BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a sectional view of an example of a structure that may be adopted in a substrate processing apparatus achieved in an embodiment of the present invention;
FIG. 2 is a block diagram showing an example of a structure that may be adopted in the control unit in FIG. 1;
FIG. 3 is a block diagram showing an example of a structure that may be adopted in the gas supply system in the embodiment;
FIG. 4 presents a flowchart of an example of processing that may be executed in the substrate processing apparatus in the embodiment; and
FIG. 5 presents a flowchart of another example of processing that may be executed in the substrate processing apparatus in the embodiment.