Kinya Usuda

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 5,051,338
- Issue date Sep 24, 1991
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming pattern and apparatus for implementing the same
- Patent number 4,976,810
- Issue date Dec 11, 1990
- Kabushiki Kaisha Toshiba
- Satoshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,897,337
- Issue date Jan 30, 1990
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming resist pattern
- Patent number 4,840,874
- Issue date Jun 20, 1989
- Kabushiki Kaisha Toshiba
- Fumiaki Shigemitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern developing process and apparatus therefor
- Patent number 4,755,442
- Issue date Jul 5, 1988
- Kabushiki Kaisha Toshiba
- Hiroyuki Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automatic developing apparatus
- Patent number 4,745,422
- Issue date May 17, 1988
- Kabushiki Kaisha Toshiba
- Yasuo Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for forming resist pattern
- Patent number 4,717,645
- Issue date Jan 5, 1988
- Tokyo Shibaura Denki Kabushiki Kaisha
- Yoshihide Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Kinya Usuda

Person

Patents Grantslast 30 patents

Method and apparatus for forming resist pattern

Method of forming pattern and apparatus for implementing the same

Method and apparatus for forming resist pattern

Method of forming resist pattern

Pattern developing process and apparatus therefor

Automatic developing apparatus

Method and apparatus for forming resist pattern