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Kenichiro Chisaka
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Hyogo, JP
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last 30 patents
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Patent Grant
Method of generating electron-beam data for creating a mask
Patent number
6,189,135
Issue date
Feb 13, 2001
Mitsubishi Electric Semiconductor Software Co., Ltd.
Kenichiro Chisaka
B82 - NANO-TECHNOLOGY
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Patent Grant
Electron-beam data generating apparatus
Patent number
6,056,785
Issue date
May 2, 2000
Mitsubishi Electric Semiconductor Software Co., Ltd.
Kenichiro Chisaka
B82 - NANO-TECHNOLOGY