Kin Pong LO

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Edge ring
- Patent number D1034491
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Kin Pong Lo
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods for calibrating an optical emission spectrometer
- Patent number 11,927,482
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Kin Pong Lo
- G01 - MEASURING TESTING
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film thickness uniformity improvement using edge ring and bias elec...
- Patent number 11,380,575
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Kin Pong Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 11,164,737
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
- Patent number 11,049,719
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Thin film treatment process
- Patent number 10,971,357
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing susceptor
- Patent number 10,930,543
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Light pipe window structure for low pressure thermal processes
- Patent number 10,727,093
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Paul Brillhart
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Upper dome with injection assembly
- Patent number 10,458,040
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Paul Brillhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 10,306,708
- Issue date May 28, 2019
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor design to reduce edge thermal peak
- Patent number 10,269,614
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Schubert S. Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 10,062,598
- Issue date Aug 28, 2018
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Upper dome with injection assembly
- Patent number 9,845,550
- Issue date Dec 19, 2017
- Applied Materials, Inc.
- Paul Brillhart
- C30 - CRYSTAL GROWTH
Information Patent Grant
Absorbing reflector for semiconductor processing chamber
- Patent number 9,832,816
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated apparatus for efficient removal of halogen residues from...
- Patent number 9,735,002
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diffuser with backward facing step having varying step height
- Patent number 9,109,466
- Issue date Aug 18, 2015
- The Board of Trustees of the Leland Stanford Junior University
- Kin Pong Lo
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Grant
Etching chamber having flow equalizer and lower liner
- Patent number 8,313,578
- Issue date Nov 20, 2012
- Applied Materials, Inc.
- James D. Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated method and apparatus for efficient removal of halogen re...
- Patent number 7,655,571
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR CALIBRATING AN OPTICAL EMISSION SPECTROMETER
- Publication number 20240192055
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Kin Pong LO
- G01 - MEASURING TESTING
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Storage Cassette for Replaceable Parts for Plasma Processing Apparatus
- Publication number 20230142778
- Publication date May 11, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
- Publication number 20220301920
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Kin Pong LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR CALIBRATING AN OPTICAL EMISSION SPECTROMETER
- Publication number 20220178747
- Publication date Jun 9, 2022
- Applied Materials, Inc.
- Kin Pong LO
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220059342
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
- Publication number 20220028656
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20210175115
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TREATMENT PROCESS
- Publication number 20200111659
- Publication date Apr 9, 2020
- Applied Materials, Inc.
- Wei LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXY SYSTEM INTEGRATED WITH HIGH SELECTIVITY OXIDE REMOVAL AND H...
- Publication number 20190067006
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY SYSTEM HIGH TEMPERATURE CONTAMINANT REMOVAL
- Publication number 20190062904
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20190066998
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20180366363
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20180084610
- Publication date Mar 22, 2018
- Applied Materials, Inc.
- Kin Pong LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER DOME WITH INJECTION ASSEMBLY
- Publication number 20180066382
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
VACUUM PLATFORM WITH PROCESS CHAMBERS FOR REMOVING CARBON CONTAMINA...
- Publication number 20170350038
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Kin Pong LO
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK
- Publication number 20160133504
- Publication date May 12, 2016
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HONEYCOMB MULTI-ZONE GAS DISTRIBUTION PLATE
- Publication number 20160068955
- Publication date Mar 10, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
RECURSIVE PUMPING MEMBER
- Publication number 20160033070
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- Paul BRILLHART
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER
- Publication number 20150368830
- Publication date Dec 24, 2015
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20150340266
- Publication date Nov 26, 2015
- Applied Materials, Inc.
- Anhthu NGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT PIPE WINDOW STRUCTURE FOR LOW PRESSURE THERMAL PROCESSES
- Publication number 20150340257
- Publication date Nov 26, 2015
- Applied Materials, Inc.
- PAUL BRILLHART
- G02 - OPTICS
Information Patent Application
UPPER DOME WITH INJECTION ASSEMBLY
- Publication number 20150233016
- Publication date Aug 20, 2015
- Applied Materials, Inc.
- Paul BRILLHART
- C30 - CRYSTAL GROWTH
Information Patent Application
ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20140376898
- Publication date Dec 25, 2014
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSER WITH BACKWARD FACING STEP HAVING VARYING STEP HEIGHT
- Publication number 20130019583
- Publication date Jan 24, 2013
- Kin Pong Lo
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...
Information Patent Application
ETCHING CHAMBER HAVING FLOW EQUALIZER AND LOWER LINER
- Publication number 20100065213
- Publication date Mar 18, 2010
- James D. Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING CHAMBER HAVING FLOW EQUALIZER AND LOWER LINER
- Publication number 20090188625
- Publication date Jul 30, 2009
- JAMES D. CARDUCCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM...
- Publication number 20090014324
- Publication date Jan 15, 2009
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHOD AND APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RE...
- Publication number 20080102646
- Publication date May 1, 2008
- Mark Naoshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Kin Pong LO

Person

Patents Grantslast 30 patents

Integrated epitaxy and preclean system

Edge ring

Methods for calibrating an optical emission spectrometer

Thermal processing susceptor

Film thickness uniformity improvement using edge ring and bias elec...

Integrated epitaxy and preclean system

Epitaxy system integrated with high selectivity oxide removal and h...

Thin film treatment process

Thermal processing susceptor

Light pipe window structure for low pressure thermal processes

Upper dome with injection assembly

Absorbing reflector for semiconductor processing chamber

Susceptor design to reduce edge thermal peak

Thermal processing susceptor

Upper dome with injection assembly

Absorbing reflector for semiconductor processing chamber

Integrated apparatus for efficient removal of halogen residues from...

Diffuser with backward facing step having varying step height

Etching chamber having flow equalizer and lower liner

Integrated method and apparatus for efficient removal of halogen re...

Patents Applicationslast 30 patents

METHODS FOR CALIBRATING AN OPTICAL EMISSION SPECTROMETER

THERMAL PROCESSING SUSCEPTOR

Storage Cassette for Replaceable Parts for Plasma Processing Apparatus

FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...

METHODS FOR CALIBRATING AN OPTICAL EMISSION SPECTROMETER

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...

THERMAL PROCESSING SUSCEPTOR

THIN FILM TREATMENT PROCESS

EPITAXY SYSTEM INTEGRATED WITH HIGH SELECTIVITY OXIDE REMOVAL AND H...

INTEGRATED EPITAXY SYSTEM HIGH TEMPERATURE CONTAMINANT REMOVAL

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

THERMAL PROCESSING SUSCEPTOR

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

UPPER DOME WITH INJECTION ASSEMBLY

VACUUM PLATFORM WITH PROCESS CHAMBERS FOR REMOVING CARBON CONTAMINA...

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

HONEYCOMB MULTI-ZONE GAS DISTRIBUTION PLATE

RECURSIVE PUMPING MEMBER

ONE-PIECE INJECTOR ASSEMBLY AND ONE-PIECE EXHAUST LINER

THERMAL PROCESSING SUSCEPTOR

LIGHT PIPE WINDOW STRUCTURE FOR LOW PRESSURE THERMAL PROCESSES

UPPER DOME WITH INJECTION ASSEMBLY

ABSORBING REFLECTOR FOR SEMICONDUCTOR PROCESSING CHAMBER

DIFFUSER WITH BACKWARD FACING STEP HAVING VARYING STEP HEIGHT

ETCHING CHAMBER HAVING FLOW EQUALIZER AND LOWER LINER

ETCHING CHAMBER HAVING FLOW EQUALIZER AND LOWER LINER

INTEGRATED APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RESIDUES FROM...

INTEGRATED METHOD AND APPARATUS FOR EFFICIENT REMOVAL OF HALOGEN RE...