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Kiwamu Tsukamoto

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  • Fujisawa-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Inspection device
    • Patent number 10,157,722
    • Issue date Dec 18, 2018
    • Ebara Corporation
    • Masahiro Hatakeyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Surface processing apparatus
    • Patent number 9,852,878
    • Issue date Dec 26, 2017
    • Ebara Corporation
    • Masahiro Hatakeyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inspection apparatus
    • Patent number 9,601,302
    • Issue date Mar 21, 2017
    • Ebara Corporation
    • Shoji Yoshikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inspection apparatus
    • Patent number 9,134,261
    • Issue date Sep 15, 2015
    • Ebara Corporation
    • Shoji Yoshikawa
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Electro-optical inspection apparatus and method with dust or partic...
    • Patent number 9,105,444
    • Issue date Aug 11, 2015
    • Ebara Corporation
    • Kenji Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inspection apparatus
    • Patent number 8,946,629
    • Issue date Feb 3, 2015
    • Ebara Corporation
    • Masahiro Hatakeyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inspection apparatus
    • Patent number 8,742,344
    • Issue date Jun 3, 2014
    • Ebara Corporation
    • Masahiro Hatakeyama
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Electro-optical inspection apparatus and method with dust or partic...
    • Patent number 8,624,182
    • Issue date Jan 7, 2014
    • Ebara Corporation
    • Kenji Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Inspection device
    • Patent number 8,497,476
    • Issue date Jul 30, 2013
    • Ebara Corporation
    • Masahiro Hatakeyama
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Positive displacement type liquid-delivery apparatus
    • Patent number 6,419,462
    • Issue date Jul 16, 2002
    • Ebara Corporation
    • Kuniaki Horie
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Grant

    Apparatus and method for processing substrate
    • Patent number 6,387,182
    • Issue date May 14, 2002
    • Ebara Corporation
    • Kuniaki Horie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin-film deposition apparatus
    • Patent number 6,176,929
    • Issue date Jan 23, 2001
    • Ebara Corporation
    • Yukio Fukunaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Valving device
    • Patent number 6,116,267
    • Issue date Sep 12, 2000
    • Ebara Corporation
    • Hidenao Suzuki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Grant

    Thin-film vapor deposition apparatus
    • Patent number 6,022,413
    • Issue date Feb 8, 2000
    • Ebara Corporation
    • Hiroyuki Shinozaki
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Vapor feed supply system
    • Patent number 5,950,646
    • Issue date Sep 14, 1999
    • Ebara Corporation
    • Kuniaki Horie
    • B08 - CLEANING
  • Information Patent Grant

    Reactant gas ejector head
    • Patent number 5,950,925
    • Issue date Sep 14, 1999
    • Ebara Corporation
    • Yukio Fukunaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin-film vapor deposition apparatus
    • Patent number 5,935,337
    • Issue date Aug 10, 1999
    • Ebara Corporation
    • Noriyuki Takeuchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactant gas ejector head and thin-film vapor deposition apparatus
    • Patent number 5,728,223
    • Issue date Mar 17, 1998
    • Ebara Corporation
    • Takeshi Murakami
    • C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents