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Publication date Nov 21, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Publication date Feb 22, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20230367234
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Publication date Nov 16, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF MANUFACTURING PHOTO MASKS
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Publication number 20230205093
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Publication date Jun 29, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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TWO-DIMENSIONAL (2D) METAL STRUCTURE
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Publication date Jan 12, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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H01 - BASIC ELECTRIC ELEMENTS
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20220365452
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Publication date Nov 17, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Optical Proximity Correction and Photomasks
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Publication number 20220155692
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Publication date May 19, 2022
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Taiwan Semiconductor Manufacturing Co., LTD
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF MANUFACTURING PHOTO MASKS
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Publication number 20210356872
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Publication date Nov 18, 2021
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Ken-Hsien HSIEH
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20210286274
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Publication date Sep 16, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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TUNABLE ILLUMINATOR FOR LITHOGRAPHY SYSTEMS
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Publication date May 6, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ken-Hsien HSIEH
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Optical Proximity Correction and Photomasks
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Publication date Sep 24, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Dong-Yo Jheng
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY PROCESS MONITORING METHOD
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Publication number 20200103766
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Publication date Apr 2, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chih-Jie LEE
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