Ken Gross

Person

San Carlos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser sustained plasma light source with forced flow through natura...
- Patent number 10,690,589
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a sample with an illumination source...
- Patent number 10,616,987
- Issue date Apr 7, 2020
- KLA-Tencor Corporation
- Wei Zhao
- G02 - OPTICS
Information Patent Grant
Wideband spectrograph
- Patent number 10,386,234
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Grant
Laser sustained plasma light source with graded absorption features
- Patent number 10,283,342
- Issue date May 7, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-contact thermal measurements of VUV optics
- Patent number 10,139,283
- Issue date Nov 27, 2018
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G01 - MEASURING TESTING
Information Patent Grant
System and method for inhibiting VUV radiative emission of a laser-...
- Patent number 9,899,205
- Issue date Feb 20, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,887,076
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for inhibiting radiative emission of a laser-sust...
- Patent number 9,615,439
- Issue date Apr 4, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a sample with a laser sustained plasm...
- Patent number 9,558,858
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- David W. Shortt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus to reduce thermal stress by regulation and con...
- Patent number 9,534,848
- Issue date Jan 3, 2017
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,390,902
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cell for light source
- Patent number 8,643,840
- Issue date Feb 4, 2014
- KLA-Tencor Corporation
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Grant
Optical scanning using rotating parallel plate
- Patent number 8,045,250
- Issue date Oct 25, 2011
- KLA-Tencor Corporation
- Kenneth P. Gross
- G02 - OPTICS
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,933,016
- Issue date Apr 26, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,663,753
- Issue date Feb 16, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 7,477,371
- Issue date Jan 13, 2009
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for measuring one or more characteristics of pa...
- Patent number 7,463,369
- Issue date Dec 9, 2008
- KLA-Tencor Technologies Corp.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring periodic structures
- Patent number 7,433,037
- Issue date Oct 7, 2008
- KLA-Tencor Technologies Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,379,183
- Issue date May 27, 2008
- KLA-Tencor Technologies Corp.
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,317,531
- Issue date Jan 8, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Measuring overlay and profile asymmetry using symmetric and anti-sy...
- Patent number 7,277,172
- Issue date Oct 2, 2007
- KLA-Tencor Technologies, Corporation
- Daniel Kandel
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 7,102,744
- Issue date Sep 5, 2006
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Systems for measuring periodic structures
- Patent number 6,721,052
- Issue date Apr 13, 2004
- KLA-Technologies Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Display apparatus including RGB color combiner and 1D light valve r...
- Patent number 6,692,129
- Issue date Feb 17, 2004
- Silicon Light Machines
- Kenneth P. Gross
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 6,606,153
- Issue date Aug 12, 2003
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 6,271,916
- Issue date Aug 7, 2001
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanning apparatus and method using crossed-cylinder optica...
- Patent number 5,565,979
- Issue date Oct 15, 1996
- Tencor Instruments
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanner with thin film gauge
- Patent number 5,416,594
- Issue date May 16, 1995
- Tencor Instruments
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Grant
Particle detector for rough surfaces
- Patent number 5,189,481
- Issue date Feb 23, 1993
- Tencor Instruments
- Peter C. Jann
- G01 - MEASURING TESTING
Information Patent Grant
Position location in surface scanning using interval timing between...
- Patent number 5,083,035
- Issue date Jan 21, 1992
- Tencor Instruments
- Jiri Pecen
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Laser Sustained Plasma Light Source with Forced Flow Through Natura...
- Publication number 20190033204
- Publication date Jan 31, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Wideband Spectrograph
- Publication number 20180216998
- Publication date Aug 2, 2018
- KLA-Tencor Corporation
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Inhibiting VUV Radiative Emission of a Laser-...
- Publication number 20170345639
- Publication date Nov 30, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Sustained Plasma Light Source with Graded Absorption Features
- Publication number 20170164457
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-Contact Thermal Measurements of VUV Optics
- Publication number 20170153145
- Publication date Jun 1, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Imaging a Sample with an Illumination Source...
- Publication number 20170059490
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Wei Zhao
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20160322211
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Inhibiting Radiative Emission of a Laser-Sust...
- Publication number 20160205758
- Publication date Jul 14, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Imaging a Sample with a Laser Sustained Plasm...
- Publication number 20150048741
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- David W. Shortt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20140291546
- Publication date Oct 2, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus to Reduce Thermal Stress by Regulation and Con...
- Publication number 20140060792
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Cell For Light Source
- Publication number 20110205529
- Publication date Aug 25, 2011
- KLA-Tencor Corporation
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20100091284
- Publication date Apr 15, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080094630
- Publication date Apr 24, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Measuring One or More Characteristics of Pa...
- Publication number 20070229852
- Publication date Oct 4, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Application
Process and Assembly for Non-Destructive Surface Inspections
- Publication number 20070103676
- Publication date May 10, 2007
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Application
System for Measuring Periodic Structures
- Publication number 20060290931
- Publication date Dec 28, 2006
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Measuring overlay and profile asymmetry using symmetric and anti-sy...
- Publication number 20060274310
- Publication date Dec 7, 2006
- KLA-Tencor Technologies Corporation
- Daniel Kandel
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20050099627
- Publication date May 12, 2005
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for detecting overlay errors using scatterometry
- Publication number 20040233442
- Publication date Nov 25, 2004
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for detecting overlay errors using scatterometry
- Publication number 20040169861
- Publication date Sep 2, 2004
- KLA-Tenor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20040141177
- Publication date Jul 22, 2004
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Process and assembly for non-destructive surface inspections
- Publication number 20040080741
- Publication date Apr 29, 2004
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Application
Display apparatus including RGB color combiner and 1D light valve r...
- Publication number 20030103194
- Publication date Jun 5, 2003
- Kenneth P. Gross
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Systems for measuring periodic structures
- Publication number 20020105646
- Publication date Aug 8, 2002
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Process and assembly for non-destructive surface inspections
- Publication number 20020051130
- Publication date May 2, 2002
- Norbert Marxer
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Laser sustained plasma light source with forced flow through natura...

System and method for imaging a sample with an illumination source...

Wideband spectrograph

Laser sustained plasma light source with graded absorption features

Non-contact thermal measurements of VUV optics

System and method for inhibiting VUV radiative emission of a laser-...

Method and system for controlling convective flow in a light-sustai...

System and method for inhibiting radiative emission of a laser-sust...

System and method for imaging a sample with a laser sustained plasm...

Method and apparatus to reduce thermal stress by regulation and con...

Method and system for controlling convective flow in a light-sustai...

Cell for light source

Optical scanning using rotating parallel plate

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Process and assembly for non-destructive surface inspections

Systems and methods for measuring one or more characteristics of pa...

System for measuring periodic structures

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and methods for detecting overlay errors using scatterometry

Measuring overlay and profile asymmetry using symmetric and anti-sy...

Process and assembly for non-destructive surface inspections

Systems for measuring periodic structures

Display apparatus including RGB color combiner and 1D light valve r...

Process and assembly for non-destructive surface inspections

Process and assembly for non-destructive surface inspections

Surface scanning apparatus and method using crossed-cylinder optica...

Surface scanner with thin film gauge

Particle detector for rough surfaces

Position location in surface scanning using interval timing between...

Patents Applicationslast 30 patents

Laser Sustained Plasma Light Source with Forced Flow Through Natura...

Wideband Spectrograph

System and Method for Inhibiting VUV Radiative Emission of a Laser-...

Laser Sustained Plasma Light Source with Graded Absorption Features

Non-Contact Thermal Measurements of VUV Optics

System and Method for Imaging a Sample with an Illumination Source...

Method and System for Controlling Convective Flow in a Light-Sustai...

System and Method for Inhibiting Radiative Emission of a Laser-Sust...

System and Method for Imaging a Sample with a Laser Sustained Plasm...

Method and System for Controlling Convective Flow in a Light-Sustai...

Method and Apparatus to Reduce Thermal Stress by Regulation and Con...

Cell For Light Source

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Systems and Methods for Measuring One or More Characteristics of Pa...

Process and Assembly for Non-Destructive Surface Inspections

System for Measuring Periodic Structures

Measuring overlay and profile asymmetry using symmetric and anti-sy...

System for measuring periodic structures

Apparatus and methods for detecting overlay errors using scatterometry

Apparatus and method for detecting overlay errors using scatterometry

System for measuring periodic structures

Process and assembly for non-destructive surface inspections

Display apparatus including RGB color combiner and 1D light valve r...

Systems for measuring periodic structures

Process and assembly for non-destructive surface inspections