Kenneth George Delfin

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Meridian, IN, US

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Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for In-Situ Wafer Edge and Backside Plasma Clea...
- Publication number 20170256393
- Publication date Sep 7, 2017
- LAM RESEARCH CORPORATION
- Keechan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for In-Situ Wafer Edge and Backside Plasma Clea...
- Publication number 20150020848
- Publication date Jan 22, 2015
- LAM RESEARCH CORPORATION
- Keechan Kim
- H01 - BASIC ELECTRIC ELEMENTS