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Kiyomitsu Yamaguchi
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Kumamoto-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Heat-treating apparatus, heat-treating method and storage medium
Patent number
8,222,569
Issue date
Jul 17, 2012
Tokyo Electron Limited
Yuichi Sakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,770,149
Issue date
Aug 3, 2004
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,398,879
Issue date
Jun 4, 2002
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,391,110
Issue date
May 21, 2002
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and apparatus for cleaning treatment
Patent number
6,159,288
Issue date
Dec 12, 2000
Tokyo Electron Limited
Fumio Satou
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Treatment device
Patent number
6,062,240
Issue date
May 16, 2000
Tokyo Electron Limited
Tetsuya Sada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for supplying process solution to surface of s...
Patent number
5,945,161
Issue date
Aug 31, 1999
Tokyo Electron Limited
Hiroshi Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating a substrate with resist and resist-treating...
Patent number
5,906,860
Issue date
May 25, 1999
Tokyo Electron Limited
Kimio Motoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
HEAT-TREATING APPARATUS, HEAT-TREATING METHOD AND STORAGE MEDIUM
Publication number
20090098297
Publication date
Apr 16, 2009
TOKYO ELECTRON LIMITED
Yuichi SAKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for cleaning treatment
Publication number
20020162574
Publication date
Nov 7, 2002
Fumio Satou
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC