Keiko Emi

Person

Ibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 8,352,889
- Issue date Jan 8, 2013
- Nuflare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 8,103,980
- Issue date Jan 24, 2012
- Nuflare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 7,740,991
- Issue date Jun 22, 2010
- Nuflare Technology, Inc.
- Keiko Emi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern generation method and charged particle beam writing apparatus
- Patent number 7,669,174
- Issue date Feb 23, 2010
- Nuflare Technology, Inc.
- Keiko Emi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus and readable sto...
- Patent number 7,619,230
- Issue date Nov 17, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple irradiation effect-corrected dose determination technique...
- Patent number 7,525,110
- Issue date Apr 28, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus
- Patent number 7,511,290
- Issue date Mar 31, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20120108063
- Publication date May 3, 2012
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20100015537
- Publication date Jan 21, 2010
- NuFlare Technology, Inc.
- Keiko EMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS
- Publication number 20070194250
- Publication date Aug 23, 2007
- NuFlare Technology, Inc.
- Junichi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN GENERATION METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20070192757
- Publication date Aug 16, 2007
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTIPLE IRRADIATION EFFECT-CORRECTED DOSE DETERMINATION TECHNIQUE...
- Publication number 20070187624
- Publication date Aug 16, 2007
- NuFlare Technology, Inc.
- Junichi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS AND READABLE STO...
- Publication number 20070114459
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Junichi SUZUKI
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20070114453
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Beam dose computing method and writing method and record carrier bo...

Beam dose computing method and writing method and record carrier bo...

Beam dose computing method and writing method and record carrier bo...

Pattern generation method and charged particle beam writing apparatus

Charged particle beam writing method and apparatus and readable sto...

Multiple irradiation effect-corrected dose determination technique...

Charged particle beam writing method and apparatus

Patents Applicationslast 30 patents

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS

PATTERN GENERATION METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

MULTIPLE IRRADIATION EFFECT-CORRECTED DOSE DETERMINATION TECHNIQUE...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS AND READABLE STO...

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...