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Method to build a microfilter
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Patent number 7,081,208
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Issue date Jul 25, 2006
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International Business Machines Corporation
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Kenneth J McCullough
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Apparatus for cleaning filters
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Patent number 6,739,346
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Issue date May 25, 2004
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International Business Machines Corporation
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John Michael Cotte
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B08 - CLEANING
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Selective etching of silicate
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Patent number 6,254,796
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Issue date Jul 3, 2001
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International Business Machines Corporation
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David L. Rath
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C03 - GLASS MINERAL OR SLAG WOOL
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Removal of dielectric oxides
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Patent number 6,200,891
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Issue date Mar 13, 2001
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International Business Machines Corporation
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Rangarajan Jagannathan
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H01 - BASIC ELECTRIC ELEMENTS
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Removal of silicon oxide
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Patent number 6,117,796
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Issue date Sep 12, 2000
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International Business Machines Corporation
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Glenn W. Gale
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H01 - BASIC ELECTRIC ELEMENTS
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Etching of silicon nitride
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Patent number 6,066,267
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Issue date May 23, 2000
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International Business Machines Corporation
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David L. Rath
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H01 - BASIC ELECTRIC ELEMENTS
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Etching of silicon nitride
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Patent number 5,965,465
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Issue date Oct 12, 1999
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International Business Machines Corporation
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David L. Rath
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H01 - BASIC ELECTRIC ELEMENTS
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Method of planarizing semiconductor wafers
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Patent number 5,935,869
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Issue date Aug 10, 1999
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International Business Machines Corporation
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Cuc Huynh
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C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...