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KENETSU MIZUSAWA
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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gas supply unit, substrate processing apparatus and supply gas sett...
Patent number
9,441,791
Issue date
Sep 13, 2016
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply unit, substrate processing apparatus and supply gas sett...
Patent number
8,906,193
Issue date
Dec 9, 2014
Tokyo Electron Limited
Kenetsu Mizusawa
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,701,593
Issue date
Apr 22, 2014
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,561,572
Issue date
Oct 22, 2013
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,375,893
Issue date
Feb 19, 2013
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,236,380
Issue date
Aug 7, 2012
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
Patent number
8,221,638
Issue date
Jul 17, 2012
Tokyo Electron Limited
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20130126093
Publication date
May 23, 2013
TOKYO ELECTRON LIMITED
KENETSU MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS AND SUPPLY GAS SETT...
Publication number
20130092322
Publication date
Apr 18, 2013
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20120291953
Publication date
Nov 22, 2012
TOKYO ELECTRON LIMITED
Kenetsu MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20120247668
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
KENETSU MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS AND SUPPLY GAS SETT...
Publication number
20100163112
Publication date
Jul 1, 2010
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20090191337
Publication date
Jul 30, 2009
TOKYO ELECTRON LIMITED
KENETSU MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20090145484
Publication date
Jun 11, 2009
TOKYO ELECTRON LIMITED
Kenetsu MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20070181181
Publication date
Aug 9, 2007
TOKYO ELECTRON LIMITED
Kenetsu MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
Publication number
20070175391
Publication date
Aug 2, 2007
TOKYO ELECTRON LIMITED
Kenetsu MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND GAS SUPPLY M...
Publication number
20070151668
Publication date
Jul 5, 2007
TOKYO ELECTRON LIMITED
KENETSU MIZUSAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas supply unit, substrate processing apparatus, and supply gas set...
Publication number
20060124169
Publication date
Jun 15, 2006
TOKYO ELECTRON LIMITED
Kenetsu Mizusawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor processing system
Publication number
20050064609
Publication date
Mar 24, 2005
TOKYO ELECTRON LIMITED
Hideki Nagaoka
H01 - BASIC ELECTRIC ELEMENTS