Keizo Hirose

Person

Nirasaki-city, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Joining device and joining system
- Patent number 9,960,069
- Issue date May 1, 2018
- Tokyo Electron Limited
- Shintaro Sugihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joining device and joining system
- Patent number 9,922,859
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Shintaro Sugihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,080,126
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for plasma processing
- Patent number 7,537,672
- Issue date May 26, 2009
- Tokyo Electron Limited
- Akira Koshiishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,364,626
- Issue date Apr 29, 2008
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Method of manufacturing trench structure for device
- Patent number 7,176,142
- Issue date Feb 13, 2007
- Tokyo Electron Limited
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning tool and substrate cleaning apparatus
- Patent number 7,010,826
- Issue date Mar 14, 2006
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Substrate cleaning tool, having permeable cleaning head
- Patent number 6,554,010
- Issue date Apr 29, 2003
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,544,380
- Issue date Apr 8, 2003
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate washing method
- Patent number 6,432,212
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Process solution supplying apparatus
- Patent number 6,431,258
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,391,147
- Issue date May 21, 2002
- Tokyo Electron Limited
- Kosuke Imafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scrubbing apparatus
- Patent number 6,385,805
- Issue date May 14, 2002
- Tokyo Electron Limited
- Nobuo Konishi
- B08 - CLEANING
Information Patent Grant
Method of forming resist film
- Patent number 6,300,043
- Issue date Oct 9, 2001
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma treatment method and apparatus
- Patent number 6,264,788
- Issue date Jul 24, 2001
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate washing apparatus and method
- Patent number 6,175,983
- Issue date Jan 23, 2001
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Process solution supplying apparatus
- Patent number 6,165,270
- Issue date Dec 26, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment method utilizing an amplitude-modulated high frequ...
- Patent number 6,106,737
- Issue date Aug 22, 2000
- Tokyo Electron Limited
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 6,074,518
- Issue date Jun 13, 2000
- Tokyo Electron Limited
- Kosuke Imafuku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for forming liquid film
- Patent number 6,012,858
- Issue date Jan 11, 2000
- Tokyo Electron Limited
- Nobuo Konishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plasma processing apparatus
- Patent number 5,919,332
- Issue date Jul 6, 1999
- Tokyo Electron Limited
- Akira Koshiishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus and method
- Patent number 5,698,062
- Issue date Dec 16, 1997
- Tokyo Electron Limited
- Takao Sakamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
JOINING DEVICE AND JOINING SYSTEM
- Publication number 20140208557
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Shintaro SUGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINING DEVICE AND JOINING SYSTEM
- Publication number 20140208556
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Shintaro SUGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINING METHOD, JOINING DEVICE AND JOINING SYSTEM
- Publication number 20130327463
- Publication date Dec 12, 2013
- TOKYO ELECTRON LIMITED
- Shigenori Kitahara
- B32 - LAYERED PRODUCTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20130112666
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20100326601
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080308041
- Publication date Dec 18, 2008
- Akira KOSHIISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE MASK, MANUFACTURING METHOD THEREOF, CHARGE BEAM LITHOGRAPH...
- Publication number 20080305408
- Publication date Dec 11, 2008
- TOKYO ELECTRON LIMITED
- Keizo HIROSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing trench structure for device
- Publication number 20070148985
- Publication date Jun 28, 2007
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus
- Publication number 20050061445
- Publication date Mar 24, 2005
- TOKYO ELECTRON LIMITED
- Akira Koshiishi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of manufacturing trench structure for device
- Publication number 20040002214
- Publication date Jan 1, 2004
- Nobutaka Mizutani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030079764
- Publication date May 1, 2003
- Keizo Hirose
- B08 - CLEANING
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20020088547
- Publication date Jul 11, 2002
- TOKYO ELECTRON LIMITED
- Masayuki Tomoyasu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate cleaning tool and substrate cleaning apparatus
- Publication number 20020035763
- Publication date Mar 28, 2002
- Keizo Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma treatment method and apparatus
- Publication number 20010013504
- Publication date Aug 16, 2001
- TOKYO ELECTRON LIMITED
- Kosuke Imafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCRUBBING APPARATUS
- Publication number 20010010103
- Publication date Aug 2, 2001
- NOBUO KONISHI
- H01 - BASIC ELECTRIC ELEMENTS

Keizo Hirose

Person

Patents Grantslast 30 patents

Joining device and joining system

Joining device and joining system

Plasma processing apparatus

Apparatus for plasma processing

Substrate processing apparatus and substrate processing method

Method of manufacturing trench structure for device

Substrate cleaning tool and substrate cleaning apparatus

Substrate cleaning tool, having permeable cleaning head

Plasma treatment method and apparatus

Substrate washing method

Process solution supplying apparatus

Plasma treatment method and apparatus

Scrubbing apparatus

Method of forming resist film

Plasma treatment method and apparatus

Substrate washing apparatus and method

Process solution supplying apparatus

Plasma treatment method utilizing an amplitude-modulated high frequ...

Plasma processing apparatus

Apparatus and method for forming liquid film

Plasma processing apparatus

Plasma treatment apparatus and method

Patents Applicationslast 30 patents

JOINING DEVICE AND JOINING SYSTEM

JOINING DEVICE AND JOINING SYSTEM

JOINING METHOD, JOINING DEVICE AND JOINING SYSTEM

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

APERTURE MASK, MANUFACTURING METHOD THEREOF, CHARGE BEAM LITHOGRAPH...

Method of manufacturing trench structure for device

Plasma processing apparatus

Method of manufacturing trench structure for device

Substrate processing apparatus and substrate processing method

Plasma treatment method and apparatus

Substrate cleaning tool and substrate cleaning apparatus

Plasma treatment method and apparatus

SCRUBBING APPARATUS