Kimiko Mashimo

Person

Hachioji-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method for removing oxide film
- Patent number 10,083,830
- Issue date Sep 25, 2018
- Canon Anelva Corporation
- Takuya Seino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 9,593,412
- Issue date Mar 14, 2017
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of manufacturing electronic device
- Patent number 9,322,092
- Issue date Apr 26, 2016
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and electronic device manufacturing method
- Patent number 8,663,437
- Issue date Mar 4, 2014
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING METHOD FOR REMOVING OXIDE FILM
- Publication number 20160343565
- Publication date Nov 24, 2016
- Canon ANELVA Corporation
- Takuya Seino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20140054164
- Publication date Feb 27, 2014
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
- Publication number 20120325651
- Publication date Dec 27, 2012
- Canon ANELVA Corporation
- Nobuo YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVELY GROWING DOPED EPITAXIAL FILM
- Publication number 20120258582
- Publication date Oct 11, 2012
- Canon ANELVA Corporation
- Takuya SEINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20110312179
- Publication date Dec 22, 2011
- Canon ANELVA Corporation
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
- Publication number 20100326818
- Publication date Dec 30, 2010
- Canon ANELVA Corporation
- Manabu Ikemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CLEANING METHOD FOR REMOVING OXIDE FILM
- Publication number 20100255667
- Publication date Oct 7, 2010
- Canon ANELVA Corporation
- Takuya Seino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20100224482
- Publication date Sep 9, 2010
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
- Publication number 20100221895
- Publication date Sep 2, 2010
- Canon ANELVA Corporation
- Takuya Seino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20100133092
- Publication date Jun 3, 2010
- Canon ANELVA Corporation
- Kimiko Mashimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICIDE FORMING METHOD AND SYSTEM THEREOF
- Publication number 20090298288
- Publication date Dec 3, 2009
- Canon ANELVA Corporation
- Takuya Seino
- H01 - BASIC ELECTRIC ELEMENTS

Kimiko Mashimo

Person

Patents Grantslast 30 patents

Substrate cleaning method for removing oxide film

Deposition apparatus and electronic device manufacturing method

Sputtering apparatus and method of manufacturing electronic device

Deposition apparatus and electronic device manufacturing method

Patents Applicationslast 30 patents

SUBSTRATE CLEANING METHOD FOR REMOVING OXIDE FILM

DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

METHOD AND APPARATUS FOR SELECTIVELY GROWING DOPED EPITAXIAL FILM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

SUBSTRATE CLEANING METHOD FOR REMOVING OXIDE FILM

DEPOSITION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD

SPUTTERING METHOD AND SPUTTERING APPARATUS

SILICIDE FORMING METHOD AND SYSTEM THEREOF