machine system and method of positioning processing mach...

Exposure apparatus having a vibration suppressing feature and metho...

Lithography system and lithography method

Anti-vibration apparatus

Stage device including a heat insulating sheet supported by an auxi...

Stage device, exposure apparatus, and microdevice manufacturing method

Exposure apparatus

Processing apparatus for processing object in vessel

Substrate holding system and exposure apparatus using the same

Exposure apparatus

Substrate holding system and exposure apparatus using the same

Positioning system and linear motor

Liquid-immersion exposure method and liquid-immersion exposure appa...

Substrate holding technique

Substrate holding system and exposure apparatus using the same

Sample temperature adjusting system

Exposure apparatus

Stage apparatus, plane motor, and device manufacturing method

Substrate holding system and exposure apparatus using the same

Exhaust apparatus and control method for same, and vacuum-use hydro...

Linear motor, stage apparatus, exposure apparatus, and device manuf...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSING APPARATUS AND METHOD FOR MANUFACTURING ARTICLE

IMPRINT APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANU...

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING ARTICLE

PATTERN FORMATION METHOD AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

STAGE APPARATUS AND ADJUSTMENT METHOD THEREOF, EXPOSURE APPARATUS,...

POSITION MEASURING APPARATUS, PATTERN TRANSFER APPARATUS, AND METHO...

PROCESSING MACHINE SYSTEM AND METHOD OF POSITIONING PROCESSING MACH...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

ANTI-VIBRATION APPARATUS

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD

Stage device including a heat insulating sheet supported by an auxi...

IMPRINTING METHOD

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

Substrate Holding System and Exposure Apparatus Using the Same

SUBSTRATE HOLDING SYSTEM AND EXPOSURE APPARATUS USING THE SAME

IMMERSION EXPOSURE APPARATUS

LIQUID-IMMERSION EXPOSURE METHOD AND LIQUID-IMMERSION EXPOSURE APPA...

Stage Device And Exposure Apparatus

STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD

SUBSTRATE HOLDING SYSTEM AND EXPOSURE APPARATUS USING THE SAME

EXPOSURE APPARATUS