Kenichi AKAZAWA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Elastic membrane
- Patent number D1021832
- Issue date Apr 9, 2024
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Elastic membrane
- Patent number D989012
- Issue date Jun 13, 2023
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Elastic membrane for semiconductor wafer polishing apparatus
- Patent number D981969
- Issue date Mar 28, 2023
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retaining ring for substrate
- Patent number D981459
- Issue date Mar 21, 2023
- Ebara Corporation
- Kenichi Akazawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,511,389
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding module, substrate processing apparatus, and subst...
- Patent number 10,593,570
- Issue date Mar 17, 2020
- Ebara Corporation
- Akihiro Yazawa
- B08 - CLEANING
Information Patent Grant
Reversing machine and substrate polishing apparatus
- Patent number 10,525,564
- Issue date Jan 7, 2020
- Ebara Corporation
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Grant
Rinsing bath and substrate cleaning method using such rinsing bath
- Patent number 10,160,013
- Issue date Dec 25, 2018
- Ebara Corporation
- Masahiko Sekimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 10,141,211
- Issue date Nov 27, 2018
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transferring a substrate
- Patent number 9,786,532
- Issue date Oct 10, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BREAK-IN PROCESSING APPARATUS AND BREAK-IN PROCESSING METHOD
- Publication number 20230026543
- Publication date Jan 26, 2023
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20200094371
- Publication date Mar 26, 2020
- EBARA CORPORATION
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20170358472
- Publication date Dec 14, 2017
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING MODULE, SUBSTRATE PROCESSING APPARATUS, AND SUBST...
- Publication number 20170236727
- Publication date Aug 17, 2017
- EBARA CORPORATION
- Akihiro Yazawa
- B08 - CLEANING
Information Patent Application
REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS
- Publication number 20170072531
- Publication date Mar 16, 2017
- EBARA CORPORATION
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Application
RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH
- Publication number 20160059271
- Publication date Mar 3, 2016
- EBARA CORPORATION
- Masahiko SEKIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT
- Publication number 20150270147
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20150270151
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS

Kenichi AKAZAWA

Person

Patents Grantslast 30 patents

Elastic membrane

Elastic membrane

Elastic membrane for semiconductor wafer polishing apparatus

Retaining ring for substrate

Polishing head and polishing apparatus

Substrate holding module, substrate processing apparatus, and subst...

Reversing machine and substrate polishing apparatus

Rinsing bath and substrate cleaning method using such rinsing bath

Substrate processing apparatus and substrate transfer method

Substrate processing apparatus and method of transferring a substrate

Patents Applicationslast 30 patents

BREAK-IN PROCESSING APPARATUS AND BREAK-IN PROCESSING METHOD

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

POLISHING HEAD AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

SUBSTRATE HOLDING MODULE, SUBSTRATE PROCESSING APPARATUS, AND SUBST...

REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS

RINSING BATH AND SUBSTRATE CLEANING METHOD USING SUCH RINSING BATH

SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD