Patent Application
20250189893
The present invention relates to a resist composition and a method for forming a resist pattern.
Priority is claimed on Japanese Patent Application No. 2022-053488, filed Mar. 29, 2022, the content of which is incorporated herein by reference.
In recent years, in the manufacture of semiconductor elements and liquid crystal display elements, advances in lithography technologies have led to rapid progress in the field of pattern miniaturization. These pattern miniaturization techniques typically involve shortening the wavelength (increasing the energy) of the exposure light source.
Resist materials are required to have lithography characteristics such as sensitivity to these kinds of exposure light sources and resolution that enables reproduction of patterns with minute dimensions.
As a resist material that satisfies these requirements, a chemically amplified resist composition containing a base material component whose solubility in a developing solution is changed by an action of an acid and an acid generator component that generates an acid upon light exposure has been used in the related art.
In the chemically amplified resist composition, a resin having a plurality of constitutional units is typically used in order to improve lithography characteristics and the like.
Further, in formation of the resist pattern, the behavior of an acid generated by an acid generator component upon light exposure serves as an element that greatly affects the lithographic characteristics.
For example, Patent Document 1 discloses a resist composition containing a resin component (A1) that has a constitutional unit (a0) containing an acid dissociable group formed of a cyclic hydrocarbon group having a substituent carbon-carbon unsaturated bond.
With the further progress of the lithography technology and resist pattern fining, for example, it is aimed to form a fine pattern with a size of several tens of nanometers in lithography by EUV and EB. As the resist pattern size becomes smaller as described above, it is required to improve each of the lithography characteristics such as sensitivity, resolution, and roughness without the trade-off thereof.
The present invention has been made in consideration of the above-described circumstances, and an object of the present invention is to provide a resist composition with satisfactory sensitivity, resolution, and roughness characteristics, and a method for forming a resist pattern using the resist composition.
In order to achieve the above-described object, the present invention employs the following configurations.
That is, according to a first aspect of the present invention, there is provided a resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by an action of the acid, the resist composition including: a resin component (A1) whose solubility in a developing solution is changed by an action of an acid, in which the resin component (A1) has a constitutional unit (a01) derived from a compound represented by General Formula (a0-1) and a constitutional unit (a02) containing a lactone-containing cyclic group, a —SO2— containing cyclic group, or a carbonate-containing cyclic group.
[In the formula, W01 represents a polymerizable group-containing group. Ya01 represents a single bond or a divalent linking group. Ra01 represents an acid dissociable group. q represents an integer of 0 to 3. n represents an integer of 1 or greater. Here, n≤q×2+4 is satisfied.]
According to a second aspect of the present invention, there is provided a method for forming a resist pattern, including: a step of forming a resist film on a support using the resist composition according to the first aspect; a step of exposing the resist film to light; and a step of developing the resist film exposed to light to form a resist pattern.
According to the present invention, it is possible to provide a resist composition with satisfactory sensitivity, resolution, and roughness characteristics, and a method for forming a resist pattern using the resist composition.
In the present specification and the present claims, the term “aliphatic” is a relative concept used in relation to the term “aromatic”, and defines a group or compound that has no aromaticity.
The term “alkyl group” includes a linear, branched, or cyclic monovalent saturated hydrocarbon group unless otherwise specified. The same applies to the alkyl group in an alkoxy group.
The term “alkylene group” includes a linear, branched, or cyclic divalent saturated hydrocarbon group unless otherwise specified.
Examples of “halogen atom” include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
The term “constitutional unit” indicates a monomer unit constituting a polymer compound (a resin, a polymer, or a copolymer).
The expression “may have a substituent” includes both a case where a hydrogen atom (—H) is substituted with a monovalent group and a case where a methylene (—CH2—) group is substituted with a divalent group.
The term “light exposure” is a general concept for irradiation with radiation.
The term “acid decomposable group” indicates a group having acid decomposability in which at least some bonds in the structure of the acid decomposable group can be cleaved by the action of an acid.
Examples of the acid decomposable group whose polarity is increased by the action of an acid include groups which are decomposed by the action of an acid to generate a polar group.
Examples of the polar group include a carboxy group, a hydroxyl group, an amino group, and a sulfo group (—SO3H).
More specific examples of the acid decomposable group include a group in which the above-described polar group has been protected by an acid dissociable group (such as a group in which a hydrogen atom of the OH-containing polar group has been protected by an acid dissociable group).
Here, the term “acid dissociable group” indicates both a group (i) having an acid dissociation property in which a bond between the acid dissociable group and an atom adjacent to the acid dissociable group can be cleaved by the action of an acid and a group (ii) in which some bonds are cleaved by the action of an acid, a decarboxylation reaction further occurs, and thus the bond between the acid dissociable group and the atom adjacent to the acid dissociable group can be cleaved.
It is necessary that the acid dissociable group that constitutes the acid decomposable group is a group which exhibits a lower polarity than that of the polar group generated by the dissociation of the acid dissociable group. In this manner, in a case where the acid dissociable group is dissociated by the action of an acid, a polar group exhibiting a higher polarity than that of the acid dissociable group is generated so that the polarity is increased. As a result, the polarity of an entire component (A1) is increased. Due to the increase in the polarity, relatively, the solubility in a developing solution is changed such that the solubility is increased in a case where the developing solution is an alkali developing solution and the solubility is decreased in a case where the developing solution is an organic developing solution.
The term “base material component” denotes an organic compound having a film-forming ability. Organic compounds used as the base material component are classified into non-polymers and polymers. As the non-polymers, those having a molecular weight of 500 or greater and less than 4000 are typically used. Hereinafter, the term “low-molecular-weight compound” denotes a non-polymer having a molecular weight of 500 or greater and less than 4000. As the polymer, those having a molecular weight of 1000 or greater are typically used. Hereinafter, “resin”, “polymer compound”, or “polymer” indicates a polymer having a molecular weight of 1000 or greater. As the molecular weight of the polymer, the weight-average molecular weight in terms of polystyrene according to gel permeation chromatography (GPC) is used.
The expression “constitutional unit to be derived” denotes a constitutional unit formed by cleavage of a multiple bond between carbon atoms, for example, an ethylenic double bond.
In “acrylic acid ester”, the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent. The substituent (Rαx) that substitutes the hydrogen atom bonded to the carbon atom at the α-position is an atom other than the hydrogen atom or a group. Further, the acrylic acid ester includes itaconic acid diester in which the substituent (Rαx) has been substituted with a substituent having an ester bond and α-hydroxyacryl ester in which the substituent (Rαx) has been substituted with a hydroxyalkyl group or a group obtained by modifying a hydroxyl group thereof. Further, the carbon atom at the α-position of acrylic acid ester indicates the carbon atom to which the carbonyl group of acrylic acid is bonded, unless otherwise specified.
Hereinafter, acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position has been substituted with a substituent is also referred to as α-substituted acrylic acid ester.
The concept “derivative” includes those obtained by substituting a hydrogen atom at the α-position of a target compound with another substituent such as an alkyl group or a halogenated alkyl group, and derivatives thereof. Examples of the derivatives thereof include those obtained by substituting a hydrogen atom of a hydroxyl group of a target compound, in which the hydrogen atom at the α-position may be substituted with a substituent, with an organic group, and those obtained by bonding a substituent other than a hydroxyl group to a target compound in which the hydrogen atom at the α-position may be substituted with a substituent. Further, the α-position denotes the first carbon atom adjacent to a functional group unless otherwise specified.
Examples of the substituent that substitutes the hydrogen atom at the α-position of hydroxystyrene include the same substituents as those provided as examples for Rαx.
In the present specification and the scope of the present claims, asymmetric carbons may be present and enantiomers or diastereomers may be present depending on the structures of the chemical formulae. In this case, these isomers are represented by one chemical formula. These isomers may be used alone or in the form of a mixture.
The resist composition according to the present embodiment is a resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid.
The resist composition contains a base material component (A) (hereinafter, also referred to as “component (A)”) whose solubility in a developing solution is changed by the action of the acid.
In the resist composition according to the present embodiment, the component (A) may generate an acid upon light exposure, or an additive component that is blended separately from the component (A) may generate an acid upon light exposure.
Specifically, the resist composition according to the present embodiment may (1) further contain an acid generator component (B) (hereinafter, referred to as “component (B)”) that generates an acid upon light exposure; (2) have a component (A) that generates an acid upon light exposure; and (3) have a component (A) that generates an acid upon light exposure and further contains component (B).
That is, in the cases of (2) and (3) described above, the component (A) is “base material component which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid”. In a case where the component (A) is a base material component which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid, it is preferable that the component (A1) described below is a resin which generates an acid upon light exposure and whose solubility in a developing solution is changed by the action of the acid. As such a resin, a polymer compound having a constitutional unit that generates an acid upon light exposure can be used. As the constitutional unit that generates an acid upon light exposure, those which have been known can be used.
Among the examples, it is preferable that the resist composition according to the present embodiment corresponds to the case (1). That is, it is preferable that the resist composition according to the present embodiment contains the component (A) and the component (B).
In a case where a resist film is formed of the resist composition according to the present embodiment and the resist film is selectively exposed to light, since an acid is generated from the component (B) in an exposed portion of the resist film and the solubility of the component (A) in a developing solution is changed by the action of the acid while the solubility of the component (A) in a developing solution is not changed in an unexposed portion of the resist film, a difference in solubility in the developing solution occurs between the exposed portion and the unexposed portion. Therefore, in a case where the resist film is developed, the exposed portion of the resist film is dissolved and removed to form a positive-tone resist pattern in a case where the resist composition is of a positive tone, whereas the unexposed portion of the resist film is dissolved and removed to form a negative tone resist pattern in a case where the resist composition is of a negative tone.
The resist composition of the present embodiment may be a positive-tone resist composition or a negative-tone resist composition. Further, the resist composition of the present embodiment may be used in an alkali developing process using an alkali developing solution in the developing treatment in a case of forming a resist pattern or may be used in a solvent developing process using a developing solution containing an organic solvent (organic developing solution) in the developing treatment.
In the resist composition according to the present embodiment, the component (A) contains a resin component (A1) (hereinafter, also referred to as “component (A1)”) whose solubility in a developing solution is changed by the action of an acid.
Since the polarity of the base material component before and after the light exposure is changed by using the component (A1), a satisfactory development contrast can be obtained not only in an alkali developing process but also in a solvent developing process.
As the component (A), another polymer compound and/or a low-molecular-weight compound may be used in combination with the component (A1).
In the resist composition according to the present embodiment, the component (A) may be used alone or a combination of two or more kinds thereof may be used.
The component (A1) is a resin component whose solubility in a developing solution is changed by the action of an acid.
The component (A1) has a constitutional unit (a01) derived from a compound represented by General Formula (a0-1) and a constitutional unit (a02) containing a lactone-containing cyclic group and a —SO2— containing cyclic group or a carbonate-containing cyclic group.
<<Constitutional Unit (a01)>>
The constitutional unit (a01) is a constitutional unit derived from a compound represented by General Formula (a0-1).
[In the formula, W01 represents a polymerizable group-containing group. Ya01 represents a single bond or a divalent linking group. Ra01 represents an acid dissociable group. q represents an integer of 0 to 3. n represents an integer of 1 or greater. Here, n≤q×2+4 is satisfied.]
In Formula (a0-1), W01 represents a polymerizable group-containing group. The term “polymerizable group” as W01 denotes a group that enables a compound containing a polymerizable group to be polymerized by radical polymerization or the like, which is a group having a multiple bond between carbon atoms, such as an ethylenic double bond.
In the constitutional unit (a01), the multiple bonds in the polymerizable group are cleaved to form a main chain.
Examples of the polymerizable group as W01 include a vinyl group, an allyl group, an acryloyl group, a methacryloyl group, a fluorovinyl group, a difluorovinyl group, a trifluorovinyl group, a difluorotrifluoromethylvinyl group, a trifluoroallyl group, a perfluoroallyl group, a trifluoromethylacryloyl group, a nonylfluorobutylacryloyl group, a vinyl ether group, a fluorine-containing vinyl ether group, an allyl ether group, a fluorine-containing allyl ether group, a styryl group, a vinylnaphthyl group, a fluorine-containing styryl group, a fluorine-containing vinylnaphthyl group, a norbornyl group, a fluorine-containing norbornyl group, and a silyl group.
The term “polymerizable group-containing group” as W01 may denote a group formed of only a polymerizable group or a group formed of a polymerizable group and a group other than the polymerizable group. Examples of the group other than the polymerizable group include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
Divalent Hydrocarbon Group which May have Substituent:
In a case where the group other than the polymerizable group represents a divalent hydrocarbon group which may have a substituent, the hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group.
Aliphatic Hydrocarbon Group as a Group Other than the Polymerizable Group
The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. The aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group is saturated.
Examples of the aliphatic hydrocarbon group include a linear or branched aliphatic hydrocarbon group and an aliphatic hydrocarbon group having a ring in the structure thereof.
The linear aliphatic hydrocarbon group has preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms.
As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group has preferably 2 to 10 carbon atoms, more preferably 3 to 6 carbon atoms, still more preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms.
As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
The above-described linear or branched aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include a fluorine atom, a fluorinated alkyl group having 1 to 5 carbon atoms which has been substituted with a fluorine atom, and a carbonyl group.
Examples of the aliphatic hydrocarbon group having a ring in the structure thereof include a cyclic aliphatic hydrocarbon group which may have a substituent having a heteroatom in the ring structure thereof (a group in which two hydrogen atoms have been removed from an aliphatic hydrocarbon ring), a group in which the cyclic aliphatic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the cyclic aliphatic hydrocarbon group is interposed in the middle of a linear or branched aliphatic hydrocarbon group. Examples of the linear or branched aliphatic hydrocarbon group include the same groups as described above.
The cyclic aliphatic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The cyclic aliphatic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which two hydrogen atoms have been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which two hydrogen atoms have been removed from a polycycloalkane is preferable. As the polycycloalkane, a group having 7 to 12 carbon atoms is preferable. Specific examples of the polycycloalkane include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
The cyclic aliphatic hydrocarbon group may or may not have a substituent. Examples of the substituent include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, and a carbonyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
The alkoxy group as the substituent is preferably an alkoxy group having 1 to 5 carbon atoms, more preferably a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group, and most preferably a methoxy group or an ethoxy group.
Examples of the halogen atom for the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is preferable.
Examples of the halogenated alkyl group as the substituent include groups in which some or all hydrogen atoms in the above-described alkyl groups have been substituted with the above-described halogen atoms.
In the cyclic aliphatic hydrocarbon group, some carbon atoms constituting the ring structure thereof may be substituted with a substituent having a heteroatom. As the substituent having a heteroatom, —O—, —C(═O)—O—, —S—, —S(═O)2—, or —S(═O)2—O— is preferable.
Aromatic Hydrocarbon Group as Group Other than the Polymerizable Group
The aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2) π electrons and may be monocyclic or polycyclic. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and aromatic heterocyclic rings in which some carbon atoms constituting the above-described aromatic hydrocarbon rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the aromatic hydrocarbon group include a group (an arylene group or a heteroarylene group) obtained by removing two hydrogen atoms from the above-described aromatic hydrocarbon ring or the above-described aromatic heterocyclic ring; a group obtained by removing two hydrogen atoms from an aromatic compound (for example, biphenyl or fluorene) having two or more aromatic rings; and a group (for example, a group obtained by further removing one hydrogen atom from an aryl group in the arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, or a 2-naphthylethyl group) obtained by substituting one hydrogen atom of a group (an aryl group or a heteroaryl group) obtained by removing one hydrogen atom from the above-described aromatic hydrocarbon ring or the above-described aromatic heterocyclic ring, with an alkylene group. The above-described alkylene group bonded to the aryl group or heteroaryl group has preferably 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
In the aromatic hydrocarbon group, the hydrogen atom in the aromatic hydrocarbon group may be substituted with a substituent. For example, the hydrogen atom bonded to the aromatic ring in the aromatic hydrocarbon group may be substituted with a substituent. Examples of substituents include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, and a hydroxyl group.
The alkyl group as the substituent is preferably an alkyl group having 1 to 5 carbon atoms, and most preferably a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group.
Examples of the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituents include those described as the substituent that substitutes a hydrogen atom in the cyclic aliphatic hydrocarbon group.
In a case where the group other than the polymerizable group is a divalent linking group having a heteroatom, preferred examples of the linking group include-O—, —C(═O)—O—, —C(═O)—, —O—C(═O)—O—, —C(═O)—NH—, —NH—, —NH—C(═NH)— (H may be substituted with a substituent such as an alkyl group, an acyl group, or the like), —S—, —S(═O)2—, —S(═O)2—O—, and a group represented by General Formula: —Y21—O—Y22—, —Y21—O—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21—C(═O)—O]m″—Y22—, —Y21—O—C(═O)—Y22— or —Y21—S(═O)2—O—Y22-[in the formulae, Y21 and Y22 each independently represent a divalent hydrocarbon group which may have a substituent, O represents an oxygen atom, and m″ represents an integer of 0 to 3].
In a case where the divalent linking group having a heteroatom is —C(═O)—NH—, —C(═O)—NH—C(═O)—, —NH—, or —NH—C(═NH)—, H may be substituted with a substituent such as an alkyl group or acyl. The substituent (an alkyl group, an acyl group, or the like) has preferably 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, and particularly preferably 1 to 5 carbon atoms.
In General Formula —Y21—O—Y22—, —Y21—O—, —Y21—C(═O)—O—, —C(═O)—O—Y21—, —[Y21—C(═O)—O]m″—Y22—, —Y21—O—C(═O)—Y22., or —Y21—S(═O)2—O—Y22, Y21 and Y22 each independently represent a divalent hydrocarbon group which may have a substituent. Examples of the divalent hydrocarbon group include the same groups as those provided as examples for the divalent hydrocarbon group which may have a substituent, described in the section of the divalent linking group above.
Y21 represents preferably a linear aliphatic hydrocarbon group, more preferably a linear alkylene group, still more preferably a linear alkylene group having 1 to 5 carbon atoms, and particularly preferably a methylene group or an ethylene group.
Y22 represents preferably a linear or branched aliphatic hydrocarbon group and more preferably a methylene group, an ethylene group, or an alkylmethylene group. The alkyl group in the alkylmethylene group is preferably a linear alkyl group having 1 to 5 carbon atoms, more preferably a linear alkyl group having 1 to 3 carbon atoms, and most preferably a methyl group.
In the group represented by Formula —[Y21—C(═O)—O]m″—Y22—, m″ represents an integer of 0 to 3, preferably an integer of 0 to 2, more preferably 0 or 1, and particularly preferably 1. That is, a group represented by Formula —Y21—C(═O)—O—Y22— is particularly preferable as the group represented by Formula —[Y21—C(═O)—O]m″—Y22—. Among these, a group represented by Formula —(CH2)a′—C(═O)—O—(CH2)b′— is preferable. In the formula, a′ represents an integer of 1 to 10, preferably an integer of 1 to 8, more preferably an integer of 1 to 5, still more preferably 1 or 2, and most preferably 1. b′ represents an integer of 1 to 10, preferably an integer of 1 to 8, more preferably an integer of 1 to 5, still more preferably 1 or 2, and most preferably 1.
It is suitable that W01 represents, for example, a group represented by Chemical Formula: C(RX11) (RX12)═C(RX13)-Yax0-.
In the chemical formula, RX11, RX12, and RX13 each represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Yax0 represents a single bond or a divalent linking group.
The alkyl group having 1 to 5 carbon atoms as RX11, RX12, and RX13 is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. The halogenated alkyl group having 1 to 5 carbon atoms is a group in which some or all hydrogen atoms in the alkyl group having 1 to 5 carbon atoms have been substituted with halogen atoms. As the halogen atom, a fluorine atom is particularly preferable.
Among these, RX11 and RX12 each represent preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and from the viewpoint of industrial availability, more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.
In addition, RX13 represents preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and from the viewpoint of industrial availability, more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.
The divalent linking group as Yax0 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom, and these each have the same definition as described above.
Among the examples, it is preferable that Yax0 represents an ester bond [—C(═O)—O— or —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, an aromatic hydrocarbon group, or a combination thereof, or a single bond. Among these, Yax0 represents more preferably an ester bond [—C(═O)—O— or —O—C(═O)—], a combination of an ester bond [—C(═O)—O— or —O—C(═O)—] and a linear alkylene group, or a single bond, still more preferably an ester bond [—C(═O)—O— or —O—C(═O)—] or a single bond, and particularly preferably a single bond.
In Formula (a0-1), Ya01 represents a single bond or a divalent linking group. The divalent linking group as Ya01 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom, and these each have the same definition as described above.
Among the examples, in Formula (a0-1), it is preferable that Ya01 represents an ester bond [—C(═O)—O— or —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, an aromatic hydrocarbon group, or a combination thereof, or a single bond.
Among these, Ya01 represents more preferably a combination of an ester bond [—C(═O)—O— or —O—C(═O)—] and a linear alkylene group, or a single bond and still more preferably a single bond.
In Formula (a0-1), Ra01 represents an acid dissociable group.
Specific examples of the acid dissociable group include “tertiary alkyl ester type acid dissociable group” and “secondary alkyl ester type acid dissociable group” described below.
Examples of the acid dissociable group that protects a carboxy group include an acid dissociable group represented by General Formula (a0-r-1).
Further, among the acid dissociable groups represented by General Formula (a0-r-1), a group formed of an alkyl group will also be referred to as “tertiary alkyl ester type acid dissociable group” for convenience.
[In Formula (a0-r-1), Ra01 to Ra03 each independently represent a hydrocarbon group, and Ra02 and Ra03 may be bonded to each other to form a ring. * represents a bonding site.]
Examples of the hydrocarbon group as Ra01 include a linear or branched alkyl group, a linear or branched alkenyl group, and a cyclic hydrocarbon group.
The linear alkyl group has preferably 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group has preferably 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group. Among these, an isopropyl group is preferable.
An alkenyl group having 2 to 10 carbon atoms is preferable as the linear or branched alkenyl group.
In a case where Ra01 represents a cyclic hydrocarbon group, the hydrocarbon group may be an alicyclic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
The alicyclic hydrocarbon group which is a monocyclic group is preferably a group in which one hydrogen atom has been removed from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The alicyclic hydrocarbon group which is a polycyclic group is preferably a group in which one hydrogen atom has been removed from a polycycloalkane. The polycycloalkane preferably has 7 to 12 carbon atoms, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
In a case where the cyclic hydrocarbon group as Ra01 is an aromatic hydrocarbon group, the aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2) π electrons and may be monocyclic or polycyclic. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms.
Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and aromatic heterocyclic rings in which some carbon atoms constituting the above-described aromatic hydrocarbon rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the aromatic hydrocarbon group as Ra01 include a group in which one hydrogen atom has been removed from the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring (such as an aryl group or a heteroaryl group); a group in which one hydrogen atom has been removed from an aromatic compound having two or more aromatic rings (such as biphenyl or fluorene); and a group in which one hydrogen atom of the above-described aromatic hydrocarbon ring or aromatic heterocyclic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, a 1-naphthylethyl group, or a 2-naphthylethyl group). The number of carbon atoms in the alkylene group bonded to the aromatic hydrocarbon ring or aromatic heterocyclic ring is preferably in a range of 1 to 4, more preferably 1 or 2, and particularly preferably 1.
The hydrocarbon group as Ra01 may have a substituent. Examples of the substituent include —RP1, —RP2—O—RP1, —RP2—CO—RP1, —RP2—CO—ORP1, —RP2—O—CO—RP1, —RP2—OH, —RP2—CN, and —RP2—COOH (hereinafter, these substituents will also be collectively referred to as “Rax5”).
Here, RP1 represents a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms. Further, RP2 represents a single bond, a chain divalent saturated hydrocarbon group having 1 to 10 carbon atoms, a divalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, or a divalent aromatic hydrocarbon group having 6 to 30 carbon atoms. Here, some or all hydrogen atoms in the chain saturated hydrocarbon group, the aliphatic cyclic saturated hydrocarbon group, and the aromatic hydrocarbon group as RP1 and RP2 may be substituted with fluorine atoms. The aliphatic cyclic hydrocarbon group may have one or more of a single kind of substituents or one or more of each of plural kinds of the substituents.
Examples of the chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms include a monocyclic aliphatic saturated hydrocarbon group such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, or a cyclododecyl group; and a polycyclic aliphatic saturated hydrocarbon group such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo[3.3.1.13,7] decanyl group, a tetracyclo[6.2.1.13,6.02,7] dodecanyl group, or an adamantyl group.
Examples of the monovalent aromatic hydrocarbon group having 6 to 30 carbon atoms include a group formed by removing one hydrogen atom from an aromatic hydrocarbon ring such as benzene, biphenyl, fluorene, naphthalene, anthracene, or phenanthrene.
Examples of the hydrocarbon group as Ra02 or Ra03 include the same groups as those provided as examples for Ra03.
In a case where Ra02 and Ra03 are bonded to each other to form a ring, suitable examples thereof include a group represented by General Formula (a0-r1-01), a group represented by General Formula (a0-r1-02), and a group represented by General Formula (a0-r1-03).
Meanwhile, in a case where Ra01 to Ra03 independently represent a hydrocarbon group without being bonded to each other, suitable examples thereof include a group represented by General Formula (a0-r1-04).
[In Formula (a0-r1-01), Ra001 represents a linear or branched alkyl group which may have a substituent. Yaa0 represents a carbon atom. Xaa0 represents a group that forms a cyclic hydrocarbon group together with Yaa0. Some or all hydrogen atoms of this cyclic hydrocarbon group may be substituted, and some carbon atoms constituting a ring may be substituted with heteroatoms. The symbol * represents a bonding site.
In Formula (a0-r1-02), Yab0 represents a carbon atom. Xab0 represents a group that forms a cyclic hydrocarbon group together with Yab0. Some or all hydrogen atoms of this cyclic hydrocarbon group may be substituted, and some carbon atoms constituting a ring may be substituted with heteroatoms. Ra002 to Ra004 each independently represent a hydrogen atom, a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms. Some or all hydrogen atoms in the chain saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group may be substituted. Two or more of Ra002 to Ra004 may be bonded to each other to form a cyclic structure. The symbol * represents a bonding site.
In Formula (a0-r1-03), Yac0 represents a carbon atom. Xac0 represents a group that forms a cyclic hydrocarbon group together with Yac0. Some or all hydrogen atoms of this cyclic hydrocarbon group may be substituted, and some carbon atoms constituting a ring may be substituted with heteroatoms. Ra005 represents an aromatic hydrocarbon group. Some or all hydrogen atoms contained in the aromatic hydrocarbon group may be substituted, and some carbon atoms constituting a ring may be substituted with heteroatoms. The symbol * represents a bonding site.
In Formula (a0-r1-04), Ra006 and Ra007 each independently represent a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms. Some or all hydrogen atoms in this chain saturated hydrocarbon group may be substituted. Ra008 represents a hydrocarbon group which may have a substituent. * represents a bonding site.]
In Formula (a0-r1-01), Ra001 represents a linear or branched alkyl group which may have a substituent.
The linear alkyl group has preferably 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group has preferably 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group, a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group.
Examples of the substituent that the linear or branched alkyl group as Ra001 may have include Rax5 described above.
In Formula (a0-r1-01), Ra001 represents, among the examples, preferably a linear alkyl group having 1 to 5 carbon atoms or a branched alkyl group having 3 to 10 carbon atoms and more preferably a linear alkyl group having 1 to 4 carbon atoms.
In General Formula (a0-r1-01), Yaa0 represents a carbon atom, and Xaa0 represents a group that forms a cyclic hydrocarbon group together with Yaa0.
The cyclic hydrocarbon group may be an aliphatic hydrocarbon group, may be a condensed cyclic hydrocarbon group of an aliphatic hydrocarbon group with an aromatic hydrocarbon group, or a may be a polycyclic group or a monocyclic group.
The aliphatic hydrocarbon group which is a monocyclic group is preferably a group obtained by removing two or more hydrogen atoms from a monocycloalkane. The monocycloalkane has preferably 3 to 6 carbon atoms and more preferably 5 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
The aliphatic hydrocarbon group which is a polycyclic group is preferably a group obtained by removing two or more hydrogen atoms from a polycycloalkane, where the polycycloalkane preferably has 7 to 12 carbon atoms. Specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
The aromatic hydrocarbon group in the condensed cyclic hydrocarbon group of an aliphatic hydrocarbon group with an aromatic hydrocarbon group is a hydrocarbon group having at least one aromatic ring.
The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2) π electrons and may be monocyclic or polycyclic. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms.
Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and aromatic heterocyclic rings in which some carbon atoms constituting the above-described aromatic hydrocarbon rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Specific examples of the condensed cyclic hydrocarbon group of an aliphatic hydrocarbon group with an aromatic hydrocarbon group are shown below.
Some or all hydrogen atoms contained in the cyclic hydrocarbon group may be substituted, and some carbon atoms constituting a ring may be substituted with a heteroatom.
Specific examples of the substituent that substitutes some or all hydrogen atoms contained in the cyclic hydrocarbon group include Rax5 described above.
In a case where some carbon atoms constituting a ring is substituted with heteroatoms, the heteroatom includes an oxygen atom, a sulfur atom, and a nitrogen atom.
Examples of the heterocyclic ring in the heterocyclic group formed by Xaa0 together with Yaa0 include an aliphatic heterocyclic ring such as tetrahydrofuran, tetrahydropyran, or tetrahydrothiophene.
Among the examples, the cyclic hydrocarbon group formed by Xaa0 together with Yaa0 in Formula (a0-r1-01) is preferably a monocyclic or polycyclic aliphatic hydrocarbon group or a monocyclic aliphatic heterocyclic group, more preferably a monocyclic aliphatic hydrocarbon group, and still more preferably a monocyclic aliphatic hydrocarbon group having 5 or 6 carbon atoms.
In Formula (a0-r1-02), Yab0 represents a carbon atom, and Xab0 represents a group that forms a cyclic hydrocarbon group together with Yab0. Examples of this cyclic hydrocarbon group include the same groups as those provided as examples for the cyclic hydrocarbon group formed by Xaa0 and Yaa0.
In Formula (a0-r1-02), Ra002 to Ra004 each independently represent a hydrogen atom, a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms.
Examples of the chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra002 to Ra004 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, and a decyl group.
Examples of the monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms as Ra002 to Ra004 include a monocyclic aliphatic saturated hydrocarbon group such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a cyclodecyl group, or a cyclododecyl group; and a polycyclic aliphatic saturated hydrocarbon group such as a bicyclo[2.2.2]octanyl group, a tricyclo[5.2.1.02,6]decanyl group, a tricyclo[3.3.1.13,7] decanyl group, a tetracyclo[6.2.1.13,6.02,7] dodecanyl group, or an adamantyl group.
Some or all hydrogen atoms contained in the chain saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group as Ra002 to Ra004 may be substituted with a substituent. Specific examples of the substituent that substitutes some or all hydrogen atoms contained in the chain saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group include Rax5 described above. In a case where some carbon atoms constituting a ring is substituted with heteroatoms, the heteroatom includes an oxygen atom, a sulfur atom, and a nitrogen atom.
Examples of the group having a carbon-carbon double bond generated by two or more of Ra002 to Ra004 being bonded to each other to form a cyclic structure include a cyclopentenyl group, a cyclohexenyl group, a methylcyclopentenyl group, a methylcyclohexenyl group, a cyclopentylidenethenyl group, and a cyclohexylidenethenyl group. Among these, from the viewpoint of ease of synthesis, a cyclopentenyl group, a cyclohexenyl group, or a cyclopentylidenethenyl group is preferable.
In General Formula (a0-r1-02), Ra002 to Ra004 each independently represent, among the examples, preferably a hydrogen atom or a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and still more preferably a hydrogen atom.
In Formula (a0-r1-03), Yac0 represents a carbon atom, and Xac0 represents a group that forms a cyclic hydrocarbon group together with Yac0. Examples of this cyclic hydrocarbon group include the same groups as those provided as examples for the cyclic hydrocarbon group formed by Xaa0 and Yaa0.
In General Formula (a0-r1-03), the aromatic hydrocarbon group represented by Ra005 is preferably a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene or naphthalene, and particularly preferably a group in which one or more hydrogen atoms have been removed from benzene.
Some or all hydrogen atoms of the aromatic hydrocarbon group may be substituted, or some carbon atoms constituting a ring may be substituted with heteroatoms.
Specific examples of the substituent that substitutes some or all hydrogen atoms contained in the aromatic hydrocarbon group include Rax5 described above. In a case where some carbon atoms constituting a ring is substituted with heteroatoms, the heteroatom includes an oxygen atom, a sulfur atom, and a nitrogen atom.
In Formula (a0-r1-04), Ra006 and Ra007 each independently represent a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms.
Examples of the chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra006 and Ra007 include the same groups as those provided as examples for the chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms as Ra002 to Ra004 as described above.
In General Formula (a0-r1-04), Ra006 and Ra007 represent, among the examples, preferably an alkyl group having 1 to 5 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group.
In a case where the chain saturated hydrocarbon group represented by Ra006 and Ra007 is substituted, examples of the substituent thereof include the same substituents as those provided as examples for Rax5.
In Formula (a0-r1-04), Ra008 represents a hydrocarbon group which may have a substituent. Examples of the hydrocarbon group as Ra008 include a linear or branched alkyl group, a linear or branched alkenyl group, and a cyclic hydrocarbon group.
The linear alkyl group as Ra008 has preferably 1 to 5 carbon atoms, more preferably 1 to 4 carbon atoms, and still more preferably 1 or 2 carbon atoms. Specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. Among these, a methyl group, an ethyl group, or an n-butyl group is preferable, and a methyl group or an ethyl group is more preferable.
The branched alkyl group as Ra008 has preferably 3 to 10 carbon atoms and more preferably 3 to 5 carbon atoms. Specific examples thereof include an isopropyl group, an isobutyl group, a tert-butyl group, an isopentyl group, a neopentyl group a 1,1-diethylpropyl group, and a 2,2-dimethylbutyl group. Among these, an isopropyl group is preferable.
Specific examples of the linear or branched alkenyl group as Ra008 include a linear alkenyl group such as a vinyl group, a propenyl group (an allyl group), or a 2-butenyl group; and a branched alkenyl group such as a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, or 2-methylpropenyl group.
In a case where Ra008 represents a cyclic hydrocarbon group, the hydrocarbon group may be an aliphatic hydrocarbon group or an aromatic hydrocarbon group and may be a polycyclic group or a monocyclic group.
As the aliphatic hydrocarbon group which is a monocyclic group, a group in which one hydrogen atom has been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane.
As the aliphatic hydrocarbon group which is a polycyclic group, a group in which one hydrogen atom has been removed from a polycycloalkane is preferable. As the polycycloalkane, a group having 7 to 12 carbon atoms is preferable, and specific examples thereof include adamantane, norbornane, isobornane, tricyclodecane, and tetracyclododecane.
Examples of the aromatic hydrocarbon group as Ra008 include the same groups as those provided as examples for the aromatic hydrocarbon group as Ra005. Among these, Ra008 represents preferably a group in which one or more hydrogen atoms have been removed from an aromatic hydrocarbon ring having 6 to 15 carbon atoms, more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, anthracene, or phenanthrene, still more preferably a group in which one or more hydrogen atoms have been removed from benzene, naphthalene, or anthracene, particularly preferably a group in which one or more hydrogen atoms have been removed from naphthalene or anthracene, and most preferably a group in which one or more hydrogen atoms have been removed from naphthalene.
Examples of the substituent that Ra008 may have include the same groups as those provided as examples for the substituent that Ra005 may have.
In a case where Ra008 in Formula (a0-r1-04) represents a naphthyl group, the position bonded to the tertiary carbon atom in Formula (a1-r2-4) may be the 1-position or the 2-position of the naphthyl group.
In a case where Ra008 in Formula (a0-r1-04) represents an anthryl group, the position bonded to the tertiary carbon atom in Formula (a0-r1-04) may be the 1-position, the 2-position, or the 9-position of the anthryl group.
Ra008 in Formula (a0-r1-04) represents, among the examples, preferably a linear or branched alkyl group or a linear or branched alkenyl group, more preferably a linear alkyl group or a linear alkenyl group, and still more preferably a linear alkenyl group.
Specific examples of the group represented by Formula (a0-r1-01) are shown below.
Specific examples of the group represented by Formula (a0-r1-02) are shown below.
Specific examples of the group represented by Formula (a0-r1-03) are shown below.
Specific examples of the group represented by Formula (a0-r1-04) are shown below.
Examples of the acid dissociable group that protects a carboxy group among the above-described polar groups include an acid dissociable group represented by General Formula (a0-r-2).
[In Formula (a0-r-2), Ra04 represents a hydrocarbon group. Ra05a and Ra05b each independently represent a hydrogen atom, a halogen atom, or an alkyl group. Ra06 represents a hydrogen atom or a hydrocarbon group. Ra04 and Ra05a or Ra05b may be bonded to each other to form a ring. Ra05a or Ra05b and Ra06 may be bonded to each other to form a ring. * represents a bonding site with respect to an oxygen atom (—O—) in General Formula (a0-1).]
Examples of the hydrocarbon group as Ra04 or Ra06 in the formula include the same groups as those provided as examples for Ra01.
Examples of the alkyl group as Ra05a and Ra05b in the formula include the same groups as those provided as examples for the alkyl group as Ra01.
In the formula, the hydrocarbon group as Ra04 or Ra06 and the alkyl group as Ra05a and Ra05b may have a substituent. Examples of the substituent include Rax5 described above.
Ra04 and Ra05a or Ra05b may be bonded to each other to form a ring. The ring may be a polycyclic ring or a monocyclic ring, and may be an alicyclic ring or an aromatic ring.
The alicyclic ring and the aromatic ring may have a heteroatom.
Among the examples described above, as the ring formed by Ra04 and Ra05a or Ra05b being bonded to each other, monocycloalkene, a ring in which some carbon atoms of monocycloalkene have been substituted with heteroatoms (such as an oxygen atom and a sulfur atom), or monocycloalkadiene is preferable, cycloalkene having 3 to 6 carbon atoms is preferable, and cyclopentene or cyclohexene is preferable.
The ring formed by Ra04 and Ra05a or Ra05b being bonded to each other may be a condensed ring. Specific examples of the condensed ring include indane.
The ring formed by Ra04 and Ra05a or Ra05b being bonded to each other may have a substituent. Examples of the substituent include Rax5 described above.
Ra05a or Ra05b and Ra06 may be bonded to each other to form a ring, and examples of the ring include the rings formed by Ra04 and Ra05a or Ra05b being bonded to each other.
In Formula (a0-r-2), among the examples described above, Ra04 and Ra05ª or Ra05b are bonded to each other to form preferably a ring, more preferably a monocyclic ring, and still more preferably a monocyclic alicyclic ring. In such a case, it is preferable that Ra06 represents a hydrogen atom.
Further, the ring formed by Ra04 and Ra05a or Ra05b being bonded to each other may have a substituent, and as the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, an alkyl group having 1 to 3 carbon atoms is more preferable, and a methyl group or an ethyl group is still more preferable.
Specific examples of the group represented by General Formula (a0-r-2) are shown below.
In Formula (a0-1), Ra01 represents, among the examples, preferably an acid dissociable group represented by any of General Formula (a0-r1-02) to General Formula (a0-r1-04) or an acid dissociable group represented by General Formula (a0-r-2) and more preferably an acid dissociable group represented by General Formula (a0-r1-02), an acid dissociable group represented by General Formula (a0-r1-03), an acid dissociable group which is represented by General Formula (a0-r1-04) and in which Ra008 represents a linear or branched alkenyl group, or an acid dissociable group represented by General Formula (a0-r-2).
More specifically, Ra01 represents preferably an acid dissociable group represented by General Formula (a0-r1-02), an acid dissociable group represented by General Formula (a0-r1-04-1), or an acid dissociable group represented by General Formula (a0-r2-1) and more preferably an acid dissociable group represented by General Formula (a0-r1-04-1).
[In Formula (a0-r1-04-1), Rz01 and Rz02 each independently represent a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms. Rz01 and Rz02 each independently represent a hydrogen atom or a hydrocarbon group which may have a substituent. * represents a bonding site with respect to an oxygen atom (—O—) in General Formula (a0-1).
In Formula (a0-r2-1), Rz05 represents a substituent. na represents an integer of 0 to 3. nb represents an integer of 0 to 3. * represents a bonding site with respect to an oxygen atom (—O—) in General Formula (a0-1).]
In Formula (a0-r1-04-1), examples of Rz01 and Rz02 include the same groups as those provided as examples for Ra006 and Ra007 in Formula (a0-r1-04).
In Formula (a0-r1-04-1), it is preferable that Rz03 and Rz04 each independently represent a hydrogen atom or a chain monovalent saturated hydrocarbon group having 1 to 10 carbon atoms and more preferable that both represent a hydrogen atom.
Examples of the chain monovalent saturated hydrocarbon group include the same chain monovalent saturated hydrocarbon group as those provided as examples for Ra006 and Ra007 in Formula (a0-r1-04).
In Formula (a0-r2-1), Rz05 represents a substituent. Specific examples of the substituent include Rax5 described above. Among these, an alkyl group having 1 to 5 carbon atoms is preferable.
In Formula (a0-r2-1), na represents an integer of 0 to 3 and preferably 0 or 1.
In Formula (a0-r2-1), nb represents an integer of 0 to 3 and preferably 0 or 1, that is, a cyclopentene structure or a cyclohexene structure.
In General Formula (a0-1), q represents an integer in a range of 0 to 3. A benzene structure is formed in a case where q represents 0, a naphthalene structure is formed in a case where q represents 1, an anthracene structure is formed in a case where q represents 2, and a tetracene structure is formed in a case where q represents 3. Among the above, q is preferably 0 or 1 and more preferably 0.
In General Formula (a0-1), n represents an integer of 1 or greater, preferably an integer in a range of 1 to 5, more preferably an integer in a range of 1 to 3, and still more preferably an integer of 1 or 2.
In General Formula (a0-1), n≤q×2+4 is satisfied.
For example, in a case where q represents 1 and a naphthalene structure is formed, all hydrogen atoms in the naphthalene structure except for the hydrogen atoms substituted with a polymerizable group-containing group (W01) and a —Ya01-(C═O)—O—Ra01 group may be substituted with a hydroxy group. Further, in the naphthalene structure, the substitution positions of the polymerizable group-containing group (W01), the -Ya01-(C—O)—O—Ra01 group, and the hydroxy group are not particularly limited.
Among the above, the constitutional unit (a01) is preferably a constitutional unit represented by General Formula (a0-1-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ya001 represents a single bond or a divalent linking group. Ya01 represents a single bond or a divalent linking group. Rax01 represents an acid dissociable group represented by General Formula (a0-r-1) or (a0-r-2). q represents an integer of 0 to 3. n represents an integer of 1 or greater. Here, n≤q×2+4 is satisfied.]
In General Formula (a0-1-1), the alkyl group having 1 to 5 carbon atoms as R is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. The halogenated alkyl group having 1 to 5 carbon atoms is a group in which some or all hydrogen atoms in the alkyl group having 1 to 5 carbon atoms have been substituted with halogen atoms. As the halogen atom, a fluorine atom is particularly preferable.
As R, a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms is preferable, and a hydrogen atom or a methyl group is most preferable from the viewpoint of the industrial availability.
In Formula (a0-1-1), Ya001 represents a single bond or a divalent linking group.
The divalent linking group as Ya001 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom, each of which is the same as the divalent hydrocarbon group as W01 and the divalent linking group having a heteroatom.
Among the examples, it is preferable that Ya001 represents an ester bond [—C(═O)—O— or —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, an aromatic hydrocarbon group, or a combination thereof, or a single bond. Among these, Ya001 represents more preferably an ester bond [—C(═O)—O— or —O—C(═O)—], a combination of an ester bond [—C(═O)—O— or —O—C(═O)—] and a linear alkylene group, or a single bond, still more preferably an ester bond [—C(═O)—O— or —O—C(═O)—] or a single bond, and particularly preferably a single bond.
In Formula (a0-1-1), Ya01 has the same definition as that for Ya01 in Formula (a0-1).
In Formula (a0-1-1), Rax01 represents an acid dissociable group represented by General Formula (a0-r-1) or (a0-r-2).
In Formula (a0-1-1), Rax01 represents, among the examples, preferably an acid dissociable group represented by any of General Formulae (a0-r1-02) to (a0-r1-04) or an acid dissociable group represented by General Formula (a0-r-2), more preferably an acid dissociable group represented by General Formula (a0-r1-02), an acid dissociable group represented by General Formula (a0-r1-03), an acid dissociable group which is represented by General Formula (a0-r1-04) and in which Ra008 represents a linear or branched alkenyl group, or an acid dissociable group represented by General Formula (a0-r-2), still more preferably an acid dissociable group represented by General Formula (a0-r1-02), an acid dissociable group represented by General Formula (a0-r1-04-1), or an acid dissociable group represented by General Formula (a0-r2-1), and particularly preferably an acid dissociable group represented by General Formula (a0-r1-04-1).
In General Formula (a0-1-1), q and n are the same as q and n in General Formula (a0-1).
Specific examples of the constitutional unit (a01) are shown below. In each of the formulae shown below, Ra represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
The constitutional unit (a01) in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the constitutional unit (a01) in the component (A1) is preferably in a range of 20% to 80% by mole, more preferably in a range of 20% to 70% by mole, and still more preferably in a range of 20% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a01) is greater than or equal to the lower limits of the above-described preferable ranges, the sensitivity and the resolution can be further improved.
In a case where the proportion of the constitutional unit (a01) is less than or equal to the upper limits of the above-described preferable ranges, the constitutional unit (a01) and the constitutional unit (a02) described below can be balanced, and the resolution and the roughness characteristics can be further improved.
<<Constitutional Unit (a02)>>
The constitutional unit (a02) is a constitutional unit containing a lactone-containing cyclic group, a —SO2— containing cyclic group, or a carbonate-containing cyclic group.
The term “lactone-containing cyclic group” indicates a cyclic group that has a ring (lactone ring) containing —O—C(═O)— in the ring skeleton. In a case where the lactone ring is counted as the first ring and the group contains only the lactone ring, the group is referred to as a monocyclic group. Further, in a case where the group has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The lactone-containing cyclic group may be a monocyclic group or a polycyclic group.
The lactone-containing cyclic group for the constitutional unit (a02) is not particularly limited, and any lactone-containing cyclic group may be used. Specific examples thereof include groups each represented by General Formulae (a2-r-1) to (a2-r-7).
[In the formulae, Ra′21's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O) R″, a hydroxyalkyl group, or a cyano group, R″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group, A″ represents an alkylene group having 1 to 5 carbon atoms which may have an oxygen atom (—O—) or a sulfur atom (—S—), an oxygen atom, or a sulfur atom, n′ represents an integer of 0 to 2, and m′ is 0 or 1. * represents a bonding site (the same applies hereinafter).]
In General Formulae (a2-r-1) to (a2-r-7), it is preferable that the alkyl group as Ra′21 is an alkyl group having 1 to 6 carbon atom. Further, it is preferable that the alkyl group is linear or branched. Specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, a neopentyl group, and a hexyl group. Among these, a methyl group or ethyl group is preferable, and a methyl group is particularly preferable.
It is preferable that the alkoxy group as Ra′21 is an alkoxy group having 1 to 6 carbon atoms. Further, it is preferable that the alkoxy group is linear or branched. Specific examples of the alkoxy groups include a group formed by linking the above-described alkyl group described as the alkyl group represented by Ra′21 to an oxygen atom (—O—).
As the halogen atom as Ra′21, a fluorine atom is preferable.
Examples of the halogenated alkyl group as Ra′21 include groups in which some or all hydrogen atoms in the alkyl group as Ra′21 have been substituted with the halogen atoms. As the halogenated alkyl group, a fluorinated alkyl group is preferable, and a perfluoroalkyl group is particularly preferable.
In —COOR″ and —OC(═O) R″ as Ra′21, any R″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group.
The alkyl group as R″ may be linear, branched, or cyclic, and it preferably has 1 to 15 carbon atoms.
In a case where R″ represents a linear or branched alkyl group, an alkyl group having 1 to 10 carbon atoms is preferable, an alkyl group having 1 to 5 carbon atoms is more preferable, and a methyl group or an ethyl group is particularly preferable.
In a case where R″ represents a cyclic alkyl group, the number of carbon atoms thereof is preferably in a range of 3 to 15, more preferably in a range of 4 to 12, and most preferably in a range of 5 to 10. Specific examples thereof include groups in which one or more hydrogen atoms have been removed from a monocycloalkane, which may or may not be substituted with a fluorine atom or a fluorinated alkyl group; and groups in which one or more hydrogen atoms have been removed from a polycycloalkane such as bicycloalkane, tricycloalkane, or tetracycloalkane. More specific examples thereof include groups in which one or more hydrogen atoms have been removed from a monocycloalkane such as cyclopentane or cyclohexane; and groups in which one or more hydrogen atoms have been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane.
Examples of the lactone-containing cyclic group as R″ include the same groups as those provided as examples for the groups each represented by General Formulae (a2-r-1) to (a2-r-7).
As the hydroxyalkyl group as Ra′21, a hydroxyalkyl group having 1 to 6 carbon atoms is preferable, and specific examples thereof include a group in which at least one hydrogen atom in the alkyl group as Ra′21 has been substituted with a hydroxyl group.
Among the examples, it is preferable that Ra′21's each independently represent a hydrogen atom or a cyano group.
In General Formulae (a2-r-2), (a2-r-3) and (a2-r-5), as the alkylene group having 1 to 5 carbon atoms as A″, a linear or branched alkylene group is preferable, and examples thereof include a methylene group, an ethylene group, an n-propylene group, and an isopropylene group. In a case where the alkylene group has an oxygen atom or a sulfur atom, specific examples thereof include groups in which —O— or —S— is interposed in the terminal of the alkylene group or between the carbon atoms of the alkylene group. Further, examples thereof include —O—CH2—, —CH2—O—CH2—, —S—CH2—, and —CH2—S—CH2—. A″ represents preferably an alkylene group having 1 to 5 carbon atoms or —O—, more preferably an alkylene group having 1 to 5 carbon atoms, and most preferably a methylene group.
Specific examples of the groups each represented by General Formulae (a2-r-1) to (a2-r-7) are shown below.
The term “—SO2— containing cyclic group” denotes a cyclic group having a ring containing —SO2— in the ring skeleton thereof. Specifically, the —SO2— containing cyclic group is a cyclic group in which the sulfur atom(S) in —SO2— forms a part of the ring skeleton of the cyclic group. In a case where the ring containing —SO2— in the ring skeleton thereof is counted as the first ring and the group has only the ring, the group is referred to as a monocyclic group. In a case where the group further has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The —SO2— containing cyclic group may be a monocyclic group or a polycyclic group.
The —SO2— containing cyclic group is particularly preferably a cyclic group containing —O—SO2— in the ring skeleton thereof, that is, a cyclic group containing a sultone ring in which —O—S— in —O—SO2— forms a part of the ring skeleton thereof.
More specific examples of the —SO2— containing cyclic group include groups each represented by General Formulae (a5-r-1) to (a5-r-4).
[In the formulae, Ra′51's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O) R″, a hydroxyalkyl group, or a cyano group; R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or a —SO2— containing cyclic group; A″ represents an oxygen atom, a sulfur atom, or an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom; and n′ represents an integer in a range of 0 to 2. * represents a bonding site.]
In General Formulae (a5-r-1) and (a5-r-2), A″ has the same definition as that for A″ in Formulae (a2-r-2), (a2-r-3) and (a2-r-5).
Examples of the alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR″, —OC(═O) R″, and the hydroxyalkyl group as Ra′51 include the same groups as those provided as examples for Ra′21 in General Formulae (a2-r-1) to (a2-r-7).
Specific examples of the groups each represented by General Formulae (a5-r-1) to (a5-r-4) are shown below. In the formulae shown below, “Ac” represents an acetyl group.
The term “carbonate-containing cyclic group” indicates a cyclic group that has a ring (a carbonate ring) containing —O—C(═O)—O— in the ring skeleton thereof. In a case where the carbonate ring is counted as the first ring and the group has only the carbonate ring, the group is referred to as a monocyclic group. Further, in a case where the group has other ring structures, the group is referred to as a polycyclic group regardless of the structures. The carbonate-containing cyclic group may be a monocyclic group or a polycyclic group.
The carbonate-containing cyclic group is not particularly limited, and an optional group can be used. Specific examples thereof include groups each represented by General Formulae (ax3-r-1) to (ax3-r-3) shown below.
[In the formulae, Ra′x31's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O) R″, a hydroxyalkyl group, or a cyano group; R″ represents a hydrogen atom, an alkyl group, a lactone-containing cyclic group, a carbonate-containing cyclic group, or an —SO2— containing cyclic group; A″ represents an oxygen atom, a sulfur atom, or an alkylene group having 1 to 5 carbon atoms, which may contain an oxygen atom or a sulfur atom; and p′ represents an integer in a range of 0 to 3, and q′ is 0 or 1. * represents a bonding site.]
In General Formulae (ax3-r-2) and (ax3-r-3), A″ has the same definition as that for A″ in Formulae (a2-r-2), (a2-r-3) and (a2-r-5).
Examples of the alkyl group, the alkoxy group, the halogen atom, the halogenated alkyl group, —COOR″, —OC(═O) R″, and the hydroxyalkyl group as Ra′31 include the same groups as those provided as examples for Ra′21 in General Formulae (a2-r-1) to (a2-r-7).
Specific examples of the groups each represented by General Formulae (ax3-r-1) to (ax3-r-3) are shown below.
Among the examples, as the constitutional unit (a02), a constitutional unit derived from acrylic acid ester in which the hydrogen atom bonded to the carbon atom at the α-position may be substituted with a substituent is preferable.
It is preferable that such a constitutional unit (a02) is a constitutional unit represented by General Formula (a02-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ya21 represents a single bond or a divalent linking group. La21 represents —O—, —COO—, —CON(R′)—, —OCO—, —CONHCO—, or —CONHCS—, and R′ represents a hydrogen atom or a methyl group. In a case where La21 represents —O—, Ya21 does not represent —CO—. Ra21 represents a lactone-containing cyclic group.]
In Formula (a2-1), R has the same definition as described above. R represents preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms and particularly preferably a hydrogen atom or a methyl group from the viewpoint of the industrial availability.
In Formula (a2-1), the divalent linking group as Ya21 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
It is preferable that Ya21 represents a single bond, an ester bond [—C(═O)—O—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof.
In Formula (a2-1), it is preferable that Ya21 represents a single bond and La21 represents —COO— or —OCO—.
In Formula (a2-1), Ra21 represents a lactone-containing cyclic group.
Suitable examples of the lactone-containing cyclic group represented by Ra21 include groups each represented by General Formulae (a2-r-1) to (a2-r-7). Among these, a group represented by General Formula (a2-r-1) is preferable.
Examples of the constitutional unit (a02) also include a constitutional unit which forms a lactone-containing cyclic group by sharing carbon atoms constituting the main chain, such as a constitutional unit represented by General Formula (a02-2).
[In the Formula (a02-2), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Ra′21's each independently represent a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, —COOR″, —OC(═O) R″, a hydroxyalkyl group, or a cyano group; and R″ represents a hydrogen atom, an alkyl group, or a lactone-containing cyclic group. n′ represents an integer of 0 to 2.]
In Formula (a02-2), R has the same definition as that for R in General Formula (a02-1).
In Formula (a02-2), examples of Ra′21 include the same groups as those provided as examples for Ra′21 in General Formulae (a2-r-1) to (a2-r-7).
n′ represents an integer of 0 to 2 and preferably 1.
Specific examples of the constitutional unit represented by Formula (a02) are shown below.
In the following formulae, R″ represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
The constitutional unit (a02) that the component (A1) has may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the constitutional unit (a02) is preferably in a range of 5% to 80% by mole, more preferably in a range of 10% to 70% by mole, and still more preferably in a range of 20% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a02) is greater than or equal to the lower limits of the above-described preferable ranges, the resolution and the roughness characteristics can be further improved.
In a case where the proportion of the constitutional unit (a02) is less than or equal to the upper limits of the above-described preferable ranges, the constitutional unit (a02) and the constitutional unit (a01) described above can be balanced, and the resolution and the roughness characteristic can be further improved.
The component (A1) may have other constitutional units as necessary in addition to the constitutional unit (a01) and the constitutional unit (a02) described above.
Examples of other constitutional units include a constitutional unit (a1) containing an acid decomposable group whose polarity is increased by an action of an acid, a constitutional unit (a10) represented by General Formula (a10-1), and a constitutional unit (a8) derived from a compound represented by General Formula (a8-1).
In regard to constitutional unit (a1):
The constitutional unit (a1) is a constitutional unit that contains an acid decomposable group whose polarity is increased by the action of an acid. Here, constitutional units corresponding to the constitutional unit (a01) and the constitutional unit (a02) are excluded.
Examples of the acid dissociable group include the same groups as those which have been suggested as the acid dissociable groups of the base resin for a chemically amplified resist composition.
Specific examples of the acid dissociable groups which have been suggested as the acid dissociable groups of the base resin for a chemically amplified resist composition include “tertiary alkyl ester type acid dissociable group” represented by General Formula (a0-r-1), “secondary alkyl ester type acid dissociable group” represented by General Formula (a0-r-2), “acetal type acid dissociable group” described below, and “tertiary alkyloxycarbonyl acid dissociable group” described below.
Examples of the acid dissociable group that protects a carboxy group or a hydroxyl group in the polar groups include an acid dissociable group represented by General Formula (a1-r-1) (hereinafter, also referred to as “acetal type acid dissociable group”).
[In the formula, Ra′1 and Ra′2 represent a hydrogen atom or an alkyl group. Ra′3 represents a hydrocarbon group, and Ra′3 may be bonded to any of Ra′1 and Ra′2 to form a ring.]
In Formula (a1-r-1), it is preferable that at least one of Ra′1 or Ra′2 represents a hydrogen atom and more preferable that both Ra′1 and Ra′2 represent a hydrogen atom.
In a case where Ra′1 or Ra′2 represents an alkyl group, examples of the alkyl group include the same alkyl groups described as the substituent which may be bonded to the carbon atom at the α-position in the description of the α-substituted acrylic acid ester. Among these, an alkyl group having 1 to 5 carbon atoms is preferable. Specific preferred examples thereof include linear or branched alkyl groups. More specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Among these, a methyl group or an ethyl group is more preferable, and a methyl group is particularly preferable.
In Formula (a1-r-1), examples of the hydrocarbon group as Ra′3 include a linear or branched alkyl group and a cyclic hydrocarbon group.
Examples of the linear or branched alkyl group and the cyclic hydrocarbon group (an aliphatic hydrocarbon group which is a monocyclic group, an aliphatic hydrocarbon group which is a polycyclic group, or an aromatic hydrocarbon group) as Ra′3 include the same groups as those provided as examples for Ra03.
In a case where Ra′3 is bonded to any of Ra′1 and Ra′2 to form a ring, the cyclic group is preferably a 4- to 7-membered ring and more preferably a 4- to 6-membered ring. Specific examples of the cyclic group include a tetrahydropyranyl group and a tetrahydrofuranyl group.
Examples of the acid dissociable group that protects a hydroxyl group among the polar groups include an acid dissociable group (hereinafter, also referred to as “tertiary alkyloxycarbonyl acid dissociable group” for convenience) represented by General Formula (a1-r-3).
[In the formula, Ra′1 to Ra′9 each represent an alkyl group.]
In Formula (a1-r-3), Ra′7 to Ra′9 each represent preferably an alkyl group having 1 to 5 carbon atoms and more preferably an alkyl group having 1 to 3 carbon atoms.
Further, the total number of carbon atoms in each alkyl group is preferably in a range of 3 to 7, more preferably in a range of 3 to 5, and most preferably 3 or 4.
Examples of the constitutional unit (a1) include a constitutional unit represented by General Formula (a1-1-1).
[In the formula, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va1 represents a divalent hydrocarbon group which may have an ether bond. na1 represents an integer of 0 to 2. Ra1″ represents an acid dissociable group. * represents a bonding site.]
It is preferable that Ra1″ represents “tertiary alkyl ester type acid dissociable group” represented by General Formula (a0-r-1).
It is preferable that na1 represents 0.
Specific examples of the constitutional unit (a1) are shown below. In each of the formulae shown below, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
In a case where the component (A1) has the constitutional unit (a1), the proportion of the constitutional unit (a1) in the component (A1) is preferably in a range of 5% to 50% by mole, more preferably in a range of 5% to 40% by mole, and still more preferably in a range of 10% to 30% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a1) is set to be in the above-described preferable ranges, lithography characteristics such as the sensitivity, the resolution, and the roughness improvement are improved.
In regard to constitutional unit (a10):
The constitutional unit (a10) is a constitutional unit represented by General Formula (a10-1) (here, constitutional units corresponding to the constitutional unit (a01), the constitutional unit (a02), and the constitutional unit (a1) are excluded).
[In the formulae, R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Yax1 represents a single bond or a divalent linking group. Wax1 represents an aromatic hydrocarbon group which may have a substituent. nax1 represents an integer of 1 or greater.]
In the Formula (a10-1), R represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms.
R represents preferably a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a fluorinated alkyl group having 1 to 5 carbon atoms, and from the viewpoint of industrial availability, more preferably a hydrogen atom, a methyl group, or trifluoromethyl group, still more preferably a hydrogen atom or a methyl group, and particularly preferably a hydrogen atom.
In Formula (a10-1), Yax1 represents a single bond or a divalent linking group.
In the chemical formula, the divalent linking group as Yax1 is not particularly limited, and suitable examples thereof include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
Yax1 represents preferably a single bond, an ester bond [—C(═O)—O— or —O—C(═O)—], an ether bond (—O—), a linear or branched alkylene group, or a combination thereof, more preferably a single bond or an ester bond [—C(═O)—O— or —O—C(═O)—], and still more preferably a single bond.
In Formula (a10-1), Wax1 represents an aromatic hydrocarbon group which may have a substituent.
Examples of the aromatic hydrocarbon group as Wax1 include a group in which (nax1+1) hydrogen atoms have been removed from an aromatic ring which may have a substituent. The aromatic ring is not particularly limited as long as the aromatic ring is a cyclic conjugated system having (4n+2) π electrons. The aromatic ring has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, still more preferably 6 to 15 carbon atoms, and particularly preferably 6 to 12 carbon atoms. Specific examples of the aromatic ring include aromatic hydrocarbon rings such as benzene, naphthalene, anthracene, and phenanthrene; and an aromatic heterocyclic ring in which some carbon atoms constituting the above-described aromatic hydrocarbon ring have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom. Specific examples of the aromatic heterocyclic ring include a pyridine ring and a thiophene ring.
Further, examples of the aromatic hydrocarbon group as Wax1 also include a group in which (nax1+1) hydrogen atoms have been removed from an aromatic compound having an aromatic ring (for example, biphenyl or fluorene) which may have two or more substituents.
Among the examples, Wax1 represents preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene, naphthalene, anthracene, or biphenyl, more preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene or naphthalene, and still more preferably a group in which (nax1+1) hydrogen atoms have been removed from benzene.
The aromatic hydrocarbon group as Wax1 may or may not have a substituent. Examples of substituents include an alkyl group, an alkoxy group, a halogen atom, and a halogenated alkyl group. Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituent include the same groups as those provided as examples for the substituent of the cyclic alicyclic hydrocarbon group as Yax1. The substituent is preferably a linear or branched alkyl group having 1 to 5 carbon atoms, more preferably a linear or branched alkyl group having 1 to 3 carbon atoms, still more preferably an ethyl group or a methyl group, and particularly preferably a methyl group. It is preferable that the aromatic hydrocarbon group as Wax1 has no substituent.
In Formula (a10-1), nax1 represents an integer of 1 or greater, preferably an integer of 1 to 10, more preferably an integer of 1 to 5, still more preferably 1, 2, or 3, and particularly preferably 1 or 2.
Specific examples of the constitutional unit (a10) represented by Formula (a10-1) are described below.
In each of the formulae shown below, Rα represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
Among the examples, the constitutional unit (a10) is preferably a constitutional unit represented by Formula (a10-1-1) or (a10-1-23) and more preferably a constitutional unit represented by Formula (a10-1-1).
The constitutional unit (a10) included in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the component (A1) has the constitutional unit (a10), the proportion of the constitutional unit (a10) in the component (A1) is preferably in a range of 5% to 50% by mole, more preferably in a range of 5% to 40% by mole, and still more preferably in a range of 10% to 30% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
In a case where the proportion of the constitutional unit (a10) is set to be greater than or equal to the above-described lower limits, the sensitivity is likely to be enhanced. Meanwhile, in a case where the proportion thereof is set to be less than or equal to the above-described upper limits, the constitutional unit (a10) and other constitutional units are likely to be balanced.
In regard to constitutional unit (a8):
The constitutional unit (a8) is a constitutional unit derived from a compound represented by General Formula (a8-1).
Here, constitutional units corresponding to the constitutional unit (a01), the constitutional unit (a02), and the constitutional unit (a1) are excluded.
[In the formula, W2 represents a polymerizable group-containing group. Yax2 represents a single bond or an (nax2+1)-valent linking group. Yax2 and W2 may form a condensed ring. R1 represents a fluorinated alkyl group having 1 to 12 carbon atoms. R2 represents an organic group having 1 to 12 carbon atoms which may have a fluorine atom or a hydrogen atom. R2 and Yax2 may be bonded to each other to form a ring structure. nax2 represents an integer of 1 to 3.]
The term “polymerizable group” in the polymerizable group-containing group as W2 denotes a group that enables a compound containing a polymerizable group to be polymerized by radical polymerization or the like, which is, for example, a group having multiple bonds between carbon atoms, such as an ethylenic double bond.
The polymerizable group-containing group may be a group formed of only a polymerizable group or a group formed of a polymerizable group and a group other than the polymerizable group. Examples of the group other than the polymerizable group include a divalent hydrocarbon group which may have a substituent and a divalent linking group having a heteroatom.
Suitable examples of the polymerizable group-containing group include a group represented by Chemical Formula: C(RX11) (RX12)═C(RX13)-Yax0.
In the chemical formula, RX11, RX12, and RX13 each represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Yax0 represents a single bond or a divalent linking group.
Examples of the condensed ring formed by Yax2 and W2 include a condensed ring formed by a polymerizable group of the W2 moiety with Yax2 and a condensed ring formed by a group other than the polymerizable group of the W2 moiety with Yax2. The condensed ring formed by Yax2 and W2 may have a substituent.
Specific examples of the constitutional unit (a8) are shown below.
In the following formulae, Ra represents a hydrogen atom, a methyl group, or a trifluoromethyl group.
Among the examples, the constitutional unit (a8) is preferably at least one selected from the group consisting of constitutional units each represented by Chemical Formulae (a8-1-01) to (a8-1-04), (a8-1-06), (a8-1-08), (a8-1-09), and (a8-1-10) and more preferably at least one selected from the group consisting of constitutional units each represented by Chemical Formulae (a8-1-01) to (a8-1-04) and (a8-1-09).
The constitutional unit (a8) contained in the component (A1) may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the constitutional unit (a8) in the component (A1) is preferably 50% by mole or less and more preferably in a range of 0% to 30% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the component (A1).
The component (A1) contained in the resist composition may be used alone or a combination of two or more kinds thereof may be used.
As such a component (A1), a polymer compound having a repeating structure of the constitutional unit (a01) and a repeating structure of the constitutional unit (a02) is preferable, and a polymer compound having a repeating structure of the constitutional unit (a01), a repeating structure of the constitutional unit (a02), and a repeating structure of the constitutional unit (a10) is more preferable.
More specifically, a polymer compound having a repeating structure of the constitutional unit (a01) and a repeating structure of the constitutional unit (a02), a polymer compound having a repeating structure of the constitutional unit (a01), a repeating structure of the constitutional unit (a02), and a repeating structure of the constitutional unit (a10), or a polymer compound having a repeating structure of the constitutional unit (a01), a repeating structure of the constitutional unit (a02), a repeating structure of the constitutional unit (a10), and a repeating structure of the constitutional unit (a1) is preferable as the component (A1).
The proportion of the constitutional unit (a01) in the polymer compound having a repeating structure of the constitutional unit (a01) and the constitutional unit (a02) is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a02) in the polymer compound described above is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
The proportion of the constitutional unit (a01) in the polymer compound having a repeating structure of the constitutional unit (a01), the constitutional unit (a02), and the constitutional unit (a10) is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 40% to 60% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a02) in the polymer compound is preferably in a range of 5% to 50% by mole, more preferably in a range of 10% to 50% by mole, still more preferably in a range of 30% to 40% by mole, and particularly preferably in a range of 25% to 35% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a10) in the polymer compound is preferably in a range of 5% to 50% by mole, more preferably in a range of 5% to 40% by mole, still more preferably in a range of 10% to 30% by mole, and particularly preferably in a range of 15% to 25% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
The proportion of the constitutional unit (a01) in the polymer compound having a repeating structure of the constitutional unit (a01), the constitutional unit (a02), the constitutional unit (a10), and the constitutional unit (a1) is preferably in a range of 10% to 90% by mole, more preferably in a range of 20% to 80% by mole, still more preferably in a range of 30% to 70% by mole, and particularly preferably in a range of 20% to 40% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a02) in the polymer compound is preferably in a range of 5% to 50% by mole, more preferably in a range of 10% to 50% by mole, still more preferably in a range of 30% to 40% by mole, and particularly preferably in a range of 25% to 35% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a10) in the polymer compound is preferably in a range of 5% to 50% by mole, more preferably in a range of 5% to 40% by mole, still more preferably in a range of 10% to 30% by mole, and particularly preferably in a range of 15% to 25% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
In addition, the proportion of the constitutional unit (a1) in the polymer compound is preferably in a range of 5% to 50% by mole, more preferably in a range of 5% to 40% by mole, still more preferably in a range of 10% to 30% by mole, and particularly preferably in a range of 15% to 25% by mole with respect to the total amount (100% by mole) of all constitutional units constituting the polymer compound.
Such a component (A1) can be produced by dissolving a monomer, from which each constitutional unit is derived, in a polymerization solvent and adding a radical polymerization initiator such as azobisisobutylonitrile (AIBN) or dimethyl azobisisobutyrate (for example, V-601) to the solution so that the polymerization is carried out.
Alternatively, the component (A1) can be produced by dissolving, in a polymerization solvent, a monomer from which the constitutional unit (a01) is derived, a monomer from which the constitutional unit (a02) is derived, and a monomer (for example, a compound in which a hydroxyl group of a monomer from which the constitutional unit (a10) is derived is protected) from which other constitutional units are derived as necessary, adding a radical polymerization initiator as described above thereto to carry out polymerization, and performing a deprotection reaction.
Further, a —C(CF3)2—OH group may be introduced to the terminal during the polymerization using a combination of chain transfer agents such as HS—CH2—CH2—CH2—C(CF3)2—OH. As described above, a copolymer into which a hydroxyalkyl group, formed by substitution of some hydrogen atoms in the alkyl group with fluorine atoms, has been introduced is effective for reducing development defects and reducing line edge roughness (LER: uneven irregularities of a line side wall).
The weight-average molecular weight (Mw) (in terms of polystyrene according to gel permeation chromatography (GPC)) of the component (A1) is not particularly limited, but is preferably in a range of 1000 to 50000, more preferably in a range of 2000 to 30000, and still more preferably in a range of 3000 to 20000.
In a case where the Mw of the component (A1) is less than or equal to the upper limits of the above-described preferable ranges, satisfactory solubility in a resist solvent enough to be used as a resist is exhibited. Meanwhile, in a case where the Mw of the component (A1) is greater than or equal to the lower limits of the above-described preferable ranges, the dry etching resistance and the cross-sectional shape of the resist pattern are satisfactory.
Further, the dispersity (Mw/Mn) of the component (A1) is not particularly limited, but is preferably in a range of 1.0 to 4.0, more preferably in a range of 1.0 to 3.0, and particularly preferably in a range of 1.0 to 2.0. Further, Mn represents the number average molecular weight.
In the resist composition of the present embodiment, a base material component (hereinafter, also referred to as “component (A2)”) which does not correspond to the component (A1) and whose solubility in a developing solution is changed by the action of an acid may be used in combination as the component (A).
The component (A2) is not particularly limited and may be optionally selected from a plurality of components of the related art which have been known as base material components for a chemically amplified resist composition and used.
As the component (A2), a polymer compound or a low-molecular-weight compound may be used alone or a combination of two or more kinds thereof may be used.
The proportion of the component (A1) in the component (A) is preferably 25% by mass or greater, more preferably 50% by mass or greater, and still more preferably 75% by mass or greater, and may be 100% by mass with respect to the total mass of the component (A). In a case where the proportion thereof is 25% by mass or greater, a resist pattern in which various lithography characteristics such as the sensitivity, the resolution, and the roughness are excellent is likely to be formed.
In the resist composition of the present embodiment, the amount of the component (A) may be adjusted according to the thickness of the resist film intended to be formed.
The resist composition according to the present embodiment may further contain other components in addition to the component (A) described above. Examples of the other components include a component (B), a component (D), a component (E), a component (F), and a component(S), which are described below.
It is preferable that the resist composition according to the present embodiment further contains an acid generator component (B) that generates an acid upon light exposure.
The component (B) is not particularly limited, and those which have been suggested so far as an acid generator for a chemically amplified resist composition in the related art can be used.
Examples of the acid generator include various acid generators, for example, onium salt-based acid generators such as iodonium salts and sulfonium salts; oxime sulfonate-based acid generators; diazomethane-based acid generators such as bisalkyl or bisaryl sulfonyl diazomethanes and poly(bis-sulfonyl) diazomethanes; nitrobenzyl sulfonate-based acid generators, iminosulfonate-based acid generators, and disulfone-based acid generators.
Examples of the onium salt-based acid generators include a compound represented by General Formula (b-1) (hereinafter, also referred to as “component (b-1)”), a compound represented by General Formula (b-2) (hereinafter, also referred to as “component (b-2)”), and a compound represented by General Formula (b-3) (hereinafter, also referred to as “component (b-3)”).
[In the formulae, R101 and R104 to R108 each independently represent a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent. R104 and R105 may be bonded to each other to form a ring structure. R102 represents a fluorinated alkyl group having 1 to 5 carbon atoms or a fluorine atom. Y101 represents a divalent linking group having an oxygen atom or a single bond. V101 to V103 each independently represent a single bond, an alkylene group, or a fluorinated alkylene group. L101 and L102 each independently represent a single bond or an oxygen atom. L103 to L105 each independently represent a single bond, —CO—, or —SO2—. m represents an integer of 1 or greater, and M′m+ represents an m-valent onium cation.]
Anions in component (b-1)
In Formula (b-1), R101 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent.
Cyclic Group which May have Substituent:
The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. Further, the aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group is saturated.
The aromatic hydrocarbon group as R101 is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group has preferably 3 to 30 carbon atoms, more preferably 5 to 30 carbon atoms, still more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring of the aromatic hydrocarbon group as R101 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, and an aromatic heterocyclic ring in which some carbon atoms constituting any of these aromatic rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group as R101 include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group) and a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group). The alkylene group (alkyl chain in the arylalkyl group) has preferably 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
Examples of the cyclic aliphatic hydrocarbon group as R101 include an aliphatic hydrocarbon group having a ring in the structure thereof.
Examples of the aliphatic hydrocarbon group having a ring in the structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom has been removed from an aliphatic hydrocarbon ring), a group in which the alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the alicyclic hydrocarbon group is interposed in the middle of a linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is preferable, and the number of carbon atoms of the polycycloalkane is preferably in a range of 7 to 30. Among these, a polycycloalkane having a crosslinked ring polycyclic skeleton such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; and a polycycloalkane having a condensed ring polycyclic skeleton such as a cyclic group having a steroid skeleton are preferable as the polycycloalkane.
Among these examples, as the cyclic aliphatic hydrocarbon group as R101, a group in which one or more hydrogen atoms have been removed from a monocycloalkane or a polycycloalkane is preferable, a group in which one hydrogen atom has been removed from a polycycloalkane is more preferable, an adamantyl group or a norbornyl group is still more preferable, and an adamantyl group is particularly preferable.
The linear aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and most preferably 1 to 3 carbon atoms. As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
The branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 2 to 10 carbon atoms, more preferably 3 to 6 carbon atoms, still more preferably 3 or 4 carbon atoms, and most preferably 3 carbon atoms.
As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
Further, the cyclic hydrocarbon group as R101 may have a heteroatom such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2— containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16). In the formulae, * represents a bonding site with respect to Y101 in Formula (b-1).
Examples of the substituent for the cyclic group as R101 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
As the alkyl group as the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferable.
As the alkoxy group as the substituent, an alkoxy group having 1 to 5 carbon atoms is preferable, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group is more preferable, and a methoxy group or an ethoxy group is most preferable.
Examples of the halogen atom as the substituent include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Among these, a fluorine atom is preferable.
Example of the above-described halogenated alkyl group as the substituent include a group in which some or all hydrogen atoms in an alkyl group having 1 to 5 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group have been substituted with the above-described halogen atoms.
The carbonyl group as the substituent is a group that substitutes a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
The cyclic hydrocarbon group as R101 may be a condensed cyclic group having a condensed ring in which an aliphatic hydrocarbon ring and an aromatic ring are condensed. Examples of the condensed rings include those obtained by condensing one or more aromatic rings with a polycycloalkane having a crosslinked ring polycyclic skeleton. Specific examples of the crosslinked ring-based polycycloalkane include a bicycloalkane such as bicyclo[2.2.1]heptane (norbornane) and bicyclo[2.2.2]octane. As the condensed cyclic group, a group having a condensed ring in which two or three aromatic rings are condensed with a bicycloalkane is preferable, and a group having a condensed ring in which two or three aromatic rings are condensed with bicyclo[2.2.2]octane is more preferable. Specific examples of the condensed cyclic group as R101 include those represented by Formulae (r-br-1) and (r-br-2). In the formulae, * represents a bonding site with respect to Y101 in Formula (b-1).
Examples of the substituents that the condensed cyclic group as R101 may have include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an aromatic hydrocarbon group, and an alicyclic hydrocarbon group.
Examples of the alkyl group, the alkoxy group, the halogen atom, and the halogenated alkyl group as the substituent of the condensed cyclic group include those described as the substituent of the cyclic group as R101.
Examples of the aromatic hydrocarbon group as the substituent of the condensed cyclic group include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group), a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group), and a heterocyclic group represented by any of Formulae (r-hr-1) to (r-hr-6).
Examples of the alicyclic hydrocarbon group as the substituent of the condensed cyclic group include a group in which one hydrogen atom has been removed from a monocycloalkane such as cyclopentane or cyclohexane; a group in which one hydrogen atom has been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7); a —SO2— containing cyclic group represented by any of General Formulae (a5-r-1) to (a5-r-4); and a heterocyclic group represented by any of Formulae (r-hr-7) to (r-hr-16).
Chain alkyl group which may have substituent:
The chain alkyl group as R101 may be linear or branched.
The linear alkyl group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most preferably 1 to 10 carbon atoms.
The branched alkyl group has preferably 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and most preferably 3 to 10 carbon atoms. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain Alkenyl Group which May have Substituent:
The chain alkenyl group as R101 may be linear or branched, and the number of carbon atoms thereof is preferably in a range of 2 to 10, more preferably in a range of 2 to 5, still more preferably in a range of 2 to 4, and particularly preferably 3. Examples of the linear alkenyl group include a vinyl group, a propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group. Among the examples, as the chain alkenyl group, a linear alkenyl group is preferable, a vinyl group or a propenyl group is more preferable, and a vinyl group is particularly preferable.
Examples of the substituent for the chain alkyl group or alkenyl group as R101 include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, and a cyclic group as R101.
Among the examples, R101 represents preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. In addition, in a case where the cyclic group or the cyclic hydrocarbon group has a substituent, an iodine atom is preferable as the substituent.
More specifically, as the cyclic hydrocarbon group, a phenyl group, a naphthyl group, or a group in which one or more hydrogen atoms have been removed from a polycycloalkane; a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7); and a —SO2— containing cyclic group represented by any of General Formulae (a5-r-1) to (a5-r-4) are preferable, a phenyl group and a group in which one or more hydrogen atoms have been removed from a polycycloalkane are more preferable, and a phenyl group and an adamantyl group are still more preferable.
In Formula (b-1), Y101 represents a single bond or a divalent linking group having an oxygen atom.
In a case where Y101 represents a divalent linking group containing an oxygen atom, Y101 may contain an atom other than the oxygen atom. Examples of atoms other than an oxygen atom include a carbon atom, a hydrogen atom, a sulfur atom, and a nitrogen atom.
Examples of the divalent linking group having an oxygen atom include a non-hydrocarbon oxygen atom-containing linking group such as an oxygen atom (an ether bond: —O—), an ester bond (—C(═O)—O—), an oxycarbonyl group (—O—C(═O)—), an amide bond (—C(═O)—NH—), a carbonyl group (—C(═O)—), or a carbonate bond (—O—C(═O)—O—); and combinations of the above-described non-hydrocarbon oxygen atom-containing linking groups with an alkylene group. Further, a sulfonyl group (—SO2—) may be further linked to the combination. Examples of the divalent linking group having an oxygen atom include linking groups each represented by General Formulae (y-a1-1) to (y-a1-7). Further, in General Formulae (y-a1-1) to (y-a1-7), V′101 in General Formulae (y-a1-1) to (y-a1-7) is bonded to R101 in Formula (b-1).
[In the formulae, V′101 represents a single bond or an alkylene group having 1 to 5 carbon atoms, and V′102 represents a divalent saturated hydrocarbon group having 1 to 30 carbon atoms.]
As the divalent saturated hydrocarbon group as V′102, an alkylene group having 1 to 30 carbon atoms is preferable, an alkylene group having 1 to 10 carbon atoms is more preferable, and an alkylene group having 1 to 5 carbon atoms is still more preferable.
The alkylene group as V′101 and V′102 may be a linear alkylene group or a branched alkylene group, and a linear alkylene group is preferable.
Specific examples of the alkylene group as V′101 and V′102 include a methylene group [—CH2—]; an alkylmethylene group such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, or —C(CH2CH3)2—; an ethylene group [—CH2CH2—]; an alkylethylene group such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, or —CH(CH2CH3)CH2—; a trimethylene group (n-propylene group) [—CH2CH2CH2—]; an alkyltrimethylene group such as —CH(CH3)CH2CH2— or —CH2CH(CH3)CH2—; a tetramethylene group [—CH2CH2CH2CH2—]; an alkyltetramethylene group such as —CH(CH3)CH2CH2CH2— or —CH2CH(CH3)CH2CH2—; and a pentamethylene group [—CH2CH2CH2CH2CH2—].
Further, a part of methylene group in the alkylene group as V′101 and V′102 may be substituted with a divalent aliphatic cyclic group having 5 to 10 carbon atoms. As the aliphatic cyclic group, a divalent group in which one hydrogen atom has been further removed from the cyclic aliphatic hydrocarbon group (a monocyclic aliphatic hydrocarbon group or a polycyclic aliphatic hydrocarbon group) as Ra′3 in Formula (a1-r-1) is preferable, and a cyclohexylene group, a 1,5-adamantylene group, or a 2,6-adamantylene group is more preferable.
Y101 represents preferably a divalent linking group having an ester bond or a divalent linking group having an ether bond, more preferably a linking group represented by any of Formulae (y-a1-1) to (y-a1-5), and still more preferably a linking group represented by Formulae (y-a1-1).
In Formula (b-1), V101 represents a single bond, an alkylene group, or a fluorinated alkylene group. It is preferable that the alkylene group and the fluorinated alkylene group as V101 have 1 to 4 carbon atoms. Examples of the fluorinated alkylene group as V101 include a group in which some or all hydrogen atoms in the alkylene group as V101 have been substituted with fluorine atoms. Among the examples, V101 represents preferably a single bond or a linear fluorinated alkylene group having 1 to 4 carbon atoms and more preferably a single bond or a linear fluorinated alkylene group having 1 to 4 carbon atoms.
In Formula (b-1), R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. R102 represents preferably a fluorine atom or a perfluoroalkyl group having 1 to 5 carbon atoms and more preferably a fluorine atom.
In a case where Y101 represents a single bond, specific example of the anion moiety represented by Formula (b-1) include a fluorinated alkylsulfonate anion such as a trifluoromethanesulfonate anion or a perfluorobutanesulfonate anion. Further, in a case where Y101 represents a divalent linking group having an oxygen atom, specific examples thereof include an anion represented by any of Formulae (an-1) to (an-3).
[In the formulae, R″101 represents an aliphatic cyclic group which may have a substituent, a monovalent heterocyclic group represented by any of Chemical Formulae (r-hr-1) to (r-hr-6), a condensed cyclic group represented by Formula (r-br-1) or (r-br-2), a chain alkyl group which may have a substituent, or an aromatic cyclic group which may have a substituent. R″102 represents an aliphatic cyclic group which may have a substituent, a condensed cyclic group represented by Formula (r-br-1) or (r-br-2), a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) and (a2-r-3) to (a2-r-7), or a —SO2— containing cyclic group represented by any of General Formulae (a5-r-1) to (a5-r-4). R″103 represents an aromatic cyclic group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain alkenyl group which may have a substituent. V″101 represents a single bond, an alkylene group having 1 to 4 carbon atoms, or a fluorinated alkylene group having 1 to 4 carbon atoms. R102 represents a fluorine atom or a fluorinated alkyl group having 1 to 5 carbon atoms. Each v″ independently represents an integer of 0 to 3, each q″ independently represents an integer of 0 to 20, and n″ represents 0 or 1.]
As the aliphatic cyclic group as R″101, R″102, and R″103 which may have a substituent, the same groups as those provided as examples for the cyclic aliphatic hydrocarbon group as R101 in Formula (b-1) are preferable. Examples of the substituent include the same groups as those provided as examples for the substituent which may substitute the cyclic aliphatic hydrocarbon group as R101 in Formula (b-1).
As the aromatic cyclic group which may have a substituent as R″101 and R″103 the same groups as those provided as examples for the aromatic hydrocarbon group in the cyclic hydrocarbon group as R101 in Formula (b-1) are preferable. Examples of the substituent include the same groups as those provided as examples for the substituent which may substitute the aromatic hydrocarbon group as R101 in Formula (b-1).
As the chain alkyl group as R″101 which may have a substituent, the same groups as those provided as examples for the chain alkyl group as R101 in Formula (b-1) are preferable.
As the chain alkenyl group as R″103 which may have a substituent, the same groups as those provided as examples for the chain alkenyl group as R101 in Formula (b-1) are preferable.
Anions in Component (b-2)
In Formula (b-2), R104 and R105 each independently represent a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R101 in Formula (b-1). Here, R104 and
R105 may be bonded to each other to form a ring.
R104 and R105 represent preferably a chain alkyl group which may have a substituent and more preferably a linear or branched alkyl group or a linear or branched fluorinated alkyl group.
The chain alkyl group has preferably 1 to 10 carbon atoms, more preferably 1 to 7 carbon atoms, and still more preferably 1 to 3 carbon atoms. It is preferable that the number of carbon atoms in the chain alkyl group as R104 and R105 decreases within the range of the number of carbon atoms from the viewpoint that the solubility in a solvent for a resist is also satisfactory. Further, in the chain alkyl group as R104 and R105, it is preferable that the number of hydrogen atoms substituted with fluorine atoms is as large as possible from the viewpoint that the acid strength increases and the transparency to high energy light or electron beams having a wavelength of 250 nm or less is improved. The proportion of fluorine atoms in the chain alkyl group, that is, the fluorination ratio is preferably in a range of 70% to 100% and more preferably in a range of 90% to 100%, and it is most preferable that the chain alkyl group is a perfluoroalkyl group in which all hydrogen atoms are substituted with fluorine atoms.
In Formula (b-2), V102 and V103 each independently represent a single bond, an alkylene group, or a fluorinated alkylene group, and examples thereof include the same groups as those provided as examples for V101 in Formula (b-1).
In Formula (b-2), L101 and L102 each independently represent a single bond or an oxygen atom.
Anions in Component (b-3)
In Formula (b-3), R106 to R108 each independently represent a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R101 in Formula (b-1).
In Formula (b-3), L103 to L105 each independently represent a single bond, —CO—, or —SO2—.
Among the examples, as the anion moiety of the component (B), an anion in the component (b-1) is preferable.
In Formulae (b-1), (b-2), and (b-3), M′m+ represents an m-valent onium cation.
Among these, a sulfonium cation and an iodonium cation are preferable. m represents an integer of 1 or greater.
Preferred examples of the cation moiety ((M′m+)1/m) include organic cations each represented by General Formulae (ca-1) to (ca-3).
[In the formulae, R201 to R207 each independently represent an aryl group, an alkyl group, or an alkenyl group, which may have a substituent. R201 to R203, and R206 and R207 may be bonded to each other to form a ring together with the sulfur atoms in the formulae. R208 and R209 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a —SO2— containing cyclic group which may have a substituent. L201 represents —C(═O)— or —C(═O)—O—.]
In General Formulae (ca-1) to (ca-3), examples of the aryl group as R201 to R207 include an unsubstituted aryl group having 6 to 20 carbon atoms. Among these, a phenyl group or a naphthyl group is preferable.
As the alkyl group as R201 to R207, a chain or cyclic alkyl group having 1 to 30 carbon atoms is preferable.
It is preferable that the alkenyl group as R201 to R207 has 2 to 10 carbon atoms. Examples of the substituent that R201 to R207 and R210 may have include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and groups each represented by General Formulae (ca-r-1) to (ca-r-7).
[In the formulae, R′201's each independently represent a hydrogen atom, a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent.]
Cyclic Group which May have Substituent:
The cyclic group is preferably a cyclic hydrocarbon group, and the cyclic hydrocarbon group may be an aromatic hydrocarbon group or an aliphatic hydrocarbon group. The aliphatic hydrocarbon group indicates a hydrocarbon group that has no aromaticity. Further, the aliphatic hydrocarbon group may be saturated or unsaturated. In general, it is preferable that the aliphatic hydrocarbon group is saturated.
The aromatic hydrocarbon group as R′201 is a hydrocarbon group having an aromatic ring. The aromatic hydrocarbon group has preferably 3 to 30 carbon atoms, more preferably 5 to 30 carbon atoms, still more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specific examples of the aromatic ring contained in the aromatic hydrocarbon group as R′201 include benzene, fluorene, naphthalene, anthracene, phenanthrene, biphenyl, or an aromatic heterocyclic ring in which some carbon atoms constituting any of these aromatic rings have been substituted with heteroatoms. Examples of the heteroatom in the aromatic heterocyclic rings include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific examples of the aromatic hydrocarbon group as R′201 include a group in which one hydrogen atom has been removed from the aromatic ring (an aryl group such as a phenyl group or a naphthyl group), and a group in which one hydrogen atom in the aromatic ring has been substituted with an alkylene group (for example, an arylalkyl group such as a benzyl group, a phenethyl group, a 1-naphthylmethyl group, a 2-naphthylmethyl group, 1-naphthylethyl group, or a 2-naphthylethyl group). The alkylene group (alkyl chain in the arylalkyl group) has preferably 1 to 4 carbon atoms, more preferably 1 or 2 carbon atoms, and particularly preferably 1 carbon atom.
Examples of the cyclic aliphatic hydrocarbon group as R′201 include an aliphatic hydrocarbon group having a ring in the structure thereof.
Examples of the aliphatic hydrocarbon group having a ring in the structure thereof include an alicyclic hydrocarbon group (a group in which one hydrogen atom has been removed from an aliphatic hydrocarbon ring), a group in which the alicyclic hydrocarbon group is bonded to the terminal of a linear or branched aliphatic hydrocarbon group, and a group in which the alicyclic hydrocarbon group is interposed in the middle of a linear or branched aliphatic hydrocarbon group.
The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms and more preferably 3 to 12 carbon atoms.
The alicyclic hydrocarbon group may be a polycyclic group or a monocyclic group. As the monocyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a monocycloalkane is preferable. The monocycloalkane has preferably 3 to 6 carbon atoms, and specific examples thereof include cyclopentane and cyclohexane. As the polycyclic alicyclic hydrocarbon group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane is preferable, and the number of carbon atoms of the polycycloalkane is preferably in a range of 7 to 30. Among these, a polycycloalkane having a crosslinked ring polycyclic skeleton such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane; and a polycycloalkane having a condensed ring polycyclic skeleton such as a cyclic group having a steroid skeleton are preferable as the polycycloalkane.
Among these examples, as the cyclic aliphatic hydrocarbon group as R′201, a group in which one or more hydrogen atoms have been removed from a monocycloalkane or a polycycloalkane is preferable, a group in which one hydrogen atom has been removed from a polycycloalkane is more preferable, an adamantyl group or a norbornyl group is particularly preferable, and an adamantyl group is most preferable.
The linear or branched aliphatic hydrocarbon group which may be bonded to the alicyclic hydrocarbon group has preferably 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and particularly preferably 1 to 3 carbon atoms.
As the linear aliphatic hydrocarbon group, a linear alkylene group is preferable, and specific examples thereof include a methylene group [—CH2—], an ethylene group [—(CH2)2—], a trimethylene group [—(CH2)3—], a tetramethylene group [—(CH2)4—], and a pentamethylene group [—(CH2)5—].
As the branched aliphatic hydrocarbon group, a branched alkylene group is preferable, and specific examples thereof include alkylalkylene groups, for example, alkylmethylene groups such as —CH(CH3)—, —CH(CH2CH3)—, —C(CH3)2—, —C(CH3)(CH2CH3)—, —C(CH3)(CH2CH2CH3)—, and —C(CH2CH3)2—; alkylethylene groups such as —CH(CH3)CH2—, —CH(CH3)CH(CH3)—, —C(CH3)2CH2—, —CH(CH2CH3)CH2—, and —C(CH2CH3)2—CH2—; alkyltrimethylene groups such as —CH(CH3)CH2CH2— and —CH2CH(CH3)CH2—; and alkyltetramethylene groups such as —CH(CH3)CH2CH2CH2— and —CH2CH(CH3)CH2CH2—. As the alkyl group in the alkylalkylene group, a linear alkyl group having 1 to 5 carbon atoms is preferable.
Further, the cyclic hydrocarbon group as R′201 may have a heteroatom such as a heterocyclic ring. Specific examples thereof include lactone-containing cyclic groups each represented by General Formulae (a2-r-1) to (a2-r-7), —SO2— containing cyclic groups each represented by General Formulae (a5-r-1) to (a5-r-4), and other heterocyclic groups each represented by Chemical Formulae (r-hr-1) to (r-hr-16).
Examples of the substituent for the cyclic group as R′201 include an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, and a nitro group.
As the alkyl group as the substituent, an alkyl group having 1 to 5 carbon atoms is preferable, and a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group is most preferable.
As the alkoxy group as the substituent, an alkoxy group having 1 to 5 carbon atoms is preferable, a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, or a tert-butoxy group is more preferable, and a methoxy group or an ethoxy group is most preferable.
As the halogen atom as a substituent, a fluorine atom is preferable.
Example of the above-described halogenated alkyl group as the substituent includes a group in which some or all hydrogen atoms in an alkyl group having 1 to 5 carbon atoms such as a methyl group, an ethyl group, a propyl group, an n-butyl group, or a tert-butyl group have been substituted with the above-described halogen atoms.
The carbonyl group as the substituent is a group that substitutes a methylene group (—CH2—) constituting the cyclic hydrocarbon group.
Chain Alkyl Group which May have Substituent:
The chain alkyl group as R′201 may be linear or branched.
The linear alkyl group has preferably 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and most preferably 1 to 10 carbon atoms.
The branched alkyl group has preferably 3 to 20 carbon atoms, more preferably 3 to 15 carbon atoms, and most preferably 3 to 10 carbon atoms. Specific examples thereof include a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a 4-methylpentyl group.
Chain Alkenyl Group which May have Substituent:
The chain alkenyl group as R′201 may be linear or branched, and the number of carbon atoms thereof is preferably in a range of 2 to 10, more preferably in a range of 2 to 5, still more preferably in a range of 2 to 4, and particularly preferably 3. Examples of the linear alkenyl group include a vinyl group, a propenyl group (an allyl group), and a butynyl group. Examples of the branched alkenyl group include a 1-methylvinyl group, a 2-methylvinyl group, a 1-methylpropenyl group, and a 2-methylpropenyl group. Among the examples, as the chain alkenyl group, a linear alkenyl group is preferable, a vinyl group or a propenyl group is more preferable, and a vinyl group is particularly preferable.
Examples of the substituent for the chain alkyl group or alkenyl group as R′201 include an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxyl group, a carbonyl group, a nitro group, an amino group, and a cyclic group as R′201.
Examples of the cyclic group which may have a substituent, the chain alkyl group which may have a substituent, and the chain alkenyl group which may have a substituent as R′201 include those for the acid dissociable group represented by Formula (a1-r-2) which are the exemplary examples of the cyclic group which may have a substituent and the chain alkyl group which may have a substituent, in addition to those described above.
Among the examples, R′201 represents preferably a cyclic group which may have a substituent and more preferably a cyclic hydrocarbon group which may have a substituent. More specific preferred examples thereof include a phenyl group, a naphthyl group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane, a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7), and a —SO2— containing cyclic group represented by any of General Formulae (a5-r-1) to (a5-r-4).
In General Formulae (ca-1) to (ca-3), in a case where R201 to R203 and R206 and R207 are bonded to each other to form a ring together with a sulfur atom in the formula, these groups may be bonded to each other via a heteroatom such as a sulfur atom, an oxygen atom, or a nitrogen atom, or a functional group such as a carbonyl group, —SO—, —SO2—, —SO3—, —COO—, —CONH— or —N(RN)—(RN represents an alkyl group having 1 to 5 carbon atoms). As a ring to be formed, a ring containing the sulfur atom in the formula in the ring skeleton thereof is preferably a 3- to 10-membered ring and particularly preferably a 5- to 7-membered ring containing the sulfur atom. Specific examples of the ring to be formed include a thiophene ring, a thiazole ring, a benzothiophene ring, a dibenzothiophene ring, a 9H-thioxanthene ring, a thioxanthone ring, a thianthrene ring, a phenoxathiin ring, a tetrahydrothiophenium ring, and a tetrahydrothiopyranium ring.
R208 and R209 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms and preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms. In a case where R208 and R209 represent an alkyl group, R208 and R209 may be bonded to each other to form a ring.
R210 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent, or a —SO2-containing cyclic group which may have a substituent.
Examples of the aryl group as R210 include an unsubstituted aryl group having 6 to 20 carbon atoms. Among these, a phenyl group or a naphthyl group is preferable.
As the alkyl group as R210, a chain or cyclic alkyl group having 1 to 30 carbon atoms is preferable.
It is preferable that the alkenyl group as R210 has 2 to 10 carbon atoms.
The —SO2— containing cyclic group which may have a substituent, as R210, is preferably “—SO2— containing polycyclic group”, and more preferably a group represented by General Formula (a5-r-1).
Specific examples of the cation represented by Formula (ca-1) are shown below.
[In the formulae, g1, g2, and g3 represent a repeating number, g1 represents an integer of 1 to 5, g2 represents an integer of 0 to 20, and g3 represents an integer of 0 to 20.]
[In the formulae, R″201 represents a hydrogen atom or a substituent, and examples of the substituent include the same groups as those provided as examples for the substituents that R201 to R207 and R210 to R212 may have.]
Specific examples of suitable cations represented by Formula (ca-2) include a diphenyliodonium cation and a bis(4-tert-butylphenyl) iodonium cation.
Specific examples of suitable cations represented by Formula (ca-3) include cations each represented by Formulae (ca-3-1) to (ca-3-6).
As the acid generator component (B), a compound (B01) represented by General Formula (b0-1) (hereinafter, also referred to as “compound (B01)”) or a compound (B02) represented by General Formula (b0-2) (hereinafter, also referred to as “compound (B02)”) is preferable.
The compound (B01) is a compound represented by General Formula (b0-1).
[In Formula (b0-1), Rb1 represents an aryl group having a fluorine atom or an aryl group having a fluorinated alkyl group. Rb2 and Rb3 each independently represent an aryl group which may have a substituent, an alkyl group which may have a substituent, an alkenyl group which may have a substituent. Two of Rb1 to Rb3 may be bonded to each other to form a ring together with the sulfur atom in the formula. X01− represents a counter anion.]
In Formula (b0-1), Rb1 represents an aryl group having a fluorine atom or an aryl group having a fluorinated alkyl group.
The aryl group as Rb1 has preferably 5 to 30 carbon atoms, more preferably 5 to 20 carbon atoms, particularly preferably 6 to 15 carbon atoms, and most preferably 6 to 10 carbon atoms. Here, the number of carbon atoms in a substituent is not included in the number of carbon atoms.
Specifically, the aryl group as Rb1 is preferably a phenyl group, a naphthyl group, an anthryl group, a phenanthryl group, or a biphenyl group, more preferably a phenyl group or a naphthyl group, and still more preferably a phenyl group.
Specific examples of the fluorinated alkyl group contained in the aryl group as Rb1 include a group in which some or all hydrogen atoms of an alkyl group having 1 to 12 carbon atoms are substituted with fluorine atoms. The alkyl group may be linear or branched.
Specific examples of the linear fluorinated alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, and an undecyl group, a group in which some or all hydrogen atoms of a dodecyl group are substituted with a fluorine atom. Specific examples of the branched fluorinated alkyl group having 1 to 12 carbon atoms include a 1-methylethyl group, a 1,1-dimethylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, and a group in which some or all hydrogen atoms of a 4-methylpentyl group are substituted with a fluorine atom.
The fluorinated alkyl group contained in the aryl group as Rb1 is, among the examples, preferably a group in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms are substituted with fluorine atoms, more preferably a group in which some or all hydrogen atoms of an alkyl group having 1 to 3 carbon atoms are substituted with fluorine atoms, and still more preferably a trifluoromethyl group.
The aryl group as Rb1 may have a substituent other than the fluorine atom and the fluorinated alkyl group. Examples of the substituent include an alkyl group, a halogen atom other than the fluorine atom, a halogenated alkyl group other than the fluorinated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and a group represented by any of General Formulae (ca-r-1) to (ca-r-7).
In Formula (b0-1), Rb1 represents, among the examples, preferably an aryl group having a fluorine atom or an aryl group having a group in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms are substituted with fluorine atoms, more preferably an aryl group having a fluorine atom or an aryl group having a group in which some or all hydrogen atoms of an alkyl group having 1 to 3 carbon atoms are substituted with fluorine atoms, and still more preferably an aryl group having a fluorine atom or an aryl group having a trifluoromethyl group.
In Formula (b0-1), Rb2 and Rb3 each independently represent an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent.
Examples of the aryl group as Rb2 and Rb3 include the same groups as those provided as examples for the aryl group as Rb1. The aryl group as Rb2 and Rb3 is, among the examples, preferably a phenyl group, a naphthyl group, an anthryl group, a phenanthryl group, or a biphenyl group, more preferably a phenyl group or a naphthyl group, and still more preferably a phenyl group.
A chain or cyclic alkyl group having 1 to 30 carbon atoms is preferable as the alkyl group as Rb2 and Rb3.
An alkenyl group having 2 to 10 carbon atoms is preferable as the alkenyl group as Rb2 and Rb3.
In General Formula (b0-1), examples of the substituent that Rb2 and Rb3 may have include an alkyl group, a halogen atom, a halogenated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and a group represented by any of
General Formulae (ca-r-1) to (ca-r-7).
In Formula (b0-1), it is preferable that Rb2 and Rb3 represent, among the examples, an aryl group which may have a substituent. In a case where the aryl group has a substituent, as the substituent, a fluorine atom, a fluorinated alkyl group, or the monovalent group represented by —SO2—Rb0 is preferable, and a fluorine atom or a fluorinated alkyl group is more preferable.
That is, in Formula (b0-1), it is preferable that Rb2 and Rb3 represent an unsubstituted aryl group, an aryl group having a fluorine atom, or an aryl group having a fluorinated alkyl group.
In Formula (b0-1), two of Rb1 to Rb3 may be bonded to each other to form a ring together with a sulfur atom in the formula. In a case where two of Rb1 to Rb3 are bonded to each other to form a ring together with a sulfur atom in the formula, these may be bonded to each other via a heteroatom such as a sulfur atom, an oxygen atom, or a nitrogen atom, or a functional group such as —SO—, —SO2—, —SO3—, —C(═O)—, —COO—, —CONH— or —N(RN)— (here, RN represents an alkyl group having 1 to 5 carbon atoms). As a ring to be formed, a ring containing the sulfur atom in the formula in the ring skeleton thereof is preferably a 3- to 10-membered ring and particularly preferably a 5- to 7-membered ring containing the sulfur atom. Specific examples of the ring to be formed include a thiophene ring, a thiazole ring, a benzothiophene ring, a dibenzothiophene ring, a 9H-thioxanthene ring, a thianthrene ring, a phenoxathiin ring, a tetrahydrothiophenium ring, and a tetrahydrothiopyranium ring.
In a case where Rb1 and Rb2 or Rb3 are bonded to each other to form a ring together with a sulfur atom in the formula, the ring structure is not limited as long as the ring structure has a fluorine atom or a fluorinated alkyl group, and the hydrogen atom of the structure (for example, the benzene ring structure) derived from an aryl group is not necessarily substituted with a fluorine atom or a fluorinated alkyl group.
The cation moiety in the compound (B01) is preferably a cation represented by General Formula (ca-b01-1).
[In the formula, Rb2 and Rb3 each independently represent an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent. Rb2 and Rb3 may be bonded to each other to form a ring together with a sulfur atom in the formula. X011 represents a fluorine atom or a fluorinated alkyl group. R011 represents a substituent. nb represents an integer of 1 or greater. pb represents an integer of 0 or greater. qb represents an integer of 0 to 3. Here, nb+pb≤qb×2+5 is satisfied.]
In Formula (ca-b01-1), Rb2 and Rb3 each have the same definition as that for Rb2 and Rb3 in Formula (b0-1).
In Formula (ca-b01-1), X011 represents a fluorine atom or a fluorinated alkyl group, and examples thereof include the same groups as those provided as examples for the fluorine atom and the fluorinated alkyl group contained in Rb1 in Formula (b0-1).
In Formula (ca-b01-1), R011 represents a substituent, and examples thereof include an alkyl group, a halogen atom other than the fluorine atom, a halogenated alkyl group other than the fluorinated alkyl group, a carbonyl group, a cyano group, an amino group, an aryl group, and a group represented by any of General Formula (ca-r-1) to (ca-r-7).
In General Formula (ca-b01-1), nb represents an integer of 1 or greater, preferably an integer of 1 to 3, and more preferably 1 or 2.
In Formula (ca-b01-1), pb represents an integer of 0 or greater, preferably 0 to 2, and more preferably 0.
In General Formula (ca-b01-1), qb represents an integer of 0 to 3. A benzene structure is formed in a case where q represents 0, a naphthalene structure is formed in a case where q represents 1, an anthracene structure is formed in a case where q represents 2, and a tetracene structure is formed in a case where q represents 3.
The cation moiety in the compound (B01) is preferably a cation represented by any of Formulae (ca-b01-11) to (ca-b01-24) and more preferably a cation represented by any of Formulae (ca-b01-14), (ca-b01-15), (ca-b01-18), and (ca-b01-2).
In Formula (b0-1), X01− represents a counter anion.
Specific examples of X01− include an anion moiety of the component (b-1), an anion moiety of the component (b-2), and an anion moiety of the component (b-3). Among these, an anion moiety of the component (b-1) is preferable.
Specific preferred examples of the anion moiety in the compound (B01) are shown below.
Among the above, the compound (B01) is preferably a compound (B011) represented by General Formula (b0-1-1) (hereinafter, also referred to as “compound (B011)”).
[In the formula, Rb2 and Rb3 each independently represent an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent. Rb2 and Rb3 may be bonded to each other to form a ring together with a sulfur atom in the formula. X011 represents a fluorine atom or a fluorinated alkyl group. R011 represents a substituent. nb represents an integer of 1 or greater. pb represents an integer of 0 or greater. qb represents an integer of 0 to 3. Here, nb+pb≤qb×2+5 is satisfied. X01− represents a counter anion.]
The anion moiety of the compound (B011) is the same as the anion moiety of the compound (B01).
The cation moiety of the compound (B011) is the same as the cation represented by General Formula (ca-b01-1).
In the resist composition according to the present embodiment, the compound (B01) may be used alone or in a combination of two or more kinds thereof.
The amount of the compound (B01) is preferably in a range of 5 to 40 parts by mass, more preferably in a range of 10 to 40 parts by mass, and still more preferably in a range of 10 to 30 parts by mass with respect to 100 parts by mass of the component (A1).
In a case where the amount of the compound (B01) is greater than or equal to the lower limits of the above-described preferable ranges, the lithography characteristics such as sensitivity, resolution performance, and linewise roughness (LWR) are further improved in the resist pattern formation. Meanwhile, in a case where the amount thereof is less than or equal to the upper limits of the above-described preferable ranges, a uniform solution is easily obtained, and the storage stability of the resist composition is further improved in a case of dissolving each component of the resist composition in an organic solvent.
The compound (B02) is a compound represented by General Formula (b0-2).
[In Formula (b0-2), Rb4 represents an aryl group having a fluorine atom or an aryl group having a fluorinated alkyl group. Rb5 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent. X02
In Formula (b0-2), Rb4 represents an aryl group having a fluorine atom or an aryl group having a fluorinated alkyl group, and examples thereof include the same groups as those provided as examples for Rb1 in General Formula (b0-1).
In Formula (b0-2), Rb5 represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for Rb2 and Rb3 in General Formula (b0-2).
In Formula (b0-2), Rb4 represents, among the examples, preferably a phenyl group having a fluorine atom or a phenyl group having a group in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms are substituted with fluorine atoms and more preferably a phenyl group having a fluorine atom.
In General Formula (b0-2), Rb5 represents, among the examples, preferably a phenyl group having a fluorine atom or a phenyl group having a group in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms are substituted with fluorine atoms and more preferably a phenyl group having a fluorine atom.
Preferred specific examples of the cation moiety of the compound (B02) are shown below.
In Formula (b0-2), X02− represents a counter anion, and examples thereof include the same counter anions as those provided as examples for X01− in Formula (b0-1).
In the resist composition according to the present embodiment, the compound (B02) may be used alone or in a combination of two or more kinds thereof.
The amount of the compound (B02) is preferably in a range of 5 to 40 parts by mass, more preferably in a range of 10 to 40 parts by mass, and still more preferably in a range of 10 to 30 parts by mass with respect to 100 parts by mass of the component (A1). In a case where the amount of the compound (B02) is greater than or equal to the lower limits of the above-described preferable ranges, the lithography characteristics such as sensitivity, resolution performance, and linewise roughness (LWR) are further improved in the resist pattern formation. Meanwhile, in a case where the amount thereof is less than or equal to the upper limits of the above-described preferable ranges, a uniform solution is easily obtained, and the storage stability of the resist composition is further improved in a case of dissolving each component of the resist composition in an organic solvent.
In the resist composition according to the present embodiment, only one of the compound (B01) or the compound (B02) may be used, or the compound (B01) and the compound (B02) may be used in combination, but it is preferable that the resist composition contains the compound (B01).
Specific preferred examples of the component (B) are shown below.
In a case where the resist composition contains the component (B), the amount of the component (B) in the resist composition is preferably in a range of 5 to 40 parts by mass, more preferably in a range of 10 to 40 parts by mass, and still more preferably in a range of 10 to 30 parts by mass with respect to 100 parts by mass of the component (A1).
In a case where the amount of the component (B) is greater than or equal to the lower limits of the above-described preferable ranges, lithography characteristics such as sensitivity, resolution performance, and linewise roughness (LWR) are further improved in resist pattern formation. Meanwhile, in a case where the amount thereof is less than or equal to the upper limits of the above-described preferable ranges, a uniform solution is easily obtained, and the storage stability of the resist composition is further improved in a case of dissolving each component of the resist composition in an organic solvent.
The proportion of the compound (B01) and the compound (B02) in the component (B) is preferably 25% by mass or greater, more preferably 50% by mass or greater, and still more preferably 75% by mass or greater, and may be 100% by mass with respect to the total mass of the component (B).
It is preferable that the resist composition according to the present embodiment further contains a base component (hereinafter, also referred to as “component (D)”) that traps an acid (that is, controls diffusion of an acid) generated upon light exposure. The component (D) acts as a quencher (an acid diffusion control agent) which traps the acid generated in the resist composition upon light exposure.
Examples of the component (D) include a photodecomposable base (D1) having acid diffusion controllability (hereinafter, referred to as “component (D1)”) which is lost by the decomposition upon light exposure and a nitrogen-containing organic compound (D2) (hereinafter, referred to as “component (D2)”) which does not correspond to the component (D1). Among these, the photodecomposable base (the component (D1)) is preferable from the viewpoint of easily enhancing the roughness characteristics. Further, in a case where the component (D1) is contained, both the characteristics of increasing the sensitivity and suppressing the occurrence of coating defects are likely to be enhanced.
In a case where a resist composition containing the component (D1) is obtained, the contrast between an exposed portion and an unexposed portion of the resist film can be further improved in a case of forming a resist pattern.
The component (D1) is not particularly limited as long as the component is decomposed upon light exposure and loses an acid diffusion controllability, and one or more kinds of compounds selected from the group consisting of a compound represented by General Formula (d1-1) (hereinafter, referred to as “component (d1-1)”), a compound represented by General Formula (d1-2) (hereinafter, referred to as “component (d1-2)”), and a compound represented by General Formula (d1-3) (hereinafter, referred to as “component (d1-3)”) are preferable.
Since the components (d1-1) to (d1-3) are decomposed and lose the acid diffusion controllability (basicity), the components (d1-1) to (d1-3) do not act as a quencher at the exposed portion of the resist film, but act as a quencher at the unexposed portion of the resist film.
[In the formulae, Rd1 to Rd4 represent a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent. Here, no fluorine atom is bonded to the carbon atom adjacent to the S atom in Rd2 of Formula (d1-2). Yd1 represents a single bond or a divalent linking group. m represents an integer of 1 or greater, and Mm+'s each independently represent an m-valent organic cation.]
{Component (d1-1)}
In Formula (d1-1), Rd1 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R′201
Among these, it is preferable that Rd1 represents an aromatic hydrocarbon group which may have a substituent, an aliphatic cyclic group which may have a substituent, or a chain alkyl group which may have a substituent. Examples of the substituent that may be included in these groups include a hydroxyl group, an oxo group, an alkyl group, an aryl group, a fluorine atom, a fluorinated alkyl group, a lactone-containing cyclic group represented by any of General Formulae (a2-r-1) to (a2-r-7), an ether bond, an ester bond, and a combination thereof. In a case where an ether bond or an ester bond is included as the substituent, the substituent may be bonded through an alkylene group, and a linking group represented by any of Formulae (y-a1-1) to (y-a1-5) is preferable as the substituent. Further, in a case where the aromatic hydrocarbon group, the aliphatic cyclic group, or the chain alkyl group as Rd1 contains a linking group represented by any of General Formulae (y-a1-1) to (y-a1-7) as a substituent, V′101 in General Formulae (y-a1-1) to (y-a1-7) is bonded to the carbon atom constituting the aromatic hydrocarbon group, the aliphatic cyclic group, or the chain alkyl group as Rd1 in Formula (d3-1), in General Formulae (y-a1-1) to (y-a1-7).
Suitable examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, and a polycyclic structure having a bicyclooctane skeleton (for example, a polycyclic structure formed of a bicyclooctane skeleton and a ring structure other than the bicyclooctane skeleton).
As the aliphatic cyclic group, a group in which one or more hydrogen atoms have been removed from a polycycloalkane such as adamantane, norbornane, isobornane, tricyclodecane, or tetracyclododecane is more preferable.
It is preferable that the chain alkyl group has 1 to 10 carbon atoms, and specific examples thereof include a linear alkyl group such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, or a decyl group; and a branched alkyl group such as a 1-methylethyl group, a 1-methylpropyl group, a 2-methylpropyl group, a 1-methylbutyl group, a 2-methylbutyl group, a 3-methylbutyl group, a 1-ethylbutyl group, a 2-ethylbutyl group, a 1-methylpentyl group, a 2-methylpentyl group, a 3-methylpentyl group, or a 4-methylpentyl group.
In a case where the chain alkyl group is a fluorinated alkyl group having a fluorine atom or a fluorinated alkyl group as a substituent, the fluorinated alkyl group has preferably 1 to 11 carbon atoms, more preferably 1 to 8 carbon atoms, and still more preferably 1 to 4 carbon atoms. The fluorinated alkyl group may have an atom other than a fluorine atom. Examples of the atom other than a fluorine atom include an oxygen atom, a sulfur atom, and a nitrogen atom.
Specific preferred examples of the anion moiety in the component (d1-1) are described below.
In Formula (d1-1), Mm+ represents an m-valent organic cation.
Suitable examples of the organic cation as Mm+ include the same cations as those represented by any of General Formulae (ca-1) to (ca-3). Among these, a cation represented by General Formula (ca-1) is more preferable, a cation represented by General Formula (ca-b01-1) is still more preferable, and a cation represented by any of General Formulae (ca-b01-11) to (ca-b01-24) is particularly preferable.
The component (d1-1) may be used alone or a combination of two or more kinds thereof may be used.
{Component (d1-2)}
In Formula (d1-2), Rd2 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R′201
Here, no fluorine atom is bonded to the carbon atom adjacent to the S atom in Rd2 (the carbon atom is not substituted with fluorine). In this manner, the anion of the component (d1-2) is an appropriately weak acid anion, thereby improving the quenching ability of the component (D).
Rd2 represents preferably a chain alkyl group which may have a substituent or an aliphatic cyclic group which may have a substituent and more preferably an aliphatic cyclic group which may have a substituent.
The chain alkyl group preferably has 1 to 10 carbon atoms and more preferably 3 to 10 carbon atoms.
The aliphatic cyclic group is more preferably a group (which may have a substituent) obtained by removing one or more hydrogen atoms from adamantane, norbornane, isobornane, tricyclodecane, tetracyclododecane, or the like; and a group obtained by removing one or more hydrogen atoms from camphor.
The hydrocarbon group as Rd2 may have a substituent, and examples of the substituent include the same groups as those provided as examples for the substituent that the hydrocarbon group (such as an aromatic hydrocarbon group, an aliphatic cyclic group, or a chain alkyl group) as Rd1 in Formula (d1-1) may have.
Specific preferred examples of the anion moiety in the component (d1-2) are described below.
In Formula (d1-2), Mm+ represents an m-valent organic cation and has the same definition as that for Mm+ in Formula (d1-1).
The component (d1-2) may be used alone or a combination of two or more kinds thereof may be used.
{Component (d1-3)}
In Formula (d1-3), Rd3 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R′201. Among these, a cyclic group having a fluorine atom, a chain alkyl group, or a chain alkenyl group is preferable. Among these, a fluorinated alkyl group is preferable, and the same groups as those provided as examples for the fluorinated alkyl group represented by Rd1 are more preferable.
In Formula (d1-3), Rd4 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent, and examples thereof include the same groups as those provided as examples for R′201
Among these, an alkyl group which may have a substituent, an alkoxy group which may have a substituent, an alkenyl group which may have a substituent, or a cyclic group which may have a substituent is preferable.
It is preferable that the alkyl group as Rd4 is a linear or branched alkyl group having 1 to 5 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, an isopentyl group, and a neopentyl group. Some hydrogen atoms in the alkyl group as Rd4 may be substituted with a hydroxyl group, a cyano group, or the like.
It is preferable that the alkoxy group as Rd4 is an alkoxy group having 1 to 5 carbon atoms, and specific examples of the alkoxy group having 1 to 5 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, an iso-propoxy group, an n-butoxy group, and a tert-butoxy group. Among these, a methoxy group and an ethoxy group are preferable.
Examples of the alkenyl group as Rd4 include the same groups as those provided as examples for the alkenyl group as R′201. Among these, a vinyl group, a propenyl group (an allyl group), a 1-methylpropenyl group, and a 2-methylpropenyl group are preferable. These groups may have an alkyl group having 1 to 5 carbon atoms or a halogenated alkyl group having 1 to 5 carbon atoms as a substituent.
Examples of the cyclic group as Rd4 include the same groups as those provided as examples for the cyclic group as R′201. Among these, an alicyclic group in which one or more hydrogen atoms have been removed from a cycloalkane such as cyclopentane, cyclohexane, adamantane, norbornane, isobornane, tricyclodecane or tetracyclododecane or an aromatic group such as a phenyl group or a naphthyl group is preferable. In a case where Rd4 represents an alicyclic group, the resist composition is satisfactorily dissolved in an organic solvent so that the lithography characteristics are enhanced. Further, in a case where Rd4 represents an aromatic group, the resist composition has excellent light absorption efficiency in lithography using EUV or the like as an exposure light source, and thus the sensitivity and lithography characteristics are enhanced.
In Formula (d1-3), Yd1 represents a single bond or a divalent linking group. The divalent linking group as Yd1 is not particularly limited, and examples thereof include a divalent hydrocarbon group (an aliphatic hydrocarbon group or an aromatic hydrocarbon group) which may have a substituent and a divalent linking group having a heteroatom. Examples of the divalent linking groups are the same as those provided as examples for the divalent hydrocarbon group which may have a substituent and the divalent linking group having a heteroatom described in the section of the divalent linking group as Ya21 in Formula (a2-1).
It is preferable that Yd1 represents a carbonyl group, an ester bond, an amide bond, an alkylene group, or a combination thereof. As the alkylene group, a linear or branched alkylene group is more preferable, and a methylene group or an ethylene group is still more preferable.
Specific preferred examples of the anion moiety in the component (d1-3) are described below.
In Formula (d1-3), Mm+ represents an m-valent organic cation and has the same definition as that for Mm+ in Formula (d1-1).
The component (d1-3) may be used alone or a combination of two or more kinds thereof may be used.
As the component (D1), only one of the above-described components (d1-1) to (d1-3) or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (D1), the amount of the component (D1) in the resist composition is preferably in a range of 0.5 to 15 parts by mass, more preferably in a range of 1 to 10 parts by mass, and still more preferably in a range of 2 to 8 parts by mass with respect to 100 parts by mass of the component (A1). In a case where the amount of the component (D1) is greater than or equal to the lower limits of the above-described preferable ranges, satisfactory lithography characteristics and a satisfactory resist pattern shape are likely to be obtained. Meanwhile, in a case where the content is less than or equal to the upper limits of the above-described ranges, the sensitivity can be satisfactorily maintained and the throughput is also excellent.
In the resist composition according to the present embodiment, it is preferable that the component (D1) contains the component (d1-1).
The amount of the component (d1-1) in the total component (D) contained in the resist composition according to the present embodiment is preferably 50% by mass or greater, preferably 70% by mass or greater, and still more preferably 90% by mass or greater, and the component (D) may consist of only the component (d1-1).
Method of producing component (D1):
The methods of producing the component (d1-1) and the component (d1-2) are not particularly limited, and these components can be produced by known methods.
Further, the method of producing the component (d1-3) is not particularly limited, and the component is produced by the same method as disclosed in United States Patent Application, Publication No. 2012-0149916.
The component (D) may contain a nitrogen-containing organic compound component (hereinafter, referred to as “component (D2)”) that does not correspond to the component (D1) described above.
The component (D2) is not particularly limited as long as the component acts as an acid diffusion control agent and does not correspond to the component (D1), and an optional component may be selected from known components and then used. Among the examples, an aliphatic amine is preferable, and particularly a secondary aliphatic amine and a tertiary aliphatic amine are more preferable.
The aliphatic amine is an amine containing one or more aliphatic groups, and the number of carbon atoms in the aliphatic group is preferably in a range of 1 to 12.
Examples of the aliphatic amine include amines in which at least one hydrogen atom of ammonia NH3 has been substituted with an alkyl group or hydroxyalkyl group having 12 or less carbon atoms (alkylamines or alkylalcoholamines), and cyclic amines. Specific examples of the alkylamines and the alkylalcoholamines include monoalkylamines such as n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, and n-decylamine; dialkylamines such as diethylamine, di-n-propylamine, di-n-heptylamine, di-n-octylamine, and dicyclohexylamine; trialkylamines such as trimethylamine, triethylamine, tri-n-propylamine, tri-n-butylamine, tri-n-pentylamine, tri-n-hexylamine, tri-n-heptylamine, tri-n-octylamine, tri-n-nonylamine, tri-n-decylamine, and tri-n-dodecylamine; and alkylalcoholamines such as diethanolamine, triethanolamine, diisopropanolamine, triisopropanolamine, di-n-octanolamine, and tri-n-octanolamine. Among these, a trialkylamine having 6 to 30 carbon atoms is still more preferable, and tri-n-pentylamine or tri-n-octylamine is particularly preferable.
Examples of the cyclic amine include a heterocyclic compound having a nitrogen atom as a heteroatom. The heterocyclic compound may be a monocyclic compound (aliphatic monocyclic amine) or a polycyclic compound (aliphatic polycyclic amine).
Specific examples of the aliphatic monocyclic amine include piperidine and piperazine.
The aliphatic polycyclic amine preferably has 6 to 10 carbon atoms, and specific examples thereof include 1, 5-diazabicyclo[4.3.0]-5-nonene, 1,8-diazabicyclo[5.4.0]-7-undecene, hexamethylenetetramine, and 1,4-diazabicyclo[2.2.2]octane.
Examples of other aliphatic amines include tris(2-methoxymethoxyethyl)amine, tris{2-(2-methoxyethoxy)ethyl}amine, tris{2-(2-methoxyethoxymethoxy)ethyl}amine, tris{2-(1-methoxyethoxy)ethyl}amine, tris{2-(1-ethoxyethoxy)ethyl}amine, tris{2-(1-ethoxypropoxy)ethyl}amine, tris[2-{2-(2-hydroxyethoxy) ethoxy}ethyl]amine, and triethanolamine triacetate. Among these, triethanolamine triacetate is preferable.
As the component (D2), an aromatic amine may be used.
Examples of aromatic amines include 4-dimethylaminopyridine, pyrrole, indole, pyrazole, imidazole, and derivatives thereof, tribenzylamine, 2,6-diisopropylaniline, N-tert-butoxycarbonylpyrrolidine, and 2,6-di-tert-butylpyridine.
Among the examples, the component (D2) is preferably an alkylamine and more preferably a trialkylamine having 6 to 30 carbon atoms.
The component (D2) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (D2), the amount of the component (D2) in the resist composition is preferably in a range of 0.01 to 5 parts by mass, more preferably in a range of 0.1 to 5 parts by mass, and still more preferably in a range of 0.5 to 5 parts by mass with respect to 100 parts by mass of the component (A1).
In a case where the amount of the component (D2) is greater than or equal to the lower limits of the above-described preferable ranges, satisfactory lithography characteristics and a satisfactory resist pattern shape are likely to be obtained. Meanwhile, in a case where the content is less than or equal to the upper limits of the above-described ranges, the sensitivity can be satisfactorily maintained and the throughput is also excellent.
<<At Least One Compound (E) Selected from Group Consisting of Organic Carboxylic Acids, Phosphorus Oxo Acids, and Derivatives Thereof>>
For the purpose of preventing any deterioration in sensitivity and improving the resist pattern shape and the post-exposure temporal stability, the resist composition according to the present embodiment may contain, as an optional component, at least one compound (E) (hereinafter referred to as “component (E)”) selected from the group consisting of an organic carboxylic acid, and a phosphorus oxo acid and a derivative thereof.
Specific examples of the organic carboxylic acid include acetic acid, malonic acid, citric acid, malic acid, succinic acid, benzoic acid, and salicylic acid. Among these, salicylic acid is preferable.
Examples of the phosphorus oxo acid include phosphoric acid, phosphonic acid, and phosphinic acid. Among these, phosphonic acid is particularly preferable.
In the resist composition of the present embodiment, the component (E) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (E), the amount of the component (E) is preferably in a range of 0.01 to 5 parts by mass and more preferably in a range of 0.05 to 3 parts by mass with respect to 100 parts by mass of the component (A1). In a case where the amount thereof is in the above-described ranges, the lithography characteristics are further improved.
The resist composition according to the present embodiment may contain a fluorine additive component (hereinafter, referred to as “component (F)”) as a hydrophobic resin. The component (F) is used to impart water repellency to the resist film, where it is used as a resin different from the component (A) to improve lithography characteristics.
As the component (F), for example, the fluorine-containing polymer compounds described in Japanese Unexamined Patent Application, First Publication Nos. 2010-002870, 2010-032994, 2010-277043, 2011-13569, and 2011-128226 can be used. Specific examples of the component (F) include a polymer having a constitutional unit (f1) represented by General Formula (f1-1). As the polymer, a polymer (homopolymer) formed of only the constitutional unit (f1) represented by Formula (f1-1); a copolymer of the constitutional unit (f1) and the constitutional unit (a1); or a copolymer of the constitutional unit (f1), a constitutional unit derived from acrylic acid or methacrylic acid, and the constitutional unit (a1) is preferable, and a copolymer of the constitutional unit (f1) and the constitutional unit (a1) is more preferable. Here, as the constitutional unit (a1) copolymerized with the constitutional unit (f1), a constitutional unit derived from 1-ethyl-1-cyclooctyl (meth)acrylate or a constitutional unit derived from 1-methyl-1-adamantyl (meth)acrylate is preferable, and a constitutional unit derived from 1-ethyl-1-cyclooctyl (meth)acrylate is more preferable.
[In the formula, R has the same definition as described above, Rf102 and Rf103 each independently represent a hydrogen atom, a halogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, and Rf102 and Rf103 may be the same as or different from each other. nf1 represents an integer of 0 to 5, and Rf101 represents an organic group having a fluorine atom.]
In Formula (f1-1), R bonded to the carbon atom at the α-position has the same definition as described above. It is preferable that R represents a hydrogen atom or a methyl group.
In Formula (f1-1), a fluorine atom is preferable as the halogen atom as Rf102 and Rf103. Examples of the alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include the same groups as those provided as examples for the alkyl group having 1 to 5 carbon atoms as R. Among the examples, a methyl group or an ethyl group is preferable. Specific examples of the halogenated alkyl group having 1 to 5 carbon atoms as Rf102 and Rf103 include groups in which some or all hydrogen atoms of an alkyl group having 1 to 5 carbon atoms have been substituted with halogen atoms. Among these, a fluorine atom is preferable as the halogen atom. Among these, Rf102 and Rf103 represent preferably a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 5 carbon atoms, more preferably a hydrogen atom, a fluorine atom, a methyl group, or an ethyl group, and still more preferably a hydrogen atom.
In Formula (f1-1), nf1 represents an integer of 0 to 5, preferably an integer of 0 to 3, and more preferably 1 or 2.
In Formula (f1-1), Rf101 represents an organic group having a fluorine atom and preferably a hydrocarbon group having a fluorine atom.
The hydrocarbon group having a fluorine atom may be linear, branched, or cyclic, and the number of carbon atoms thereof is preferably in a range of 1 to 20, more preferably in a range of 1 to 15, and particularly preferably in a range of 1 to 10.
In the hydrocarbon group having a fluorine atom, preferably 25% or more of the hydrogen atoms in the hydrocarbon group are fluorinated, more preferably 50% or more thereof are fluorinated, and particularly preferably 60% or more thereof are fluorinated from the viewpoint of increasing the hydrophobicity of the resist film during immersion light exposure.
Among the examples, Rf101 represents more preferably a fluorinated hydrocarbon group having 1 to 6 carbon atoms and particularly preferably a trifluoromethyl group, —CH2—CF3, —CH2—CF2—CF3, —CH(CF3)2, —CH2—CH2—CF3, or —CH2—CH2—CF2—CF2—CF2—CF3.
The weight-average molecular weight (Mw) (in terms of polystyrene according to gel permeation chromatography) of the component (F) is preferably in a range of 1000 to 50000, more preferably in a range of 5000 to 40000, and most preferably in a range of 10000 to 30000. In a case where the weight-average molecular weight thereof is less than or equal to the upper limits of the above-described ranges, the component (F) exhibits a sufficient solubility in a solvent for a resist to be used as a resist. Meanwhile, in a case where the weight-average molecular weight thereof is greater than or equal to the lower limits of the above-described ranges, water repellency of the resist film is improved.
Further, the dispersity (Mw/Mn) of the component (F) is preferably in a range of 1.0 to 5.0, more preferably in a range of 1.0 to 3.0, and most preferably in a range of 1.0 to 2.5.
In the resist composition according to the present embodiment, the component (F) may be used alone or a combination of two or more kinds thereof may be used.
In a case where the resist composition contains the component (F), the amount of the component (F) is preferably in a range of 0.5 to 10 parts by mass and more preferably in a range of 1 to 10 parts by mass with respect to 100 parts by mass of the component (A1).
The resist composition of the present embodiment can be produced by dissolving the resist materials in an organic solvent component (hereinafter, referred to as “component(S)”).
The component(S) may be any component which can dissolve each component to be used to obtain a uniform solution, and an optional component can be appropriately selected from those which have been known as solvents of a chemically amplified resist composition and then used.
Examples of the component(S) include lactones such as γ-butyrolactone; ketones such as acetone, methyl ethyl ketone, cyclohexanone, methyl-n-pentyl ketone, methyl isopentyl ketone, and 2-heptanone; polyhydric alcohols such as ethylene glycol, diethylene glycol, propylene glycol, and dipropylene glycol; compounds having an ester bond, such as ethylene glycol monoacetate, diethylene glycol monoacetate, propylene glycol monoacetate, and dipropylene glycol monoacetate; polyhydric alcohol derivatives of compounds having an ether bond such as monoalkyl ether or monophenyl ether, such as monomethylether, monoethylether, monopropylether, or monobutylether of polyhydric alcohols or compounds having an ester bond [among these, propylene glycol monomethyl ether acetate (PGMEA) and propylene glycol monomethyl ether (PGME) are preferable]; cyclic ethers such as dioxane; esters such as methyl lactate, ethyl lactate (EL), methyl acetate, ethyl acetate, butyl acetate, methyl pyruvate, ethyl pyruvate, methyl methoxypropionate, and ethyl ethoxypropionate; aromatic organic solvents such as anisole, ethylbenzylether, cresylmethylether, diphenylether, dibenzylether, phenetole, butylphenylether, ethylbenzene, diethylbenzene, pentylbenzene, isopropylbenzene, toluene, xylene, cymene, and mesitylene; and dimethylsulfoxide (DMSO).
In the resist composition of the present embodiment, the component(S) may be used alone or in the form of a mixed solvent of two or more kinds thereof. Among these, PGMEA, PGME, γ-butyrolactone, EL, or cyclohexanone is preferable.
Further, a mixed solvent obtained by mixing PGMEA with a polar solvent is also preferable as the component(S). The blending ratio (mass ratio) of the mixed solvent can be appropriately determined in consideration of the compatibility between PGMEA and the polar solvent and the like, but is preferably in the range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2.
More specifically, in a case where EL or cyclohexanone is blended as the polar solvent, the mass ratio of PGMEA to EL or cyclohexanone is preferably in a range of 1:9 to 9:1 and more preferably in a range of 2:8 to 8:2. Further, in a case where PGME is blended as the polar solvent, the mass ratio of PGMEA to PGME is preferably in a range of 1:9 to 9:1, more preferably in a range of 2:8 to 8:2, and still more preferably in a range of 3:7 to 7:3. Further, a mixed solvent of PGMEA, PGME, and cyclohexanone is also preferable.
Further, a mixed solvent of γ-butyrolactone and at least one selected from PGMEA and EL is also preferable as the component(S). In this case, as the mixing ratio, the mass ratio between the former and the latter is preferably in a range of 70:30 to 95:5.
The amount of the component(S) to be used is not particularly limited and is appropriately set to have a concentration which enables coating a substrate or the like depending on the thickness of the coated film. The component(S) is typically used in an amount such that the solid content concentration of the resist composition is set to be in a range of 0.1% to 20% by mass and preferably in a range of 0.2% to 15% by mass.
After the resist material is dissolved in the component(S), impurities and the like may be removed from the resist composition of the present embodiment using a porous polyimide film, a porous polyamideimide film, or the like. For example, the resist composition may be filtered using a filter formed of a porous polyimide film, a filter formed of a porous polyamideimide film, a filter formed of a porous polyimide film and a porous polyamideimide film, or the like. Examples of the porous polyimide film and the porous polyamideimide film include those described in Japanese Unexamined Patent Application, First Publication No. 2016-155121.
The resist composition according to the present embodiment described above contains the resin component (A1) having the constitutional unit (a01) and the constitutional unit (a02).
The constitutional unit (a01) has both an acid dissociable group and a phenolic hydroxyl group. Therefore, the amount of the phenolic hydroxyl group can be increased without reducing the amount of the acid dissociable group in the resin component (A1). The constitutional unit (a02) contains a lactone-containing cyclic group, a —SO2— containing cyclic group, or a carbonate-containing cyclic group. Therefore, the affinity for an alkali developing solution can be increased.
It is assumed that the resist composition according to the present embodiment, which contains the resin component (A1) having the constitutional unit (a01) and the constitutional unit (a02), has high sensitivity and can form a resist pattern with satisfactory resolution and roughness characteristics due to the synergistic effect of a combination of the constitutional unit (a01) and the constitutional unit (a02).
A method for forming a resist pattern according to the second aspect according to the present invention is a method including a step of forming a resist film on a support using the resist composition according to the first aspect of the present invention described above, a step of exposing the resist film to light, and a step of developing the resist film exposed to light to form a resist pattern.
According to the embodiment of the method for forming a resist pattern, a method for forming a resist pattern by performing processes as described below is an exemplary example.
First, a support is coated with the resist composition of the present embodiment using a spinner or the like, and a bake (post applied bake (PAB)) treatment is performed under a temperature condition of 80° C. to 150° C. for 40 to 120 seconds and preferably 60 to 90 seconds to form a resist film.
Following the selective light exposure carried out on the resist film by, for example, light exposure through a mask (mask pattern) having a predetermined pattern formed on the mask by using a light exposure apparatus such as an electron beam lithography apparatus or an ArF exposure apparatus, or direct irradiation of the resist film for drawing with an electron beam without using a mask pattern, a bake treatment (post exposure bake (PEB)) is carried out, for example, under a temperature condition in a range of 80° C. to 150° C. for 40 to 120 seconds and preferably 60 to 90 seconds.
Next, the resist film is subjected to a developing treatment. The developing treatment is conducted using an alkali developing solution in a case of an alkali developing process and using a developing solution containing an organic solvent (organic developing solution) in a case of a solvent developing process.
After the developing treatment, it is preferable to conduct a rinse treatment. As the rinse treatment, water rinsing using pure water is preferable in a case of the alkali developing process, and water rinsing using a rinse solution containing an organic solvent is preferable in a case of the solvent developing process.
In a case of the solvent developing process, after the developing treatment or the rinse treatment, the developing solution or the rinse solution attached onto the pattern may be removed by a treatment using a supercritical fluid.
After the developing treatment or the rinse treatment, drying is conducted. As desired, a bake treatment (post bake) may be conducted after the developing treatment.
In this manner, a resist pattern can be formed.
The support is not particularly limited and a known support of the related art can be used, and examples thereof include a substrate for an electronic component and a substrate on which a predetermined wiring pattern has been formed. Specific examples thereof include a metal substrate such as a silicon wafer, copper, chromium, iron, or aluminum; and a glass substrate. As the materials of the wiring pattern, copper, aluminum, nickel, or gold can be used.
The wavelength used for light exposure is not particularly limited and the exposure can be conducted using radiation such as an ArF excimer laser, a KrF excimer laser, an F2 excimer laser, extreme ultraviolet rays (EUV), vacuum ultraviolet rays (VUV), electron beams (EB), X-rays, and soft X-rays. The resist composition is useful for a KrF excimer laser, an ArF excimer laser, EB, and EUV, more useful for an ArF excimer laser, EB, and EUV, and particularly useful for EB and EUV. That is, the method for forming a resist pattern according to the present embodiment is a method particularly useful in a case where the step of exposing the resist film to light includes a process of exposing the resist film to extreme ultraviolet (EUV) rays or electron beams (EB).
The method for exposing the resist film to light can be a general light exposure (dry exposure) conducted in air or an inert gas such as nitrogen, or liquid immersion lithography.
The liquid immersion light exposure is a light exposure method in which the region between the resist film and the lens at the lowermost position of the light exposure apparatus is filled with a solvent (liquid immersion medium) in advance that has a larger refractive index than the refractive index of air, and the light exposure (immersion light exposure) is conducted in this state.
As the liquid immersion medium, a solvent having a refractive index greater than the refractive index of air but smaller than the refractive index of the resist film to be exposed to light is preferable, and examples thereof include water, a fluorine-based inert liquid, a silicon-based solvent, and a hydrocarbon-based solvent.
As the liquid immersion medium, water is preferably used.
As the alkali developing solution used for the developing treatment in the alkali developing process, a 0.1 to 10 mass % tetramethylammonium hydroxide (TMAH) aqueous solution is an exemplary example.
The organic solvent contained in the organic developing solution used for the developing treatment in the solvent developing process may be any solvent that is capable of dissolving the component (A) (the component (A) before light exposure) and can be appropriately selected from known organic solvents. Specific examples thereof include polar solvents such as a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, a nitrile-based solvent, an amide-based solvent, and an ether-based solvent, and a hydrocarbon-based solvent.
Examples of the ester-based solvent include methyl acetate, butyl acetate, ethyl acetate, isopropyl acetate, pentyl acetate, isopentyl acetate, amyl acetate, propylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, ethyl-3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, methyl formate, ethyl formate, butyl formate, propyl formate, ethyl lactate, butyl lactate, propyl lactate, butyl butanoate, methyl 2-hydroxyisobutyrate, isoamyl acetate, isobutyl isobutyrate, and butyl propionate.
Examples of the nitrile-based solvent include acetonitrile, propionitrile, valeronitrile, and butyronitrile.
Known additives can be blended into the organic developing solution as necessary. Examples of the additive include a surfactant. The surfactant is not particularly limited, and for example, an ionic or non-ionic fluorine-based and/or silicon-based surfactant can be used. As the surfactant, a non-ionic surfactant is preferable, and a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant is more preferable.
In a case where a surfactant is blended into the solution, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the organic developing solution.
The developing treatment can be performed according to a known developing method, and examples thereof include a method of immersing a support in a developing solution for a certain time (a dip method), a method of raising a developing solution on the surface of a support using the surface tension and maintaining the state for a certain time (a puddle method), a method of spraying a developing solution to the surface of a support (spray method), and a method of continuously ejecting a developing solution onto a support rotating at a certain rate while scanning a developing solution ejection nozzle at a certain rate (dynamic dispense method).
As the organic solvent contained in the rinse solution used for the rinse treatment after the developing treatment in the solvent developing process, a solvent that is unlikely to dissolve a resist pattern can be appropriately selected from the organic solvents described as the organic solvent used in the organic developing solution and then used. Typically, at least one solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, an amide-based solvent, and an ether-based solvent is used. Among these, at least one solvent selected from a hydrocarbon-based solvent, a ketone-based solvent, an ester-based solvent, an alcohol-based solvent, and an amide-based solvent is preferable, at least one solvent selected from an alcohol-based solvent and an ester-based solvent is more preferable, and an alcohol-based solvent is particularly preferable.
As the alcohol-based solvent used in the rinse solution, a monohydric alcohol having 6 to 8 carbon atoms is preferable, and the monohydric alcohol may be linear, branched, or cyclic. Specific examples thereof include 1-hexanol, 1-heptanol, 1-octanol, 2-hexanol, 2-heptanol, 2-octanol, 3-hexanol, 3-heptanol, 3-octanol, 4-octanol, and benzyl alcohol. Among these, 1-hexanol, 2-heptanol, and 2-hexanol are preferable, and 1-hexanol and 2-hexanol are more preferable.
These organic solvents may be used alone or a combination of two or more kinds thereof may be used. Further, an organic solvent other than the above-described solvents and water may be mixed and used. However, in consideration of the development characteristics, the amount of water to be blended into the rinse solution is preferably 30% by mass or less, more preferably 10% by mass or less, still more preferably 5% by mass or less, and particularly preferably 3% by mass or less with respect to the total amount of the rinse solution.
A known additive can be blended into the rinse solution as necessary.
Examples of the additive include a surfactant. As the surfactant, the same surfactants as those described above are exemplary examples. Among these, a non-ionic surfactant is preferable, and a non-ionic fluorine-based surfactant or a non-ionic silicon-based surfactant is more preferable.
In a case where a surfactant is blended into the solution, the amount of the surfactant to be blended is typically in a range of 0.001% to 5% by mass, preferably in a range of 0.005% to 2% by mass, and more preferably in a range of 0.01% to 0.5% by mass with respect to the total amount of the rinse solution.
The rinse treatment carried out using a rinse solution (washing treatment) can be performed according to a known rinse method. Examples of the method of performing the rinse treatment include a method of continuously ejecting a rinse solution onto a support rotating at a certain rate (rotary coating method), a method of immersing a support in a rinse solution for a certain time (dip method), and a method of spraying a rinse solution to the surface of a support (spray method).
According to the method for forming a resist pattern of the present embodiment described above, since the above-described resist composition is used, a resist pattern with high sensitivity and satisfactory resolution and roughness characteristics can be formed.
It is preferable that various materials that are used in the resist composition according to the above-described embodiment and the pattern forming method according to the above-described embodiment (for example, a resist solvent, a developing solution, a rinse solution, a composition for forming an antireflection film, and a composition for forming a top coat) do not contain impurities such as a metal, a metal salt containing halogen, an acid, an alkali, and a component having a sulfur atom or phosphorus atom. Here, examples of the impurities containing metal atoms include Na, K, Ca, Fe, Cu, Mn, Mg, Al, Cr, Ni, Zn, Ag, Sn, Pb, Li, and salts thereof. The amount of the impurities contained in these materials is preferably 200 ppb or less, more preferably 1 ppb or less, still more preferably 100 parts per trillion (ppt) or less, particularly preferably 10 ppt or less, and most preferably substantially zero (less than or equal to the detection limit of the measuring device).
Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited to these examples.
Each of the components listed in Tables 1 to 7 was mixed and dissolved to prepare a resist composition of each example.
In Tables 1 to 7, each abbreviation has the following meaning. The numerical values in the brackets are blending amounts (parts by mass).
The meaning of the abbreviation of the component (A), the weight-average molecular weight (Mw) in terms of standard polystyrene determined by GPC measurement, the polydispersity (Mw/Mn), and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) determined 13C-NMR are shown below.
The weight-average molecular weight (Mw) of the polymer compound (A1-1) was 6,500, the polydispersity (Mw/Mn) thereof was 1.56, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-2) was 6,400, the polydispersity (Mw/Mn) thereof was 1.57, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-3) was 6,900, the polydispersity (Mw/Mn) thereof was 1.66, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-4) was 6,700, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-5) was 7000, the polydispersity (Mw/Mn) thereof was 1.60, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-6) was 6,800, the polydispersity (Mw/Mn) thereof was 1.67, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-7) was 6,700, the polydispersity (Mw/Mn) thereof was 1.64, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-8) was 6,600, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer 10 compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-9) was 6,400, the polydispersity (Mw/Mn) thereof was 1.62, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-10) was 6,700, the polydispersity (Mw/Mn) thereof was 1.65, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-11) was 6,500, the polydispersity (Mw/Mn) thereof was 1.64, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-12) was 6,800, the polydispersity (Mw/Mn) thereof was 1.66, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-13) was 6,900, the polydispersity (Mw/Mn) thereof was 1.61, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-14) was 6,500, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer 10 compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-15) was 6,800, the polydispersity (Mw/Mn) thereof was 1.67, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-16) was 6,500, the polydispersity (Mw/Mn) thereof was 1.58, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-17) was 6,900, the polydispersity (Mw/Mn) thereof was 1.60, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-18) was 6,800, the polydispersity (Mw/Mn) thereof was 1.62, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-19) was 7200, the polydispersity (Mw/Mn) thereof was 1.68, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-20) was 6,900, the polydispersity (Mw/Mn) thereof was 1.69, and the copolymer 10 compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-21) was 6,600, the polydispersity (Mw/Mn) thereof was 1.59, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-22) was 6,400, the polydispersity (Mw/Mn) thereof was 1.60, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-23) was 6,800, the polydispersity (Mw/Mn) thereof was 1.62, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-24) was 6,800, the polydispersity (Mw/Mn) thereof was 1.58, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-25) was 6,700, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A1-26) was 6,800, the polydispersity (Mw/Mn) thereof was 1.61, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m=50/50.
The weight-average molecular weight (Mw) of the polymer compound (A1-27) was 6,900, the polydispersity (Mw/Mn) thereof was 1.67, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n/o=20/30/30/20.
The weight-average molecular weight (Mw) of the polymer compound (A2-1) was 6,400, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m=50/50.
The weight-average molecular weight (Mw) of the polymer compound (A2-2) was 6,500, the polydispersity (Mw/Mn) thereof was 1.67, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m=50/50.
The weight-average molecular weight (Mw) of the polymer compound (A2-3) was 6,300, the polydispersity (Mw/Mn) thereof was 1.62, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A2-4) was 6,700, the polydispersity (Mw/Mn) thereof was 1.63, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A2-5) was 6,400, the polydispersity (Mw/Mn) thereof was 1.61, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
The weight-average molecular weight (Mw) of the polymer compound (A2-6) was 6,000, the polydispersity (Mw/Mn) thereof was 1.60, and the copolymer compositional ratio (ratio (molar ratio) between constitutional units in the structural formula) was l/m/n=20/50/30.
An 8-inch silicon substrate to which a hexamethyldisilazane (HMDS) had been applied was coated with the resist composition of each example using a spinner, and a prebake (PAB) treatment was performed thereon on a hot plate at a temperature of 110° C. for 60 seconds so that the composition was dried, thereby forming a resist film having a film thickness of 30 nm.
Next, drawing (light exposure) was performed on the resist film by using an electron beam lithography apparatus JEOL-JBX-9300FS (manufactured by JEOL Ltd.), with the target size being set to a 1:1 line-and-space pattern (hereinafter, referred to as an “LS pattern”) of a line width of 50 nm, at an accelerating voltage of 100 kV, and the post exposure bake (PEB) treatment was performed at 90° C. for 60 seconds.
Subsequently, alkali development was performed at 23° C. for 60 seconds using a 2.38% by mass tetramethylammonium hydroxide (TMAH) aqueous solution “NMD-3” (trade name, manufactured by TOKYO OHKA KOGYO CO., LTD.), and rinse treatment was performed for 15 seconds using pure water.
As a result, a 1:1 LS pattern having a line width of 50 nm was formed.
The optimum exposure amount Eop (μC/cm2) at which the LS pattern having the target size was formed as determined according to <resist pattern formation> described above.
The results are listed in Tables 8 to 10.
Using the LS pattern formed in the section of “formation of resist pattern”, the 36 which is the scale that indicates the LWR was acquired. The results are listed in Tables 8 to 10.
Here, “3” denotes the triple value (36) (unit: nm) of the standard deviation (o) determined from measurement results obtained by measuring 400 line positions in the longitudinal direction of the line with a scanning electron microscope (trade name: S-9380, manufactured by Hitachi High-Technologies Corporation, acceleration voltage of 800 V).
In a case where the value of the 36 is small, this indicates that the roughness of a line side wall is small and an LS pattern with a uniform width is obtained.
The limit resolution at the target size, specifically, the minimum dimension of the pattern resolved without being collapsed in a case of formation of an LS pattern by gradually increasing the exposure amount from the optimum exposure amount Eop was determined using a scanning electron microscope S-9380 (manufactured by Hitachi High-Tech Corporation).
The results are listed in Tables 8 to 10.
As listed in Tables 8 to 10, it was confirmed that the resist compositions of the examples were all satisfactory in sensitivity, roughness, and limit resolution compared to the resist compositions of the comparative examples.
While preferred embodiments of the present invention have been described and illustrated above, it should be understood that these are exemplary examples of the present invention and are not to be considered as limiting. Additions, omissions, substitutions, and other modifications can be made without departing from the scope of the present invention. Accordingly, the present invention is not to be considered as being limited by the foregoing description and is only limited by the scope of the appended claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2022-053488 | Mar 2022 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2023/011293 | 3/22/2023 | WO |
