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Kenneth H. Womack
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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High speed autofocus and tilt for an optical imaging system
Patent number
6,677,565
Issue date
Jan 13, 2004
Veeco Tucson Inc.
Michael Hermann Wahl
G02 - OPTICS
Information
Patent Grant
High precision optical metrology using frequency domain interpolation
Patent number
6,314,212
Issue date
Nov 6, 2001
Veeco Instruments Inc.
Kenneth Howard Womack
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for measuring a small gap using a Savart plate
Patent number
6,184,993
Issue date
Feb 6, 2001
Phase Metrics, Inc.
Carlos A. Durán
G11 - INFORMATION STORAGE
Information
Patent Grant
Apparatus and method for surface inspection by specular interferome...
Patent number
5,875,029
Issue date
Feb 23, 1999
Phase Metrics, Inc.
Peter C. Jann
G01 - MEASURING TESTING
Information
Patent Grant
Non-contact optical glide tester
Patent number
5,818,592
Issue date
Oct 6, 1998
Phase Metrics, Inc.
Kenneth Womack
G01 - MEASURING TESTING
Information
Patent Grant
Thin film flying height calibration disk for calibrating flying hei...
Patent number
5,808,736
Issue date
Sep 15, 1998
Phase Metrics, Inc.
Kenneth H. Womack
G11 - INFORMATION STORAGE
Information
Patent Grant
Combined interferometer/ellipsometer for measuring small spacings
Patent number
5,793,480
Issue date
Aug 11, 1998
Phase Metrics, Inc.
Christopher A. Lacey
G01 - MEASURING TESTING
Information
Patent Grant
Determining the complex refractive index phase offset in interferom...
Patent number
5,781,299
Issue date
Jul 14, 1998
Phase Metrics
Kenneth H. Womack
G11 - INFORMATION STORAGE
Information
Patent Grant
Combined interferometer/polarimeter
Patent number
5,777,740
Issue date
Jul 7, 1998
Phase Metrics
Christopher A. Lacey
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for efficient electrostatic discharge on glass...
Patent number
5,696,585
Issue date
Dec 9, 1997
Phase Metrics
Michael Wahl
G11 - INFORMATION STORAGE
Information
Patent Grant
Imaging polarimeter detector for measurement of small spacings
Patent number
5,638,178
Issue date
Jun 10, 1997
Phase Metrics
Christopher A. Lacey
G01 - MEASURING TESTING