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Kawasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Resist composition, method of forming resist pattern, and polymer c...
Patent number
10,976,661
Issue date
Apr 13, 2021
Tokyo Ohka Kogyo Co., Ltd.
Hiroto Yamazaki
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
10,606,174
Issue date
Mar 31, 2020
Tokyo Ohka Kogyo Co., Ltd.
Masahito Yahagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
10,324,377
Issue date
Jun 18, 2019
Tokyo Ohka Kogyo Co., Ltd.
Taku Hirayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
10,101,658
Issue date
Oct 16, 2018
Tokyo Ohka Kogyo Co., Ltd.
Taku Hirayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist pattern forming method and developer for lithography
Patent number
9,964,851
Issue date
May 8, 2018
Tokyo Ohka Kogyo Co., Ltd.
Kazufumi Sato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive-type resist composition, method for forming resist pattern...
Patent number
9,766,541
Issue date
Sep 19, 2017
Tokyo Ohka Kogyo Co., Ltd.
Hiroto Yamazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition for EUV or EB, and method of forming resist pattern
Patent number
9,057,948
Issue date
Jun 16, 2015
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND POLYMER C...
Publication number
20190018319
Publication date
Jan 17, 2019
Tokyo Ohka Kogyo Co., Ltd.
Hiroto YAMAZAKI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20180210338
Publication date
Jul 26, 2018
Tokyo Ohka Kogyo Co., Ltd.
Masahito YAHAGI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST PATTERN FORMING METHOD AND DEVELOPER FOR LITHOGRAPHY
Publication number
20170059994
Publication date
Mar 2, 2017
Tokyo Ohka Kogyo Co., Ltd.
Kazufumi SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE-TYPE RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN...
Publication number
20160376233
Publication date
Dec 29, 2016
Tokyo Ohka Kogyo Co., Ltd.
Hiroto YAMAZAKI
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20160363860
Publication date
Dec 15, 2016
Tokyo Ohka Kogyo Co., Ltd.
Taku HIRAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20160209745
Publication date
Jul 21, 2016
Tokyo Ohka Kogyo Co., Ltd.
Taku HIRAYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION FOR EUV OR EB AND METHOD OF FORMING RESIST PATTERN
Publication number
20140093824
Publication date
Apr 3, 2014
Tokyo Ohka Kogyo Co., Ltd.
Daisuke Kawana
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION FOR EUV OR EB, AND METHOD OF FORMING RESIST PATTERN
Publication number
20130143159
Publication date
Jun 6, 2013
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20110311913
Publication date
Dec 22, 2011
Tokyo Ohka Kogyo Co., Ltd.
Kenta SUZUKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY