Membership
Tour
Register
Log in
Kenji Marumoto
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Stress adjustment method of X-ray mask
Patent number
6,265,113
Issue date
Jul 24, 2001
Mitsubishi Denki Kabushiki Kaisha
Hideki Yabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
X-ray mask provided with an alignment mark and method of manufactur...
Patent number
6,212,252
Issue date
Apr 3, 2001
Mitsubishi Denki Kabushiki Kaisha
Koji Kise
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing X-ray mask and heating apparatus
Patent number
5,953,492
Issue date
Sep 14, 1999
Mitsubishi Denki Kabushiki Kaisha
Hideki Yabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing X-ray mask and heating apparatus
Patent number
5,834,142
Issue date
Nov 10, 1998
Mitsubishi Denki Kabushiki Kaisha
Hideki Yabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of making X-ray mask having reduced stress
Patent number
5,677,090
Issue date
Oct 14, 1997
Mitsubishi Denki Kabushiki Kaisha
Kenji Marumoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
X-ray mask and its fabrication method
Patent number
5,496,667
Issue date
Mar 5, 1996
Mitsubishi Denki Kabushiki Kaisha
Hideki Yabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Exposure method, exposure apparatus, X-ray mask, semiconductor devi...
Publication number
20020196896
Publication date
Dec 26, 2002
Mitsubishi Denki Kabushiki Kaisha
Toyoki Kitayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY