Kenichi HARA

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method, etching apparatus, and storage medium
- Patent number 9,449,844
- Issue date Sep 20, 2016
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,951,908
- Issue date Feb 10, 2015
- Tokyo Electron Limited
- Kenichi Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
- Patent number 8,770,138
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,062,955
- Issue date Nov 22, 2011
- Tokyo Electron Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
- Patent number 8,003,509
- Issue date Aug 23, 2011
- Tokyo Electron Limited
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD AND PRODUCTION APPARATUS
- Publication number 20170025603
- Publication date Jan 26, 2017
- Kenichi HARA
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD AND APPARATUS FOR REMOVING RESIDUE LAYER
- Publication number 20160045942
- Publication date Feb 18, 2016
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- B08 - CLEANING
Information Patent Application
PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURIN...
- Publication number 20160035584
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20150235842
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING APP...
- Publication number 20140295580
- Publication date Oct 2, 2014
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140206187
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Kenichi HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND METHOD FOR PROCESSING METAL FILM
- Publication number 20130306597
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Isao Gunji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD
- Publication number 20130295751
- Publication date Nov 7, 2013
- TOKYO ELECTRON LIMITED
- Takamasa Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20130217225
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Takashi Hayakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20130203260
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM
- Publication number 20130075248
- Publication date Mar 28, 2013
- Hyogo Prefecture
- Kenichi HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110318925
- Publication date Dec 29, 2011
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
- Publication number 20110265718
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
- Publication number 20090253258
- Publication date Oct 8, 2009
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080280437
- Publication date Nov 13, 2008
- TOKYO ELECTRON LIMITED
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080226826
- Publication date Sep 18, 2008
- Tokyo Electon Limited
- Takashi Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of repairing seed layer for damascene interconnects
- Publication number 20070148972
- Publication date Jun 28, 2007
- Kenichi Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electroless plating apparatus and electroless plating method
- Publication number 20070134431
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and electroless plating method
- Publication number 20070128373
- Publication date Jun 7, 2007
- TOKYO ELECTRON LIMITED
- Kenichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electroless plating apparatus and method
- Publication number 20060081461
- Publication date Apr 20, 2006
- TOKYO ELECTRON LIMITED
- Miho Jomen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenichi HARA

Person

Patents Grantslast 30 patents

Etching method, etching apparatus, and storage medium

Method for manufacturing semiconductor device

Semiconductor manufacturing apparatus and semiconductor manufacturi...

Substrate processing method and substrate processing apparatus

Semiconductor manufacturing apparatus and semiconductor manufacturi...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE PRODUCTION METHOD AND PRODUCTION APPARATUS

METHOD AND APPARATUS FOR REMOVING RESIDUE LAYER

PLANARIZATION METHOD, SUBSTRATE TREATMENT SYSTEM, MRAM MANUFACTURIN...

TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURING APP...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

PROCESSING APPARATUS AND METHOD FOR PROCESSING METAL FILM

THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD, ETCHING APPARATUS, AND STORAGE MEDIUM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...

SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...

Substrate Processing Method and Substrate Processing Apparatus

Substrate Processing Method and Substrate Processing Apparatus

Method of repairing seed layer for damascene interconnects

Electroless plating apparatus and electroless plating method

Electroless plating apparatus and electroless plating method

Electroless plating apparatus and method