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Patents Grantslast 30 patents

Information Patent Grant
Substrate support
- Patent number 11,791,139
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Shin Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS
- Publication number 20240222091
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Koei ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND INNER CHAMBER
- Publication number 20230131199
- Publication date Apr 27, 2023
- TOKYO ELECTRON LIMITED
- Koei ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD FOR SUBSTRATE...
- Publication number 20230071478
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Hiroki Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20220285138
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Shin YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS