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Klaus Becker
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Kensington, NH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Cyclotron having continuously variable energy output
Patent number
12,106,925
Issue date
Oct 1, 2024
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drift tube electrode arrangement having direct current optics
Patent number
12,096,548
Issue date
Sep 17, 2024
Applied Materials, Inc.
Wai-Ming Tam
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Shield for filament in an ion source
Patent number
12,046,443
Issue date
Jul 23, 2024
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced sputter targets for ion generation
Patent number
11,542,594
Issue date
Jan 3, 2023
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insertable target holder for solid dopant materials
Patent number
11,404,254
Issue date
Aug 2, 2022
Varian Semiconductor Equipment Associates, Inc.
Shreyansh Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced sputter targets for ion generation
Patent number
11,008,649
Issue date
May 18, 2021
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion source with multiple configurations
Patent number
10,896,799
Issue date
Jan 19, 2021
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for decelerated ion beam with no energy co...
Patent number
10,692,697
Issue date
Jun 23, 2020
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source crucible for solid feed materials
Patent number
10,600,611
Issue date
Mar 24, 2020
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source for enhanced ionization
Patent number
10,290,461
Issue date
May 14, 2019
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for decelerated ion beam with no energy co...
Patent number
10,147,584
Issue date
Dec 4, 2018
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source for multiple charged species
Patent number
9,818,570
Issue date
Nov 14, 2017
Varian Semiconductor Equipment Associates, Inc.
Daniel Alvarado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrode, accelerator column and ion implantation apparatus includ...
Patent number
9,807,864
Issue date
Oct 31, 2017
Varian Semiconductor Equipment Associates Inc.
Christopher Lupoli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source for enhanced ionization
Patent number
9,691,584
Issue date
Jun 27, 2017
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Current limiter for high voltage power supply used with ion implant...
Patent number
8,766,209
Issue date
Jul 1, 2014
Varian Semiconductor Equipment Associates, Inc.
Klaus Becker
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Conductive contamination resistant insulator
Patent number
8,227,772
Issue date
Jul 24, 2012
Varian Semiconductor Equipment Associates, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combination load lock for handling workpieces
Patent number
7,828,504
Issue date
Nov 9, 2010
Axcellis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-cost electrostatic clamp with fast de-clamp time
Patent number
7,714,406
Issue date
May 11, 2010
Axcelis Technologies, Inc.
Marvin Raymond LaFontaine
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Ion source for use in an ion implanter
Patent number
7,105,840
Issue date
Sep 12, 2006
Axcelis Technologies, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam measurement systems and methods for ion implant dose and u...
Patent number
6,992,309
Issue date
Jan 31, 2006
Axcelis Technologies, Inc.
Klaus Petry
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DRIFT TUBE ELECTRODE ARRANGEMENT HAVING DIRECT CURRENT OPTICS
Publication number
20240098871
Publication date
Mar 21, 2024
Applied Materials, Inc.
Wai-Ming Tam
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT
Publication number
20230207247
Publication date
Jun 29, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shield For Filament In An Ion Source
Publication number
20230162941
Publication date
May 25, 2023
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced Sputter Targets For Ion Generation
Publication number
20210238732
Publication date
Aug 5, 2021
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Advanced Sputter Targets For Ion Generation
Publication number
20200157675
Publication date
May 21, 2020
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Insertable Target Holder For Solid Dopant Materials
Publication number
20200090916
Publication date
Mar 19, 2020
Varian Semiconductor Equipment Associates, Inc.
Shreyansh Patel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source Crucible For Solid Feed Materials
Publication number
20190180971
Publication date
Jun 13, 2019
Applied Materials, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source For Enhanced Ionization
Publication number
20190122851
Publication date
Apr 25, 2019
Varian Semiconductor Equipment Associates, Inc.
Daniel R. Tieger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR DECELERATED ION BEAM WITH NO ENERGY CO...
Publication number
20190051493
Publication date
Feb 14, 2019
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR DECELERATED ION BEAM WITH NO ENERGY CO...
Publication number
20180269033
Publication date
Sep 20, 2018
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source For Multiple Charged Species
Publication number
20170117113
Publication date
Apr 27, 2017
Varian Semiconductor Equipment Associates, Inc.
Daniel Alvarado
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CURRENT LIMITER FOR HIGH VOLTAGE POWER SUPPLY USED WITH ION IMPLANT...
Publication number
20130020940
Publication date
Jan 24, 2013
Varian Semiconductor Equipment Associates, Inc.
Klaus Becker
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Conductive Contamination Resistant Insulator
Publication number
20100108915
Publication date
May 6, 2010
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW-COST ELECTROSTATIC CLAMP WITH FAST DE-CLAMP TIME
Publication number
20080100984
Publication date
May 1, 2008
Marvin Raymond LaFontaine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Combination load lock for handling workpieces
Publication number
20070264105
Publication date
Nov 15, 2007
Axcelis Technologies Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION SOURCE FOR USE IN AN ION IMPLANTER
Publication number
20060169921
Publication date
Aug 3, 2006
Axcelis Technologies, Inc.
Klaus Becker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANT DOSE AND U...
Publication number
20060033045
Publication date
Feb 16, 2006
Klaus Petry
H01 - BASIC ELECTRIC ELEMENTS