Klaus Edinger

Person

Lorsch, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatuses for disposing of excess material of a photol...
- Patent number 12,164,226
- Issue date Dec 10, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- B08 - CLEANING
Information Patent Grant
Apparatus and method for removing a single particulate from a subst...
- Patent number 11,886,126
- Issue date Jan 30, 2024
- Carl Zeiss SMT GmbH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatuses for disposing of excess material of a photol...
- Patent number 11,874,598
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- B08 - CLEANING
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and method for examining a surface with a...
- Patent number 10,119,990
- Issue date Nov 6, 2018
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing and for removing a defect of an...
- Patent number 10,060,947
- Issue date Aug 28, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for examining a surface of a mask
- Patent number 9,910,065
- Issue date Mar 6, 2018
- Carl Zeiss SMT GmbH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,236,225
- Issue date Jan 12, 2016
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Perforated membranes
- Patent number 9,186,630
- Issue date Nov 17, 2015
- Universitat Bielefeld
- Armin Gölzhäuser
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for investigating an object
- Patent number 9,115,981
- Issue date Aug 25, 2015
- Carl Zeiss SMS GmbH
- Christof Baur
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for electron beam induced etching
- Patent number 9,023,666
- Issue date May 5, 2015
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 9,012,867
- Issue date Apr 21, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for analyzing and modifying a specimen surface
- Patent number 8,769,709
- Issue date Jul 1, 2014
- Carl Zeiss SMS GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,748,845
- Issue date Jun 10, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for analyzing and/or repairing of an EUV mask...
- Patent number 8,674,329
- Issue date Mar 18, 2014
- Carl Zeiss SMS GmbH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for electron beam induced etching of layers contaminated wit...
- Patent number 8,632,687
- Issue date Jan 21, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for removing a material from a sample
- Patent number 8,623,230
- Issue date Jan 7, 2014
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for electron beam induced deposition of conductive material
- Patent number 8,318,593
- Issue date Nov 27, 2012
- Carl Zeiss SMS GmbH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for investigating and/or modifying a sample
- Patent number 8,247,782
- Issue date Aug 21, 2012
- Carl Zeiss SMS GmbH
- Klaus Edinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion sources, systems and methods
- Patent number 8,110,814
- Issue date Feb 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for high-resolution processing of thin layers using electron...
- Patent number 7,786,403
- Issue date Aug 31, 2010
- Nawo Tec GmbH
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Procedure for etching of materials at the surface with focussed ele...
- Patent number 7,537,708
- Issue date May 26, 2009
- NaWoTec GmbH
- Hans Wilfried Peter Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
- Patent number 7,485,873
- Issue date Feb 3, 2009
- ALIS Corporation
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Procedure for etching of materials at the surface with focussed ele...
- Patent number 7,452,477
- Issue date Nov 18, 2008
- NaWoTec GmbH
- Hans Wilfried Peter Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Procedure for etching of materials at the surface with focussed ele...
- Patent number 7,238,294
- Issue date Jul 3, 2007
- NaWoTec GmbH
- Hans Wilfried Peter Koops
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for investigating or modifying a surface with...
- Patent number 7,232,997
- Issue date Jun 19, 2007
- NaWoTec GmbH
- Klaus Edinger
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20240295833
- Publication date Sep 5, 2024
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317564
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317565
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220299864
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20220011682
- Publication date Jan 13, 2022
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20210247336
- Publication date Aug 12, 2021
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20200103751
- Publication date Apr 2, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...
- Publication number 20180106831
- Publication date Apr 19, 2018
- Carl Zeiss SMT GMBH
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20170292923
- Publication date Oct 12, 2017
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- G02 - OPTICS
Information Patent Application
SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A...
- Publication number 20170102407
- Publication date Apr 13, 2017
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING A SURFACE OF A MASK
- Publication number 20160341763
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Michael Budach
- G01 - MEASURING TESTING
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20150213997
- Publication date Jul 30, 2015
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...
- Publication number 20140165236
- Publication date Jun 12, 2014
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR INVESTIGATING AN OBJECT
- Publication number 20140027512
- Publication date Jan 30, 2014
- Christof Baur
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE
- Publication number 20140007306
- Publication date Jan 2, 2014
- Christof Baur
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING AND/OR REPAIRING OF AN EUV MASK...
- Publication number 20130156939
- Publication date Jun 20, 2013
- Michael Budach
- B82 - NANO-TECHNOLOGY
Information Patent Application
PERFORATED MEMBRANES
- Publication number 20120138535
- Publication date Jun 7, 2012
- UNIVERSITAT BIELEFELD
- Armin Gölzhäuser
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120141693
- Publication date Jun 7, 2012
- ALIS Corporation
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR INVESTIGATING AND/OR MODIFYING A SAMPLE
- Publication number 20110210181
- Publication date Sep 1, 2011
- CARL ZEISS SMS GMBH
- Klaus Edinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING
- Publication number 20110183444
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL
- Publication number 20110183517
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...
- Publication number 20110183523
- Publication date Jul 28, 2011
- CARL ZEISS SMS GMBH
- Nicole Auth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
- Publication number 20100297362
- Publication date Nov 25, 2010
- CARL ZEISS SMS GMBH
- Michael Budach
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE
- Publication number 20100282596
- Publication date Nov 11, 2010
- NAWOTEC GMBH
- Nicole Auth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20090179161
- Publication date Jul 16, 2009
- ALIS Corporation
- BILLY W. WARD
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCEDURE FOR ETCHING OF MATERIALS AT THE SURFACE WITH FOCUSSED ELE...
- Publication number 20080011718
- Publication date Jan 17, 2008
- Hans Wilfried Peter Koops
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ion sources, systems and methods
- Publication number 20070194251
- Publication date Aug 23, 2007
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for investigating or modifying a surface with...
- Publication number 20050230621
- Publication date Oct 20, 2005
- Klaus Edinger
- G01 - MEASURING TESTING
Information Patent Application
Method for high-resolution processing of thin layers using electron...
- Publication number 20050087514
- Publication date Apr 28, 2005
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Klaus Edinger

Person

Patents Grantslast 30 patents

Method and apparatuses for disposing of excess material of a photol...

Apparatus and method for removing a single particulate from a subst...

Method and apparatuses for disposing of excess material of a photol...

Device and method for analyzing a defect of a photolithographic mas...

Device and method for analysing a defect of a photolithographic mas...

Scanning probe microscope and method for examining a surface with a...

Method and apparatus for analyzing and for removing a defect of an...

Apparatus and method for examining a surface of a mask

Ion sources, systems and methods

Perforated membranes

Apparatus and method for investigating an object

Method for electron beam induced etching

Ion sources, systems and methods

Apparatus and method for analyzing and modifying a specimen surface

Ion sources, systems and methods

Method and apparatus for analyzing and/or repairing of an EUV mask...

Method for electron beam induced etching of layers contaminated wit...

Methods and systems for removing a material from a sample

Method for electron beam induced deposition of conductive material

Apparatus and method for investigating and/or modifying a sample

Ion sources, systems and methods

Method for high-resolution processing of thin layers using electron...

Procedure for etching of materials at the surface with focussed ele...

Ion sources, systems and methods

Procedure for etching of materials at the surface with focussed ele...

Procedure for etching of materials at the surface with focussed ele...

Apparatus and method for investigating or modifying a surface with...

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A...

APPARATUS AND METHOD FOR EXAMINING A SURFACE OF A MASK

ION SOURCES, SYSTEMS AND METHODS

ION SOURCES, SYSTEMS AND METHODS

METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN...

APPARATUS AND METHOD FOR INVESTIGATING AN OBJECT

APPARATUS AND METHOD FOR ANALYZING AND MODIFYING A SPECIMEN SURFACE

METHOD AND APPARATUS FOR ANALYZING AND/OR REPAIRING OF AN EUV MASK...

PERFORATED MEMBRANES

ION SOURCES, SYSTEMS AND METHODS

APPARATUS AND METHOD FOR INVESTIGATING AND/OR MODIFYING A SAMPLE

METHOD FOR ELECTRON BEAM INDUCED ETCHING

METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL

METHOD FOR ELECTRON BEAM INDUCED ETCHING OF LAYERS CONTAMINATED WIT...

METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES

METHODS AND SYSTEMS FOR REMOVING A MATERIAL FROM A SAMPLE

ION SOURCES, SYSTEMS AND METHODS

PROCEDURE FOR ETCHING OF MATERIALS AT THE SURFACE WITH FOCUSSED ELE...

Ion sources, systems and methods

Apparatus and method for investigating or modifying a surface with...

Method for high-resolution processing of thin layers using electron...