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Kinya Miyashita
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate suction apparatus and method for manufacturing the same
Patent number
8,469,342
Issue date
Jun 25, 2013
Creative Technology Corporation
Yoshiaki Tatsumi
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Bipolar electrostatic chuck
Patent number
8,238,072
Issue date
Aug 7, 2012
Creative Technology Corporation
Hiroshi Fujisawa
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Apparatus for removing foreign material from substrate and method f...
Patent number
8,196,594
Issue date
Jun 12, 2012
Creative Technology Corporation
Riichiro Harano
B08 - CLEANING
Information
Patent Grant
Electrostatic chuck and electrode sheet for electrostatic chuck
Patent number
8,158,238
Issue date
Apr 17, 2012
Creative Technology Corporation
Kinya Miyashita
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Method of manufacturing an electrostatic chuck
Patent number
8,051,548
Issue date
Nov 8, 2011
Creative Technology Corporation
Kinya Miyashita
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Feeding structure of electrostatic chuck, method for producing the...
Patent number
8,027,171
Issue date
Sep 27, 2011
Creative Technology Corporation
Kinya Miyashita
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrode sheet for electrostatic chuck, and electrostatic chuck
Patent number
7,881,036
Issue date
Feb 1, 2011
Creative Technology Corporation
Hiroshi Fujisawa
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Bipolar electrostatic chuck
Patent number
7,567,421
Issue date
Jul 28, 2009
Creative Technology Corporation
Kinya Miyashita
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chucking device and manufacturing method thereof
Patent number
7,411,773
Issue date
Aug 12, 2008
Creative Technology Corporation
Yoshiaki Tatsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aluminium composite structure having a channel therein and method o...
Patent number
7,300,707
Issue date
Nov 27, 2007
Creative Technology Corporation
Kinya Miyashita
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Electrostatic chucking device and manufacturing method thereof
Patent number
6,813,134
Issue date
Nov 2, 2004
Creative Technology Corporation
Yoshiaki Tatsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Static electricity chuck and wafer stage
Patent number
5,981,913
Issue date
Nov 9, 1999
Sony Corporation
Shingo Kadomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer stage for manufacturing a semiconductor device
Patent number
5,968,273
Issue date
Oct 19, 1999
Sony Corporation
Shingo Kadomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shaping mold for making ultra-thin shaped rubber articles
Patent number
5,667,822
Issue date
Sep 16, 1997
Sohzohkagaku Co., Ltd.
Tomoyuki Hayashi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method of using a shaping mold for making ultra-thin shaped rubber...
Patent number
5,595,704
Issue date
Jan 21, 1997
Sohzohkagaku Co., Ltd.
Tomoyuki Hayashi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MANUFACTURING GAS SUPPLY STRUCTURE IN ELECTROSTATIC CHUC...
Publication number
20100254064
Publication date
Oct 7, 2010
Kinya Miyashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUCTION APPARATUS AND METHOD FOR MANUFACTURING THE SAME
Publication number
20100194012
Publication date
Aug 5, 2010
CREATIVE TECHNOLOGY CORPORATION
Yoshiaki Tatsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIPOLAR ELECTROSTATIC CHUCK
Publication number
20100149720
Publication date
Jun 17, 2010
Hiroshi Fujisawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEEDING STRUCTURE OF ELECTROSTATIC CHUCK, METHOD FOR PRODUCING THE...
Publication number
20100065300
Publication date
Mar 18, 2010
Kinya Miyashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for removing foreign material from substrate and method f...
Publication number
20090250077
Publication date
Oct 8, 2009
Riichiro Harano
B08 - CLEANING
Information
Patent Application
Electrode Sheet for Electrostatic Chuck, and Electrostatic Chuck
Publication number
20090040681
Publication date
Feb 12, 2009
Hiroshi Fujisawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic Chuck and Electrode Sheet for Electrostatic Chuck
Publication number
20090041980
Publication date
Feb 12, 2009
CREATIVE TECHNOLOGY CORPORATION
Kinya Miyashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bipolar Electrostatic Chuck
Publication number
20070223173
Publication date
Sep 27, 2007
Hiroshi Fujisawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Aluminium composite structure having a channel therein and method o...
Publication number
20060086475
Publication date
Apr 27, 2006
Creative Technology Corporation
Kinya Miyashita
B22 - CASTING POWDER METALLURGY
Information
Patent Application
Electrostatic chucking device and manufacturing method thereof
Publication number
20040160021
Publication date
Aug 19, 2004
Creative Technology Corporation and Kawamura Sangyo Co., Ltd.
Yoshiaki Tatsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chucking device and manufacturing method thereof
Publication number
20020021545
Publication date
Feb 21, 2002
Creative Technology Corp.
Yoshiaki Tatsumi
H01 - BASIC ELECTRIC ELEMENTS