Kiyohito Iijima

Person

Nirasaki-Shi Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,069,548
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Toru Nishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 10,403,525
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Toru Nishino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cleaning method for substrate processing system, storage medium, an...
- Patent number 8,382,910
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Masahiro Numakura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate transfer method adopte...
- Patent number 8,145,339
- Issue date Mar 27, 2012
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and control method of plasma processing system, and...
- Patent number 8,055,368
- Issue date Nov 8, 2011
- Tokyo Electron Limited
- Kiyohito Iijima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for cleaning substrate processing apparatus, substrate proce...
- Patent number 7,846,257
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Hiroshi Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control device and method for a substrate processing apparatus
- Patent number 7,681,055
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Kiyohito Iijima
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool and transfer control method
- Patent number 7,245,987
- Issue date Jul 17, 2007
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system and method of transferring workpiece
- Patent number 6,983,195
- Issue date Jan 3, 2006
- Tokyo Electron Limited
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20190362996
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Toru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180061692
- Publication date Mar 1, 2018
- TOKYO ELECTRON LIMITED
- Toru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND STORAGE MEDIUM
- Publication number 20100089423
- Publication date Apr 15, 2010
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF MANAGING APPARATUS...
- Publication number 20100087944
- Publication date Apr 8, 2010
- TOKYO ELECTRON LIMITED
- Noriaki Kanaya
- G05 - CONTROLLING REGULATING
Information Patent Application
CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...
- Publication number 20100010658
- Publication date Jan 14, 2010
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...
- Publication number 20090269171
- Publication date Oct 29, 2009
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD FOR SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM, AN...
- Publication number 20090229635
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Masahiro NUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD OF SUBSTRATE PROCESSING EQUIPMENT, SUBSTRATE PROCES...
- Publication number 20070215180
- Publication date Sep 20, 2007
- TOKYO ELECTRON LIMITED
- Kiyohito IIJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE AND METHOD FOR A SUBSTRATE PROCESSING APPARATUS
- Publication number 20070213864
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Kiyohito Iijima
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCE...
- Publication number 20070131253
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B08 - CLEANING
Information Patent Application
Cluster tool and transfer control method
- Publication number 20050220577
- Publication date Oct 6, 2005
- TOKYO ELECTRON LIMITED
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool and method for controlling transport
- Publication number 20040117059
- Publication date Jun 17, 2004
- Kiyohito IIjima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of transferring processed body and processing system for pro...
- Publication number 20040043513
- Publication date Mar 4, 2004
- Shigeru Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system and method of transferring workpiece
- Publication number 20040029300
- Publication date Feb 12, 2004
- Kiyohito Iijima
- H01 - BASIC ELECTRIC ELEMENTS

Kiyohito Iijima

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing system

Substrate processing method and substrate processing system

Cleaning method for substrate processing system, storage medium, an...

Substrate processing apparatus and substrate transfer method adopte...

Control device and control method of plasma processing system, and...

Method for cleaning substrate processing apparatus, substrate proce...

Control device and method for a substrate processing apparatus

Cluster tool and transfer control method

Semiconductor processing system and method of transferring workpiece

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

CLEANING METHOD AND STORAGE MEDIUM

SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD OF MANAGING APPARATUS...

CONTROL DEVICE AND CONTROL METHOD OF PLASMA PROCESSING SYSTEM, AND...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...

CLEANING METHOD FOR SUBSTRATE PROCESSING SYSTEM, STORAGE MEDIUM, AN...

CLEANING METHOD OF SUBSTRATE PROCESSING EQUIPMENT, SUBSTRATE PROCES...

CONTROL DEVICE AND METHOD FOR A SUBSTRATE PROCESSING APPARATUS

METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCE...

Cluster tool and transfer control method

Cluster tool and method for controlling transport

Method of transferring processed body and processing system for pro...

Semiconductor processing system and method of transferring workpiece