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Kenichiro AIKAWA

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  • Handa-City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Ceramic heater with shaft
    • Patent number 12,108,499
    • Issue date Oct 1, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement table and method of manufacturing the same
    • Patent number 12,087,613
    • Issue date Sep 10, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ceramic heater
    • Patent number 12,027,385
    • Issue date Jul 2, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck with high insulation performance and electrosta...
    • Patent number 11,951,583
    • Issue date Apr 9, 2024
    • NGK Insulators, Ltd.
    • Hiroshi Takebayashi
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer placement table
    • Patent number 11,948,825
    • Issue date Apr 2, 2024
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck heater
    • Patent number 11,837,490
    • Issue date Dec 5, 2023
    • NGL INSULATORS, LTD.
    • Kenichiro Aikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck assembly, electrostatic chuck, and focus ring
    • Patent number 11,610,798
    • Issue date Mar 21, 2023
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electrostatic chuck and method for manufacturing the same
    • Patent number 11,282,734
    • Issue date Mar 22, 2022
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 9,202,718
    • Issue date Dec 1, 2015
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 9,184,081
    • Issue date Nov 10, 2015
    • NGK Insulators, Ltd.
    • Kenichiro Aikawa
    • C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER PLACEMENT TABLE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20220102186
    • Publication date Mar 31, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220053611
    • Publication date Feb 17, 2022
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220046762
    • Publication date Feb 10, 2022
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER
    • Publication number 20220037188
    • Publication date Feb 3, 2022
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220030668
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC HEATER WITH SHAFT
    • Publication number 20220030669
    • Publication date Jan 27, 2022
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER PLACEMENT TABLE
    • Publication number 20210398840
    • Publication date Dec 23, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20210394320
    • Publication date Dec 23, 2021
    • NGK Insulators, Ltd.
    • Hiroshi TAKEBAYASHI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    CERAMIC HEATER
    • Publication number 20210225669
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER
    • Publication number 20210225683
    • Publication date Jul 22, 2021
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK ASSEMBLY, ELECTROSTATIC CHUCK, AND FOCUS RING
    • Publication number 20200251371
    • Publication date Aug 6, 2020
    • NGK Insulators, Ltd.
    • Tatsuya KUNO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20200126837
    • Publication date Apr 23, 2020
    • NGK Insulators, Ltd.
    • Tatsuya Kuno
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20130235507
    • Publication date Sep 12, 2013
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20130229746
    • Publication date Sep 5, 2013
    • NGK Insulators, Ltd.
    • Kenichiro AIKAWA
    • B32 - LAYERED PRODUCTS