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Polishing apparatus
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Patent number 11,865,665
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Issue date Jan 9, 2024
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Ebara Corporation
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Kenichi Kobayashi
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B24 - GRINDING POLISHING
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Search method and apparatus
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Patent number 11,762,918
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Issue date Sep 19, 2023
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Fujitsu Limited
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Akira Ura
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G06 - COMPUTING CALCULATING COUNTING
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Jig for a polishing apparatus
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Patent number 11,305,399
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Issue date Apr 19, 2022
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Ebara Corporation
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Kenichi Kobayashi
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Substrate holding parts
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Patent number D890824
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Issue date Jul 21, 2020
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Ebara Corporation
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Kenichi Kobayashi
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D15 - Machines not elsewhere specified
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Substrate holding parts
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Patent number D890825
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Issue date Jul 21, 2020
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Ebara Corporation
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Kenichi Kobayashi
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D15 - Machines not elsewhere specified
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Substrate holding parts
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Patent number D890823
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Issue date Jul 21, 2020
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Ebara Corporation
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Kenichi Kobayashi
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D15 - Machines not elsewhere specified