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Kengo Mizosaki
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate treating method
Patent number
6,451,515
Issue date
Sep 17, 2002
Tokyo Electron Limited
Hideyuki Takamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate process method and substrate process apparatus
Patent number
6,443,641
Issue date
Sep 3, 2002
Tokyo Electron Limited
Hideyuki Takamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate process method and substrate process apparatus
Patent number
6,261,007
Issue date
Jul 17, 2001
Tokyo Electron Limited
Hideyuki Takamori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Heat processing device with hot plate and associated reflector
Patent number
6,087,632
Issue date
Jul 11, 2000
Tokyo Electron Limited
Kengo Mizosaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for cleaning substrate surface by use of Ozone
Patent number
5,998,766
Issue date
Dec 7, 1999
Tokyo Electron Limited
Kengo Mizosaki
B08 - CLEANING
Information
Patent Grant
Processing apparatus
Patent number
5,695,562
Issue date
Dec 9, 1997
Tokyo Electron Limited
Kengo Mizosaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for scrubbing and cleaning substrate
Patent number
5,518,552
Issue date
May 21, 1996
Tokyo Electron Limited
Kouichi Tanoue
G02 - OPTICS
Information
Patent Grant
Device and method for scrubbing and cleaning substrate
Patent number
5,345,639
Issue date
Sep 13, 1994
Tokyo Electron Limited
Kouichi Tanoue
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Substrate treating method
Publication number
20020187423
Publication date
Dec 12, 2002
HIDEYUKI TAKAMORI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE TREATING METHOD
Publication number
20010049070
Publication date
Dec 6, 2001
HIDEYUKI TAKAMORI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Substrate process method and substrate process apparatus
Publication number
20010031147
Publication date
Oct 18, 2001
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate process method and substrate process apparatus
Publication number
20010026691
Publication date
Oct 4, 2001
Hideyuki Takamori
H01 - BASIC ELECTRIC ELEMENTS