Keith Frank Best

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 8,576,374
- Issue date Nov 5, 2013
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist recovery method
- Patent number 7,531,040
- Issue date May 12, 2009
- ASML Holdings N.V.
- Joseph Consolini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for 3D alignment in wafer scale integration
- Patent number 7,442,476
- Issue date Oct 28, 2008
- ASML Netherlands B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for measuring bonding quality of bonded substrates, metrolog...
- Patent number 7,410,880
- Issue date Aug 12, 2008
- ASML Netherlands B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Alternate side lithographic substrate imaging
- Patent number 7,320,847
- Issue date Jan 22, 2008
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatuses for applying wafer-alignment marks
- Patent number 7,256,865
- Issue date Aug 14, 2007
- ASML Holding N.V.
- Joseph Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual sided lithographic substrate imaging
- Patent number 7,133,117
- Issue date Nov 7, 2006
- ASML Netherlands B.V.
- Keith Frank Best
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measurement, method for providing alignment marks, and de...
- Patent number 7,130,049
- Issue date Oct 31, 2006
- ASML Netherlands B.V.
- Joseph J. Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 7,113,258
- Issue date Sep 26, 2006
- ASML Netherlands B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a substrate, a computer program, a device manufa...
- Patent number 7,041,996
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection mask, device manufacturing method, and devi...
- Patent number 7,019,814
- Issue date Mar 28, 2006
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, alignment method and device manufacturing m...
- Patent number 6,914,664
- Issue date Jul 5, 2005
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual sided lithographic substrate imaging
- Patent number 6,844,244
- Issue date Jan 18, 2005
- ASML Netherlands B.V.
- Keith Frank Best
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090237635
- Publication date Sep 24, 2009
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20090128792
- Publication date May 21, 2009
- ASML NETHERLANDS B.V.
- Rudy Jan, Maria Pellens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and apparatuses for applying wafer-alignment marks
- Publication number 20070196746
- Publication date Aug 23, 2007
- Joseph Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate and lithography process using the same
- Publication number 20060138681
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for 3D alignment in wafer scale integration
- Publication number 20060141743
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method of forming a bonded substrate and a bonded substr...
- Publication number 20060141744
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for measuring bonding quality of bonded substrates, metrolog...
- Publication number 20060141738
- Publication date Jun 29, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of providing alignment marks, method of aligning a substrate...
- Publication number 20060035159
- Publication date Feb 16, 2006
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of measurement, method for providing alignment marks, and de...
- Publication number 20050146721
- Publication date Jul 7, 2005
- ASML NETHERLANDS B.V.
- Joseph J. Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus
- Publication number 20050140951
- Publication date Jun 30, 2005
- ASML NETHERLANDS B.V.
- Henricus Wilhelmus Maria Van Buel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and apparatuses for applying wafer-alignment marks
- Publication number 20050089762
- Publication date Apr 28, 2005
- Joseph Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist recovery method
- Publication number 20050072733
- Publication date Apr 7, 2005
- Joseph Consolini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual sided lithographic substrate imaging
- Publication number 20050073669
- Publication date Apr 7, 2005
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Dual sided lithographic substrate imaging
- Publication number 20040157408
- Publication date Aug 12, 2004
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection mask, device manufacturing method, and devi...
- Publication number 20040156027
- Publication date Aug 12, 2004
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alternate side lithographic substrate imaging
- Publication number 20040142256
- Publication date Jul 22, 2004
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of aligning a substrate, computer program, device manufactur...
- Publication number 20040124375
- Publication date Jul 1, 2004
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, alignment method and device manufacturing m...
- Publication number 20030227604
- Publication date Dec 11, 2003
- ASML NETHERLANDS, B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Keith Frank Best

Person

Patents Grantslast 30 patents

Lithographic apparatus and method

Resist recovery method

Method and system for 3D alignment in wafer scale integration

Method for measuring bonding quality of bonded substrates, metrolog...

Alternate side lithographic substrate imaging

Methods and apparatuses for applying wafer-alignment marks

Dual sided lithographic substrate imaging

Method of measurement, method for providing alignment marks, and de...

Lithographic apparatus

Method of aligning a substrate, a computer program, a device manufa...

Lithographic projection mask, device manufacturing method, and devi...

Lithographic apparatus, alignment method and device manufacturing m...

Dual sided lithographic substrate imaging

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD

Lithographic apparatus and method

Methods and apparatuses for applying wafer-alignment marks

Substrate and lithography process using the same

Method and system for 3D alignment in wafer scale integration

System and method of forming a bonded substrate and a bonded substr...

Method for measuring bonding quality of bonded substrates, metrolog...

Method of providing alignment marks, method of aligning a substrate...

Method of measurement, method for providing alignment marks, and de...

Lithographic apparatus

Methods and apparatuses for applying wafer-alignment marks

Resist recovery method

Dual sided lithographic substrate imaging

Dual sided lithographic substrate imaging

Lithographic projection mask, device manufacturing method, and devi...

Alternate side lithographic substrate imaging

Method of aligning a substrate, computer program, device manufactur...

Lithographic apparatus, alignment method and device manufacturing m...