Kiyohito Ito

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Treatment method
- Patent number 11,728,176
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Kiyohito Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and substrate processing apparatus
- Patent number 11,380,545
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Shota Yoshimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method
- Patent number 10,950,458
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,886,138
- Issue date Jan 5, 2021
- Tokyo Electron Limited
- Timothy Tianshyun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 8,232,207
- Issue date Jul 31, 2012
- Tokyo Electron Limited
- Kosuke Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TREATMENT METHOD
- Publication number 20210313187
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Kiyohito ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200144051
- Publication date May 7, 2020
- TOKYO ELECTRON LIMITED
- Shota YOSHIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190355588
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Timothy Tianshyun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20190214269
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Yasutaka Hama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20100167549
- Publication date Jul 1, 2010
- TOKYO ELECTRON LIMITED
- Kosuke OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing method
- Publication number 20040222190
- Publication date Nov 11, 2004
- TOKYO ELECTRON LIMITED
- Katsumi Horiguchi
- H01 - BASIC ELECTRIC ELEMENTS