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5013398 | Long et al. | May 1991 | |
5013400 | Kurasaki et al. | May 1991 | |
5021121 | Groechel et al. | Jun 1991 | |
5022958 | Favreau et al. | Jun 1991 | |
5254213 | Tamaki | Oct 1993 | |
5269879 | Rhoades et al. | Dec 1993 | |
5431778 | Dahm et al. | Jul 1995 | |
5462896 | Komura et al. | Oct 1995 | |
5529657 | Ishii | Jun 1996 | |
5595627 | Inazawa et al. | Jan 1997 | |
5611888 | Bosch et al. | Mar 1997 | |
5736457 | Zhao | Apr 1998 | |
5780338 | Jeng et al. | Jul 1998 |
Number | Date | Country |
---|---|---|
0 805 485 | Nov 1997 | EPX |
Entry |
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Norstrom, H., et al., "RIE of SiO/sub 2/ in doped and undoped fluorocarbon plasmas", Database accession No. 2033212, vol. 32, No. 12, Dec. 1982, pp. 737-745, XP002110457. |