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Kimio Hagi
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chucking system, and apparatus and method of manufact...
Patent number
6,778,377
Issue date
Aug 17, 2004
Renesas Technology Corp.
Kimio Hagi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device capable of preventing disconnection in a throu...
Patent number
6,414,395
Issue date
Jul 2, 2002
Mitsubishi Denki Kabushiki Kaisha
Yuuko Ookuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with alignment mark and manufacturing method t...
Patent number
6,304,001
Issue date
Oct 16, 2001
Mitsubishi Denki Kabushiki Kaisha
Noboru Sekiguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device whose flattening resin film component has a co...
Patent number
5,889,330
Issue date
Mar 30, 1999
Mitsubishi Denki Kabushiki Kaisha
Hiroyuki Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including a main alignment mark having periphe...
Patent number
5,859,478
Issue date
Jan 12, 1999
Mitsubishi Denki Kabushiki Kaisha
Kimio Hagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a semiconductor device
Patent number
5,728,630
Issue date
Mar 17, 1998
Mitsubishi Denki Kabushiki Kaisha
Hiroyuki Nishimura
B32 - LAYERED PRODUCTS
Information
Patent Grant
Semiconductor device having a multilayer interconnection structure
Patent number
5,604,380
Issue date
Feb 18, 1997
Mitsubishi Denki Kabushiki Kaisha
Hiroyuki Nishimura
B32 - LAYERED PRODUCTS
Information
Patent Grant
Process of passivating a semiconductor device bonding pad by immers...
Patent number
5,565,378
Issue date
Oct 15, 1996
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming an interconnection structure
Patent number
5,480,836
Issue date
Jan 2, 1996
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having a titanium and a titanium compound mult...
Patent number
5,341,026
Issue date
Aug 23, 1994
Mitsubishi Denki Kabushiki Kaisha
Shigeru Harada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
5,306,947
Issue date
Apr 26, 1994
Mitsubishi Denki Kabushiki Kaisha
Hiroshi Adachi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Electrostatic chucking system, and apparatus and method of manufact...
Publication number
20010055189
Publication date
Dec 27, 2001
Mitsubishi Denki Kabushiki Kaisha
Kimio Hagi
H01 - BASIC ELECTRIC ELEMENTS