Keyvan Khajehnouri

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Mechanism for bow reduction and critical dimension control in etchi...
- Patent number 6,217,786
- Issue date Apr 17, 2001
- Lam Research Corporation
- Graham Hills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching silicon dioxide using fluorocarbon gas chemistry
- Patent number 6,117,786
- Issue date Sep 12, 2000
- Lam Research Corporation
- Keyvan Khajehnouri
- H01 - BASIC ELECTRIC ELEMENTS