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Keith K. Koai
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate support lift mechanism
Patent number
7,871,470
Issue date
Jan 18, 2011
Applied Materials, Inc.
Eric W. Schieve
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support lift pin
Patent number
D568914
Issue date
May 13, 2008
Applied Materials, Inc.
David T. Or
D15 - Machines not elsewhere specified
Information
Patent Grant
Reduced friction lift pin
Patent number
6,887,317
Issue date
May 3, 2005
Applied Materials, Inc.
David T. Or
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition of copper using profiled distribution of...
Patent number
6,410,089
Issue date
Jun 25, 2002
Applied Materials, Inc.
Xin Sheng Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
300 mm CVD chamber design for metal-organic thin film deposition
Patent number
6,364,949
Issue date
Apr 2, 2002
Applied Materials, Inc.
David T. Or
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for performing metallo-organic chemical vapor deposition of...
Patent number
6,365,495
Issue date
Apr 2, 2002
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for controlling a flow of process material to...
Patent number
6,176,930
Issue date
Jan 23, 2001
Applied Materials, Inc.
Keith K. Koai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer pedestal with a purge ring
Patent number
6,159,299
Issue date
Dec 12, 2000
Applied Materials, Inc.
Keith K. Koai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reactor useful for chemical vapor deposition of titanium nitride
Patent number
6,106,625
Issue date
Aug 22, 2000
Applied Materials, Inc.
Keith Koai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing chamber and method for confining plasma
Patent number
6,063,441
Issue date
May 16, 2000
Applied Materials, Inc.
Keith Koai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pattern of apertures in a showerhead for chemical vapor deposition
Patent number
6,050,506
Issue date
Apr 18, 2000
Applied Materials, Inc.
Xin Sheng Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORT LIFT MECHANISM
Publication number
20060240542
Publication date
Oct 26, 2006
Eric W. Schieve
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reduced friction lift pin
Publication number
20050194100
Publication date
Sep 8, 2005
APPLIED MATERIALS, INC.
David T. Or
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate support lift mechanism
Publication number
20040177813
Publication date
Sep 16, 2004
APPLIED MATERIALS, INC.
Eric W. Schieve
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reduced friction lift pin
Publication number
20040045509
Publication date
Mar 11, 2004
David T. Or
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PERFORMING METALLO-ORGANIC CHEMICAL VAPOR DEPOSITION OF...
Publication number
20020001928
Publication date
Jan 3, 2002
SHULIN WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...