Kenichi SUGITA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate drying apparatus, substrate drying method and control pro...
- Patent number 10,008,380
- Issue date Jun 26, 2018
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus, substrate drying method and control pro...
- Patent number 8,769,842
- Issue date Jul 8, 2014
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding rotating mechanism, and substrate processing appa...
- Patent number 8,087,419
- Issue date Jan 3, 2012
- Ebara Corporation
- Hiroyuki Kaneko
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding rotating mechanism, and substrate processing appa...
- Patent number 7,938,130
- Issue date May 10, 2011
- Ebara Corporation
- Hiroyuki Kaneko
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20140259728
- Publication date Sep 18, 2014
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20130219740
- Publication date Aug 29, 2013
- EBARA CORPORATION
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...
- Publication number 20120193506
- Publication date Aug 2, 2012
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...
- Publication number 20110289795
- Publication date Dec 1, 2011
- Tomoatsu ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING ROTATING MECHANISM, AND SUBSTRATE PROCESSING APPA...
- Publication number 20110168214
- Publication date Jul 14, 2011
- Hiroyuki Kaneko
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus, substrate transfer apparatus, subst...
- Publication number 20090067959
- Publication date Mar 12, 2009
- Nobuyuki Takahashi
- B24 - GRINDING POLISHING
Information Patent Application
Substrate holding rotating mechanism, and substrate processing appa...
- Publication number 20070226992
- Publication date Oct 4, 2007
- Hiroyuki Kaneko
- B24 - GRINDING POLISHING

Kenichi SUGITA

Person

Patents Grantslast 30 patents

Substrate drying apparatus, substrate drying method and control pro...

Substrate drying apparatus, substrate drying method and control pro...

Substrate holding rotating mechanism, and substrate processing appa...

Substrate holding rotating mechanism, and substrate processing appa...

Patents Applicationslast 30 patents

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFER APPARATUS, SUBST...

SUBSTRATE DRYING APPARATUS, SUBSTRATE DRYING METHOD AND CONTROL PRO...

SUBSTRATE HOLDING ROTATING MECHANISM, AND SUBSTRATE PROCESSING APPA...

Substrate processing apparatus, substrate transfer apparatus, subst...

Substrate holding rotating mechanism, and substrate processing appa...