KENICHI YAMAGA

Person

SAGAMIHARA-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of heat insulation wall body and heat insulati...
- Patent number 9,829,145
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Makoto Kobayashi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 9,790,597
- Issue date Oct 17, 2017
- Tokyo Electron Limited
- Kenichi Yamaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment furnace and heat treatment apparatus
- Patent number 9,466,515
- Issue date Oct 11, 2016
- Nichias Corporation
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus and cooling method
- Patent number 9,099,505
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Yoshinori Kusakabe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thermal processing furnace
- Patent number 8,476,560
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Makoto Kobayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heat treatment apparatus, heater, and method for manufacturing the...
- Patent number 8,253,075
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Makoto Kobayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heating apparatus for heating objects to be heated, heating method...
- Patent number 8,089,031
- Issue date Jan 3, 2012
- Tokyo Electron Limited
- Kenichi Yamaga
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal processing apparatus and thermal processing method for obje...
- Patent number 8,080,767
- Issue date Dec 20, 2011
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing furnace and vertical-type heat processing apparatus
- Patent number 8,023,806
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takashi Ichikawa
- F26 - DRYING
Information Patent Grant
Heat processing furnace and vertical-type heat processing apparatus
- Patent number 7,974,525
- Issue date Jul 5, 2011
- Tokyo Electron Limited
- Makoto Kobayashi
- F26 - DRYING
Information Patent Grant
Heat-processing furnace and manufacturing method thereof
- Patent number 7,888,622
- Issue date Feb 15, 2011
- Tokyo Electron Limited
- Ken Nakao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater for semiconductor manufacturing
- Patent number D604257
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Yasuhiro Inatomi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Cooling device and heat treating device using the same
- Patent number 7,528,347
- Issue date May 5, 2009
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing unit
- Patent number 7,479,619
- Issue date Jan 20, 2009
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 7,311,520
- Issue date Dec 25, 2007
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single-wafer type heat treatment apparatus for semiconductor proces...
- Patent number 7,150,628
- Issue date Dec 19, 2006
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment apparatus
- Patent number 7,144,823
- Issue date Dec 5, 2006
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment system
- Patent number 7,102,104
- Issue date Sep 5, 2006
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus, method of operating the same and wafer...
- Patent number 6,390,754
- Issue date May 21, 2002
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus
- Patent number 6,369,361
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Takanori Saito
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thermal processing apparatus
- Patent number 5,884,917
- Issue date Mar 23, 1999
- Tokyo Electron Tohoku Kabushiki Kaisha
- Kenichi Yamaga
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Vertical heat treating apparatus
- Patent number 5,829,969
- Issue date Nov 3, 1998
- Tokyo Electron Ltd.
- Masahiro Miyashita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thermal processing method and apparatus therefor
- Patent number 5,750,436
- Issue date May 12, 1998
- Tokyo Electron Kabushiki Kaisha
- Kenichi Yamaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling temperature in rapid heat trea...
- Patent number 5,616,264
- Issue date Apr 1, 1997
- Tokyo Electron Limited
- Katsuo Nishi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat treating semiconductors at normal pressure and l...
- Patent number 5,578,132
- Issue date Nov 26, 1996
- Tokyo Electron Kabushiki Kaisha
- Kenichi Yamaga
- C30 - CRYSTAL GROWTH
Information Patent Grant
Thermal processing apparatus
- Patent number 5,533,736
- Issue date Jul 9, 1996
- Tokyo Electron Kabushiki Kaisha
- Kenichi Yamaga
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Thermal processing method and apparatus therefor
- Patent number 5,484,484
- Issue date Jan 16, 1996
- Tokyo Electron Kabushiki
- Kenichi Yamaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piping connection device
- Patent number 5,362,229
- Issue date Nov 8, 1994
- Tokyo Electron Kabushiki Kaisha
- Kenichi Yamaga
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Clean air apparatus
- Patent number 5,261,935
- Issue date Nov 16, 1993
- Tokyo Electron Sagami Limited
- Katsumi Ishii
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 5,221,201
- Issue date Jun 22, 1993
- Tokyo Electron Sagami Limited
- Kenichi Yamaga
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20170226639
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Kenichi YAMAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF HEAT INSULATION WALL BODY AND HEAT INSULATI...
- Publication number 20140113087
- Publication date Apr 24, 2014
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- B32 - LAYERED PRODUCTS
Information Patent Application
HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS
- Publication number 20120329002
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Makoto KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE-MEASURING SUBSTRATE AND HEAT TREATMENT APPARATUS
- Publication number 20120270169
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Kenichi YAMAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS AND COOLING METHOD
- Publication number 20110076632
- Publication date Mar 31, 2011
- TOKYO ELECTRON LIMITED
- Yoshinori KUSAKABE
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat Treatment Apparatus, Heater, and Method for Manufacturing the...
- Publication number 20100224614
- Publication date Sep 9, 2010
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD FOR OBJE...
- Publication number 20090311807
- Publication date Dec 17, 2009
- TOKYO ELECTRON LIMITED
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing furnace
- Publication number 20090194521
- Publication date Aug 6, 2009
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heat processing furnace and vertical-type heat processing apparatus
- Publication number 20080232787
- Publication date Sep 25, 2008
- Takashi Ichikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus for heating objects to be heated, heating method...
- Publication number 20080203084
- Publication date Aug 28, 2008
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat processing furnace and vertical-type heat processing apparatus
- Publication number 20080205864
- Publication date Aug 28, 2008
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat-processing furnace and manufacuring method thereof
- Publication number 20080073334
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- Ken Nakao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermal processing unit
- Publication number 20060258170
- Publication date Nov 16, 2006
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single-wafer type heat treatment apparatus for semiconductor proces...
- Publication number 20060032072
- Publication date Feb 16, 2006
- TOKYO ELECTRON LIMITED
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment apparatus
- Publication number 20060021582
- Publication date Feb 2, 2006
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cooling device and heat treating device using the same
- Publication number 20050225937
- Publication date Oct 13, 2005
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment system
- Publication number 20050121432
- Publication date Jun 9, 2005
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal treating apparatus
- Publication number 20050028738
- Publication date Feb 10, 2005
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS, METHOD OF OPERATING THE SAME AND WAFER...
- Publication number 20010014267
- Publication date Aug 16, 2001
- KENICHI YAMAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus
- Publication number 20010010307
- Publication date Aug 2, 2001
- Takanori Saito
- C30 - CRYSTAL GROWTH

KENICHI YAMAGA

Person

Patents Grantslast 30 patents

Manufacturing method of heat insulation wall body and heat insulati...

Substrate processing apparatus, substrate processing method and sto...

Heat treatment furnace and heat treatment apparatus

Thermal processing apparatus and cooling method

Thermal processing furnace

Heat treatment apparatus, heater, and method for manufacturing the...

Heating apparatus for heating objects to be heated, heating method...

Thermal processing apparatus and thermal processing method for obje...

Heat processing furnace and vertical-type heat processing apparatus

Heat processing furnace and vertical-type heat processing apparatus

Heat-processing furnace and manufacturing method thereof

Heater for semiconductor manufacturing

Cooling device and heat treating device using the same

Thermal processing unit

Heat treatment apparatus

Single-wafer type heat treatment apparatus for semiconductor proces...

Thermal treatment apparatus

Heat treatment system

Wafer processing apparatus, method of operating the same and wafer...

Thermal processing apparatus

Thermal processing apparatus

Vertical heat treating apparatus

Thermal processing method and apparatus therefor

Method and apparatus for controlling temperature in rapid heat trea...

Apparatus for heat treating semiconductors at normal pressure and l...

Thermal processing apparatus

Thermal processing method and apparatus therefor

Piping connection device

Clean air apparatus

Vertical heat treatment apparatus

Patents Applicationslast 30 patents

Substrate Processing Apparatus, Substrate Processing Method and Sto...

MANUFACTURING METHOD OF HEAT INSULATION WALL BODY AND HEAT INSULATI...

HEAT TREATMENT FURNACE AND HEAT TREATMENT APPARATUS

TEMPERATURE-MEASURING SUBSTRATE AND HEAT TREATMENT APPARATUS

THERMAL PROCESSING APPARATUS AND COOLING METHOD

Heat Treatment Apparatus, Heater, and Method for Manufacturing the...

THERMAL PROCESSING APPARATUS AND THERMAL PROCESSING METHOD FOR OBJE...

Thermal processing furnace

Heat processing furnace and vertical-type heat processing apparatus

Heating apparatus for heating objects to be heated, heating method...

Heat processing furnace and vertical-type heat processing apparatus

Heat-processing furnace and manufacuring method thereof

Thermal processing unit

Single-wafer type heat treatment apparatus for semiconductor proces...

Heat treatment apparatus

Cooling device and heat treating device using the same

Heat treatment system

Thermal treating apparatus

WAFER PROCESSING APPARATUS, METHOD OF OPERATING THE SAME AND WAFER...

Thermal processing apparatus