Ki Hwan Yoon

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering target having increased life and sputtering uniformity
- Patent number 8,968,536
- Issue date Mar 3, 2015
- Applied Materials, Inc.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition methods for barrier and tungsten materials
- Patent number 7,611,990
- Issue date Nov 3, 2009
- Applied Materials, Inc.
- Ki Hwan Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition methods for barrier and tungsten materials
- Patent number 7,416,979
- Issue date Aug 26, 2008
- Applied Materials, Inc.
- Ki Hwan Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier formation using novel sputter deposition method with PVD, C...
- Patent number 6,740,585
- Issue date May 25, 2004
- Applied Materials, Inc.
- Ki Hwan Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY
- Publication number 20080308416
- Publication date Dec 18, 2008
- APPLIED MATERIALS, INC.
- Adolph Miller Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHODS FOR BARRIER AND TUNGSTEN MATERIALS
- Publication number 20080268636
- Publication date Oct 30, 2008
- Ki Hwan Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHODS FOR BARRIER AND TUNGSTEN MATERIALS
- Publication number 20060276020
- Publication date Dec 7, 2006
- Ki Hwan Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Barrier formation using novel sputter-deposition method
- Publication number 20040211665
- Publication date Oct 28, 2004
- Ki Hwan Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
An Apparatus For Annealing Substrates In Physical Vapor Deposition...
- Publication number 20030029715
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Barrier formation using novel sputter-deposition method
- Publication number 20030022487
- Publication date Jan 30, 2003
- APPLIED MATERIALS, INC.
- Ki Hwan Yoon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Collimated sputtering of cobalt
- Publication number 20030015421
- Publication date Jan 23, 2003
- APPLIED MATERIALS, INC.
- Yonghwa Chris Cha
- H01 - BASIC ELECTRIC ELEMENTS

Ki Hwan Yoon

Person

Patents Grantslast 30 patents

Sputtering target having increased life and sputtering uniformity

Deposition methods for barrier and tungsten materials

Deposition methods for barrier and tungsten materials

Barrier formation using novel sputter deposition method with PVD, C...

Patents Applicationslast 30 patents

SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY

DEPOSITION METHODS FOR BARRIER AND TUNGSTEN MATERIALS

DEPOSITION METHODS FOR BARRIER AND TUNGSTEN MATERIALS

Barrier formation using novel sputter-deposition method

An Apparatus For Annealing Substrates In Physical Vapor Deposition...

Barrier formation using novel sputter-deposition method

Collimated sputtering of cobalt