Ken Minoda

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,426,906
- Issue date Aug 30, 2022
- Canon Kabushiki Kaisha
- Naoki Murasato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 11,187,977
- Issue date Nov 30, 2021
- Canon Kabushiki Kaisha
- Naoki Murasato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement apparatus, exposure apparatus, and method of manufactur...
- Patent number 11,169,452
- Issue date Nov 9, 2021
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,634,995
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Position detector, position detection method, imprint apparatus, an...
- Patent number 10,613,434
- Issue date Apr 7, 2020
- Canon Kabushiki Kaisha
- Ken Minoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprinting apparatus, imprinting method, and article manufacturing...
- Patent number 10,416,551
- Issue date Sep 17, 2019
- Canon Kabushiki Kaisha
- Sentaro Aihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography apparatus and device manufacturing method therefor
- Patent number 9,718,234
- Issue date Aug 1, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,645,514
- Issue date May 9, 2017
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 9,283,720
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint apparatus, imprint method, and device manufacturing method
- Patent number 9,188,855
- Issue date Nov 17, 2015
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measuring apparatus, imprint system, measuring method, and device m...
- Patent number 8,976,370
- Issue date Mar 10, 2015
- Canon Kabushiki Kaisha
- Takahiro Miyakawa
- G01 - MEASURING TESTING
Information Patent Grant
Detector, imprint apparatus, and article manufacturing method
- Patent number 8,922,786
- Issue date Dec 30, 2014
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Grant
Illumination optical system, exposure apparatus, and device fabrica...
- Patent number 8,854,605
- Issue date Oct 7, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus, imprint apparatus, and position detec...
- Patent number 8,842,294
- Issue date Sep 23, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,672,661
- Issue date Mar 18, 2014
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, device manufacturing method, and aperture stop...
- Patent number 8,305,560
- Issue date Nov 6, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for adjusting and evaluating light intensity distribution o...
- Patent number 7,629,563
- Issue date Dec 8, 2009
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...
- Publication number 20200249589
- Publication date Aug 6, 2020
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20190263031
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Naoki Murasato
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190086796
- Publication date Mar 21, 2019
- Canon Kabushiki Kaisha
- Naoki Murasato
- G02 - OPTICS
Information Patent Application
POSITION DETECTOR, POSITION DETECTION METHOD, IMPRINT APPARATUS, AN...
- Publication number 20170329217
- Publication date Nov 16, 2017
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING
Information Patent Application
IMPRINTING APPARATUS, IMPRINTING METHOD, AND ARTICLE MANUFACTURING...
- Publication number 20160167261
- Publication date Jun 16, 2016
- Canon Kabushiki Kaisha
- Sentaro Aihara
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20160033884
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Hironori Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20140346694
- Publication date Nov 27, 2014
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASURING APPARATUS, IMPRINT SYSTEM, MEASURING METHOD, AND DEVICE M...
- Publication number 20140153003
- Publication date Jun 5, 2014
- Takahiro Miyakawa
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR
- Publication number 20130161868
- Publication date Jun 27, 2013
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130100459
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Toshiki Iwai
- B82 - NANO-TECHNOLOGY
Information Patent Application
POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...
- Publication number 20120328725
- Publication date Dec 27, 2012
- Canon Kabushiki Kaisha
- Ken Minoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20120292801
- Publication date Nov 22, 2012
- Canon Kabushiki Kaisha
- Hironori Maeda
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20120200006
- Publication date Aug 9, 2012
- Canon Kabushiki Kaisha
- Ken MINODA
- B82 - NANO-TECHNOLOGY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICA...
- Publication number 20100208223
- Publication date Aug 19, 2010
- Canon Kabushiki Kaisha
- Ken Minoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND APERTURE STOP...
- Publication number 20090311636
- Publication date Dec 17, 2009
- Canon Kabushiki Kaisha
- Ken Minoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR ADJUSTING AND EVALUATING LIGHT INTENSITY DISTRIBUTION O...
- Publication number 20080173789
- Publication date Jul 24, 2008
- Canon Kabushiki Kaisha
- Ken Minoda
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, imprint method, and method of manufacturing article

Measurement apparatus, exposure apparatus, and method of manufactur...

Position detector, position detection method, imprint apparatus, an...

Position detector, position detection method, imprint apparatus, an...

Imprinting apparatus, imprinting method, and article manufacturing...

Imprint lithography apparatus and device manufacturing method therefor

Imprint apparatus, imprint method, and device manufacturing method

Position detection apparatus, imprint apparatus, and position detec...

Imprint apparatus, imprint method, and device manufacturing method

Measuring apparatus, imprint system, measuring method, and device m...

Detector, imprint apparatus, and article manufacturing method

Illumination optical system, exposure apparatus, and device fabrica...

Position detection apparatus, imprint apparatus, and position detec...

Imprint apparatus and article manufacturing method

Exposure apparatus, device manufacturing method, and aperture stop...

Methods for adjusting and evaluating light intensity distribution o...

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTUR...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

POSITION DETECTOR, POSITION DETECTION METHOD, IMPRINT APPARATUS, AN...

IMPRINTING APPARATUS, IMPRINTING METHOD, AND ARTICLE MANUFACTURING...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

MEASURING APPARATUS, IMPRINT SYSTEM, MEASURING METHOD, AND DEVICE M...

IMPRINT LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD THEREFOR

DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

POSITION DETECTION APPARATUS, IMPRINT APPARATUS, AND POSITION DETEC...

IMPRINT APPARATUS, IMPRINT METHOD, AND DEVICE MANUFACTURING METHOD

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICA...

EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND APERTURE STOP...

METHODS FOR ADJUSTING AND EVALUATING LIGHT INTENSITY DISTRIBUTION O...