Kohsaku Yano

Person

Higashiosaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device having a double-layer interconnection structure
- Patent number 5,327,012
- Issue date Jul 5, 1994
- Matsushita Electric Industrial Co., Ltd.
- Kohsaku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices having a double-layer interconnection structure
- Patent number 5,198,884
- Issue date Mar 30, 1993
- Matsushita Electric Industrial Co., Ltd.
- Kohsaku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma film deposition system
- Patent number 5,180,436
- Issue date Jan 19, 1993
- Matsushita Electric Industrial Co., Ltd.
- Tetsuya Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor memory device
- Patent number 5,132,748
- Issue date Jul 21, 1992
- Matsushita Electric Industrial Co., Ltd.
- Kohsaku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma film deposition system
- Patent number 5,125,358
- Issue date Jun 30, 1992
- Matsushita Electric Industrial Co., Ltd.
- Tetsuya Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for dry etching
- Patent number 5,076,877
- Issue date Dec 31, 1991
- Matsushita Electric Industrial Co., Ltd.
- Tetsuya Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor device by filling hollows with...
- Patent number 4,977,104
- Issue date Dec 11, 1990
- Matsushita Electric Industrial Co., Ltd.
- Kazuyuki Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid state imager
- Patent number 4,661,830
- Issue date Apr 28, 1987
- Matsushita Electric Industrial Co., Ltd.
- Yoshio Ohta
- H01 - BASIC ELECTRIC ELEMENTS

Kohsaku Yano

Person

Patents Grantslast 30 patents

Semiconductor device having a double-layer interconnection structure

Semiconductor devices having a double-layer interconnection structure

Microwave plasma film deposition system

Semiconductor memory device

Microwave plasma film deposition system

Apparatus for dry etching

Method for producing a semiconductor device by filling hollows with...

Solid state imager